3/30/2012	8:20:34 AM	Helium valve closed
3/30/2012	8:20:34 AM	H2 valve closed
3/30/2012	8:20:34 AM	BCl3 valve closed
3/30/2012	8:20:34 AM	PH3 valve closed
3/30/2012	8:20:34 AM	SiCl4 pre valve closed
3/30/2012	8:20:34 AM	SiCl4 post valve closed
3/30/2012	8:20:34 AM	Main Vac valve closed
3/30/2012	8:20:34 AM	Bypass valve closed
3/30/2012	8:20:34 AM	Bubbler valve closed
3/30/2012	8:20:34 AM	Helium MFC set to  0.000000
3/30/2012	8:20:34 AM	H2 MFC set to  0.000000
3/30/2012	8:20:34 AM	BCl3 MFC set to  0.000000
3/30/2012	8:20:34 AM	PH3 MFC set to  0.000000
3/30/2012	8:20:34 AM	SiCl4 MFC set to  0.000000
3/30/2012	8:20:34 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	8:20:34 AM	Tube furnace set to 0
3/30/2012	8:20:37 AM	Helium valve closed
3/30/2012	8:20:37 AM	BCl3 valve closed
3/30/2012	8:20:37 AM	PH3 valve closed
3/30/2012	8:20:37 AM	SiCl4 pre valve closed
3/30/2012	8:20:37 AM	SiCl4 post valve closed
3/30/2012	8:20:37 AM	Main Vac valve closed
3/30/2012	8:20:37 AM	Bypass valve closed
3/30/2012	8:20:37 AM	Bubbler valve closed
3/30/2012	8:20:37 AM	H2 valve opened
3/30/2012	8:20:37 AM	Helium MFC set to  0.000000
3/30/2012	8:20:37 AM	H2 MFC set to  500.000000
3/30/2012	8:20:37 AM	BCl3 MFC set to  0.000000
3/30/2012	8:20:37 AM	PH3 MFC set to  0.000000
3/30/2012	8:20:37 AM	SiCl4 MFC set to  0.000000
3/30/2012	8:20:37 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	8:20:38 AM	Tube furnace set to 0
3/30/2012	8:21:46 AM	Helium valve closed
3/30/2012	8:21:46 AM	BCl3 valve closed
3/30/2012	8:21:46 AM	PH3 valve closed
3/30/2012	8:21:46 AM	SiCl4 pre valve closed
3/30/2012	8:21:46 AM	SiCl4 post valve closed
3/30/2012	8:21:46 AM	Main Vac valve closed
3/30/2012	8:21:46 AM	Bypass valve closed
3/30/2012	8:21:46 AM	H2 valve opened
3/30/2012	8:21:46 AM	Bubbler valve opened
3/30/2012	8:21:46 AM	Helium MFC set to  0.000000
3/30/2012	8:21:46 AM	H2 MFC set to  500.000000
3/30/2012	8:21:46 AM	BCl3 MFC set to  0.000000
3/30/2012	8:21:46 AM	PH3 MFC set to  0.000000
3/30/2012	8:21:46 AM	SiCl4 MFC set to  0.000000
3/30/2012	8:21:46 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	8:21:46 AM	Tube furnace set to 0
3/30/2012	8:21:47 AM	Helium valve closed
3/30/2012	8:21:47 AM	BCl3 valve closed
3/30/2012	8:21:47 AM	PH3 valve closed
3/30/2012	8:21:47 AM	SiCl4 pre valve closed
3/30/2012	8:21:47 AM	SiCl4 post valve closed
3/30/2012	8:21:47 AM	Main Vac valve closed
3/30/2012	8:21:47 AM	Bypass valve closed
3/30/2012	8:21:47 AM	H2 valve opened
3/30/2012	8:21:47 AM	Bubbler valve opened
3/30/2012	8:21:47 AM	Helium MFC set to  0.000000
3/30/2012	8:21:47 AM	H2 MFC set to  450.000000
3/30/2012	8:21:47 AM	BCl3 MFC set to  0.000000
3/30/2012	8:21:47 AM	PH3 MFC set to  0.000000
3/30/2012	8:21:47 AM	SiCl4 MFC set to  0.000000
3/30/2012	8:21:47 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	8:21:47 AM	Tube furnace set to 1000
3/30/2012	8:46:47 AM	Helium valve closed
3/30/2012	8:46:47 AM	PH3 valve closed
3/30/2012	8:46:47 AM	Main Vac valve closed
3/30/2012	8:46:47 AM	Bypass valve closed
3/30/2012	8:46:47 AM	H2 valve opened
3/30/2012	8:46:47 AM	BCl3 valve opened
3/30/2012	8:46:47 AM	SiCl4 pre valve opened
3/30/2012	8:46:47 AM	SiCl4 post valve opened
3/30/2012	8:46:47 AM	Bubbler valve opened
3/30/2012	8:46:47 AM	Helium MFC set to  0.000000
3/30/2012	8:46:47 AM	H2 MFC set to  450.000000
3/30/2012	8:46:47 AM	BCl3 MFC set to  20.000000
3/30/2012	8:46:47 AM	PH3 MFC set to  0.000000
3/30/2012	8:46:47 AM	SiCl4 MFC set to  50.000000
3/30/2012	8:46:47 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	8:46:47 AM	Tube furnace set to 1000
3/30/2012	8:51:47 AM	Helium valve closed
3/30/2012	8:51:47 AM	BCl3 valve closed
3/30/2012	8:51:47 AM	PH3 valve closed
3/30/2012	8:51:47 AM	SiCl4 pre valve closed
3/30/2012	8:51:47 AM	SiCl4 post valve closed
3/30/2012	8:51:47 AM	Main Vac valve closed
3/30/2012	8:51:47 AM	Bypass valve closed
3/30/2012	8:51:47 AM	H2 valve opened
3/30/2012	8:51:47 AM	Bubbler valve opened
3/30/2012	8:51:47 AM	Helium MFC set to  0.000000
3/30/2012	8:51:47 AM	H2 MFC set to  500.000000
3/30/2012	8:51:47 AM	BCl3 MFC set to  0.000000
3/30/2012	8:51:47 AM	PH3 MFC set to  0.000000
3/30/2012	8:51:47 AM	SiCl4 MFC set to  0.000000
3/30/2012	8:51:47 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	8:51:48 AM	Tube furnace set to 750
3/30/2012	8:56:48 AM	H2 valve closed
3/30/2012	8:56:48 AM	BCl3 valve closed
3/30/2012	8:56:48 AM	PH3 valve closed
3/30/2012	8:56:48 AM	SiCl4 pre valve closed
3/30/2012	8:56:48 AM	SiCl4 post valve closed
3/30/2012	8:56:48 AM	Main Vac valve closed
3/30/2012	8:56:48 AM	Bypass valve closed
3/30/2012	8:56:48 AM	Helium valve opened
3/30/2012	8:56:48 AM	Bubbler valve opened
3/30/2012	8:56:48 AM	Helium MFC set to  500.000000
3/30/2012	8:56:48 AM	H2 MFC set to  0.000000
3/30/2012	8:56:48 AM	BCl3 MFC set to  0.000000
3/30/2012	8:56:48 AM	PH3 MFC set to  0.000000
3/30/2012	8:56:48 AM	SiCl4 MFC set to  0.000000
3/30/2012	8:56:48 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	8:56:48 AM	Tube furnace set to 0
3/30/2012	9:16:48 AM	Helium valve closed
3/30/2012	9:16:48 AM	H2 valve closed
3/30/2012	9:16:48 AM	BCl3 valve closed
3/30/2012	9:16:48 AM	PH3 valve closed
3/30/2012	9:16:48 AM	SiCl4 pre valve closed
3/30/2012	9:16:48 AM	SiCl4 post valve closed
3/30/2012	9:16:48 AM	Main Vac valve closed
3/30/2012	9:16:48 AM	Bypass valve closed
3/30/2012	9:16:48 AM	Bubbler valve closed
3/30/2012	9:16:48 AM	Helium MFC set to  0.000000
3/30/2012	9:16:48 AM	H2 MFC set to  0.000000
3/30/2012	9:16:48 AM	BCl3 MFC set to  0.000000
3/30/2012	9:16:48 AM	PH3 MFC set to  0.000000
3/30/2012	9:16:48 AM	SiCl4 MFC set to  0.000000
3/30/2012	9:16:48 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	9:16:48 AM	Tube furnace set to 0
3/30/2012	9:16:49 AM	Run finished at 9:16 AM
3/30/2012	9:53:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/30/2012	9:53:55 AM	Recipe started at 9:53 AM
3/30/2012	9:53:55 AM	Helium valve closed
3/30/2012	9:53:55 AM	H2 valve closed
3/30/2012	9:53:55 AM	BCl3 valve closed
3/30/2012	9:53:55 AM	PH3 valve closed
3/30/2012	9:53:55 AM	SiCl4 pre valve closed
3/30/2012	9:53:55 AM	SiCl4 post valve closed
3/30/2012	9:53:55 AM	Main Vac valve closed
3/30/2012	9:53:55 AM	Bypass valve closed
3/30/2012	9:53:55 AM	Bubbler valve closed
3/30/2012	9:53:55 AM	Helium MFC set to  0.000000
3/30/2012	9:53:55 AM	H2 MFC set to  0.000000
3/30/2012	9:53:55 AM	BCl3 MFC set to  0.000000
3/30/2012	9:53:55 AM	PH3 MFC set to  0.000000
3/30/2012	9:53:55 AM	SiCl4 MFC set to  0.000000
3/30/2012	9:53:55 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	9:53:55 AM	Tube furnace set to 0
3/30/2012	9:53:58 AM	H2 valve closed
3/30/2012	9:53:58 AM	BCl3 valve closed
3/30/2012	9:53:58 AM	PH3 valve closed
3/30/2012	9:53:58 AM	SiCl4 pre valve closed
3/30/2012	9:53:58 AM	SiCl4 post valve closed
3/30/2012	9:53:58 AM	Main Vac valve closed
3/30/2012	9:53:58 AM	Bypass valve closed
3/30/2012	9:53:58 AM	Bubbler valve closed
3/30/2012	9:53:58 AM	Helium valve opened
3/30/2012	9:53:58 AM	Helium MFC set to  500.000000
3/30/2012	9:53:58 AM	H2 MFC set to  0.000000
3/30/2012	9:53:58 AM	BCl3 MFC set to  0.000000
3/30/2012	9:53:58 AM	PH3 MFC set to  0.000000
3/30/2012	9:53:58 AM	SiCl4 MFC set to  0.000000
3/30/2012	9:53:58 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	9:53:58 AM	Tube furnace set to 0
3/30/2012	9:54:02 AM	Helium valve closed
3/30/2012	9:54:02 AM	H2 valve closed
3/30/2012	9:54:02 AM	BCl3 valve closed
3/30/2012	9:54:02 AM	PH3 valve closed
3/30/2012	9:54:02 AM	SiCl4 pre valve closed
3/30/2012	9:54:02 AM	SiCl4 post valve closed
3/30/2012	9:54:02 AM	Main Vac valve closed
3/30/2012	9:54:02 AM	Bypass valve closed
3/30/2012	9:54:02 AM	Bubbler valve closed
3/30/2012	9:54:02 AM	Helium MFC set to  0.000000
3/30/2012	9:54:02 AM	H2 MFC set to  0.000000
3/30/2012	9:54:02 AM	BCl3 MFC set to  0.000000
3/30/2012	9:54:02 AM	PH3 MFC set to  0.000000
3/30/2012	9:54:02 AM	SiCl4 MFC set to  0.000000
3/30/2012	9:54:02 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	9:54:02 AM	Tube furnace set to 0
3/30/2012	9:54:03 AM	Run finished at 9:54 AM
3/30/2012	9:54:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/30/2012	10:05:46 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2012	10:05:47 AM	Recipe started at 10:05 AM
3/30/2012	10:05:47 AM	Helium valve closed
3/30/2012	10:05:47 AM	H2 valve closed
3/30/2012	10:05:47 AM	BCl3 valve closed
3/30/2012	10:05:47 AM	PH3 valve closed
3/30/2012	10:05:47 AM	SiCl4 pre valve closed
3/30/2012	10:05:47 AM	SiCl4 post valve closed
3/30/2012	10:05:47 AM	Main Vac valve closed
3/30/2012	10:05:47 AM	Bubbler valve closed
3/30/2012	10:05:47 AM	Bypass valve opened
3/30/2012	10:05:47 AM	Helium MFC set to  0.000000
3/30/2012	10:05:47 AM	H2 MFC set to  0.000000
3/30/2012	10:05:47 AM	BCl3 MFC set to  0.000000
3/30/2012	10:05:47 AM	PH3 MFC set to  0.000000
3/30/2012	10:05:47 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:05:47 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:05:47 AM	Tube furnace set to 0
3/30/2012	10:06:49 AM	Helium valve closed
3/30/2012	10:06:49 AM	H2 valve closed
3/30/2012	10:06:49 AM	BCl3 valve closed
3/30/2012	10:06:49 AM	PH3 valve closed
3/30/2012	10:06:49 AM	SiCl4 pre valve closed
3/30/2012	10:06:49 AM	SiCl4 post valve closed
3/30/2012	10:06:49 AM	Main Vac valve closed
3/30/2012	10:06:49 AM	Bubbler valve closed
3/30/2012	10:06:49 AM	Bypass valve opened
3/30/2012	10:06:49 AM	Helium MFC set to  0.000000
3/30/2012	10:06:49 AM	H2 MFC set to  0.000000
3/30/2012	10:06:49 AM	BCl3 MFC set to  0.000000
3/30/2012	10:06:49 AM	PH3 MFC set to  0.000000
3/30/2012	10:06:49 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:06:49 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:06:49 AM	Tube furnace set to 0
3/30/2012	10:07:49 AM	Helium valve closed
3/30/2012	10:07:49 AM	H2 valve closed
3/30/2012	10:07:49 AM	BCl3 valve closed
3/30/2012	10:07:49 AM	PH3 valve closed
3/30/2012	10:07:49 AM	SiCl4 pre valve closed
3/30/2012	10:07:49 AM	SiCl4 post valve closed
3/30/2012	10:07:49 AM	Bypass valve closed
3/30/2012	10:07:49 AM	Bubbler valve closed
3/30/2012	10:07:49 AM	Main Vac valve opened
3/30/2012	10:07:49 AM	Helium MFC set to  0.000000
3/30/2012	10:07:49 AM	H2 MFC set to  0.000000
3/30/2012	10:07:49 AM	BCl3 MFC set to  0.000000
3/30/2012	10:07:49 AM	PH3 MFC set to  0.000000
3/30/2012	10:07:49 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:07:49 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:07:49 AM	Tube furnace set to 0
3/30/2012	10:07:50 AM	Run finished at 10:07 AM
3/30/2012	10:07:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2012	10:15:32 AM	Recipe started at 10:15 AM
3/30/2012	10:15:32 AM	Helium valve closed
3/30/2012	10:15:32 AM	H2 valve closed
3/30/2012	10:15:32 AM	BCl3 valve closed
3/30/2012	10:15:32 AM	PH3 valve closed
3/30/2012	10:15:32 AM	SiCl4 pre valve closed
3/30/2012	10:15:32 AM	SiCl4 post valve closed
3/30/2012	10:15:32 AM	Bypass valve closed
3/30/2012	10:15:32 AM	Bubbler valve closed
3/30/2012	10:15:32 AM	Main Vac valve opened
3/30/2012	10:15:32 AM	Helium MFC set to  0.000000
3/30/2012	10:15:32 AM	H2 MFC set to  0.000000
3/30/2012	10:15:32 AM	BCl3 MFC set to  0.000000
3/30/2012	10:15:32 AM	PH3 MFC set to  0.000000
3/30/2012	10:15:32 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:15:32 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:15:32 AM	Tube furnace set to 150
3/30/2012	10:16:02 AM	H2 valve closed
3/30/2012	10:16:02 AM	BCl3 valve closed
3/30/2012	10:16:02 AM	PH3 valve closed
3/30/2012	10:16:02 AM	SiCl4 pre valve closed
3/30/2012	10:16:02 AM	SiCl4 post valve closed
3/30/2012	10:16:02 AM	Bypass valve closed
3/30/2012	10:16:02 AM	Bubbler valve closed
3/30/2012	10:16:02 AM	Helium valve opened
3/30/2012	10:16:02 AM	Main Vac valve opened
3/30/2012	10:16:02 AM	Helium MFC set to  20.000000
3/30/2012	10:16:02 AM	H2 MFC set to  0.000000
3/30/2012	10:16:02 AM	BCl3 MFC set to  0.000000
3/30/2012	10:16:02 AM	PH3 MFC set to  0.000000
3/30/2012	10:16:02 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:16:02 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:16:02 AM	Tube furnace set to 150
3/30/2012	10:16:32 AM	Helium valve closed
3/30/2012	10:16:32 AM	H2 valve closed
3/30/2012	10:16:32 AM	BCl3 valve closed
3/30/2012	10:16:32 AM	PH3 valve closed
3/30/2012	10:16:32 AM	SiCl4 pre valve closed
3/30/2012	10:16:32 AM	SiCl4 post valve closed
3/30/2012	10:16:32 AM	Bypass valve closed
3/30/2012	10:16:32 AM	Bubbler valve closed
3/30/2012	10:16:32 AM	Main Vac valve opened
3/30/2012	10:16:32 AM	Helium MFC set to  0.000000
3/30/2012	10:16:32 AM	H2 MFC set to  0.000000
3/30/2012	10:16:32 AM	BCl3 MFC set to  0.000000
3/30/2012	10:16:32 AM	PH3 MFC set to  0.000000
3/30/2012	10:16:32 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:16:32 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:16:32 AM	Tube furnace set to 150
3/30/2012	10:17:02 AM	H2 valve closed
3/30/2012	10:17:02 AM	BCl3 valve closed
3/30/2012	10:17:02 AM	PH3 valve closed
3/30/2012	10:17:02 AM	SiCl4 pre valve closed
3/30/2012	10:17:02 AM	SiCl4 post valve closed
3/30/2012	10:17:02 AM	Bypass valve closed
3/30/2012	10:17:02 AM	Bubbler valve closed
3/30/2012	10:17:02 AM	Helium valve opened
3/30/2012	10:17:02 AM	Main Vac valve opened
3/30/2012	10:17:02 AM	Helium MFC set to  20.000000
3/30/2012	10:17:02 AM	H2 MFC set to  0.000000
3/30/2012	10:17:02 AM	BCl3 MFC set to  0.000000
3/30/2012	10:17:02 AM	PH3 MFC set to  0.000000
3/30/2012	10:17:02 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:17:02 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:17:03 AM	Tube furnace set to 150
3/30/2012	10:17:33 AM	Helium valve closed
3/30/2012	10:17:33 AM	H2 valve closed
3/30/2012	10:17:33 AM	BCl3 valve closed
3/30/2012	10:17:33 AM	PH3 valve closed
3/30/2012	10:17:33 AM	SiCl4 pre valve closed
3/30/2012	10:17:33 AM	SiCl4 post valve closed
3/30/2012	10:17:33 AM	Bypass valve closed
3/30/2012	10:17:33 AM	Bubbler valve closed
3/30/2012	10:17:33 AM	Main Vac valve opened
3/30/2012	10:17:33 AM	Helium MFC set to  0.000000
3/30/2012	10:17:33 AM	H2 MFC set to  0.000000
3/30/2012	10:17:33 AM	BCl3 MFC set to  0.000000
3/30/2012	10:17:33 AM	PH3 MFC set to  0.000000
3/30/2012	10:17:33 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:17:33 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:17:33 AM	Tube furnace set to 150
3/30/2012	10:18:03 AM	H2 valve closed
3/30/2012	10:18:03 AM	BCl3 valve closed
3/30/2012	10:18:03 AM	PH3 valve closed
3/30/2012	10:18:03 AM	SiCl4 pre valve closed
3/30/2012	10:18:03 AM	SiCl4 post valve closed
3/30/2012	10:18:03 AM	Bypass valve closed
3/30/2012	10:18:03 AM	Bubbler valve closed
3/30/2012	10:18:03 AM	Helium valve opened
3/30/2012	10:18:03 AM	Main Vac valve opened
3/30/2012	10:18:03 AM	Helium MFC set to  20.000000
3/30/2012	10:18:03 AM	H2 MFC set to  0.000000
3/30/2012	10:18:03 AM	BCl3 MFC set to  0.000000
3/30/2012	10:18:03 AM	PH3 MFC set to  0.000000
3/30/2012	10:18:03 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:18:03 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:18:03 AM	Tube furnace set to 150
3/30/2012	10:18:33 AM	Helium valve closed
3/30/2012	10:18:33 AM	H2 valve closed
3/30/2012	10:18:33 AM	BCl3 valve closed
3/30/2012	10:18:33 AM	PH3 valve closed
3/30/2012	10:18:33 AM	SiCl4 pre valve closed
3/30/2012	10:18:33 AM	SiCl4 post valve closed
3/30/2012	10:18:33 AM	Bypass valve closed
3/30/2012	10:18:33 AM	Bubbler valve closed
3/30/2012	10:18:33 AM	Main Vac valve opened
3/30/2012	10:18:33 AM	Helium MFC set to  0.000000
3/30/2012	10:18:33 AM	H2 MFC set to  0.000000
3/30/2012	10:18:33 AM	BCl3 MFC set to  0.000000
3/30/2012	10:18:33 AM	PH3 MFC set to  0.000000
3/30/2012	10:18:33 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:18:33 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:18:33 AM	Tube furnace set to 150
3/30/2012	10:19:03 AM	H2 valve closed
3/30/2012	10:19:03 AM	BCl3 valve closed
3/30/2012	10:19:03 AM	PH3 valve closed
3/30/2012	10:19:03 AM	SiCl4 pre valve closed
3/30/2012	10:19:03 AM	SiCl4 post valve closed
3/30/2012	10:19:03 AM	Bypass valve closed
3/30/2012	10:19:03 AM	Bubbler valve closed
3/30/2012	10:19:03 AM	Helium valve opened
3/30/2012	10:19:03 AM	Main Vac valve opened
3/30/2012	10:19:03 AM	Helium MFC set to  20.000000
3/30/2012	10:19:03 AM	H2 MFC set to  0.000000
3/30/2012	10:19:03 AM	BCl3 MFC set to  0.000000
3/30/2012	10:19:03 AM	PH3 MFC set to  0.000000
3/30/2012	10:19:03 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:19:03 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:19:04 AM	Tube furnace set to 150
3/30/2012	10:19:34 AM	Helium valve closed
3/30/2012	10:19:34 AM	H2 valve closed
3/30/2012	10:19:34 AM	BCl3 valve closed
3/30/2012	10:19:34 AM	PH3 valve closed
3/30/2012	10:19:34 AM	SiCl4 pre valve closed
3/30/2012	10:19:34 AM	SiCl4 post valve closed
3/30/2012	10:19:34 AM	Bypass valve closed
3/30/2012	10:19:34 AM	Bubbler valve closed
3/30/2012	10:19:34 AM	Main Vac valve opened
3/30/2012	10:19:34 AM	Helium MFC set to  0.000000
3/30/2012	10:19:34 AM	H2 MFC set to  0.000000
3/30/2012	10:19:34 AM	BCl3 MFC set to  0.000000
3/30/2012	10:19:34 AM	PH3 MFC set to  0.000000
3/30/2012	10:19:34 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:19:34 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:19:34 AM	Tube furnace set to 150
3/30/2012	10:20:04 AM	H2 valve closed
3/30/2012	10:20:04 AM	BCl3 valve closed
3/30/2012	10:20:04 AM	PH3 valve closed
3/30/2012	10:20:04 AM	SiCl4 pre valve closed
3/30/2012	10:20:04 AM	SiCl4 post valve closed
3/30/2012	10:20:04 AM	Bypass valve closed
3/30/2012	10:20:04 AM	Bubbler valve closed
3/30/2012	10:20:04 AM	Helium valve opened
3/30/2012	10:20:04 AM	Main Vac valve opened
3/30/2012	10:20:04 AM	Helium MFC set to  20.000000
3/30/2012	10:20:04 AM	H2 MFC set to  0.000000
3/30/2012	10:20:04 AM	BCl3 MFC set to  0.000000
3/30/2012	10:20:04 AM	PH3 MFC set to  0.000000
3/30/2012	10:20:04 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:20:04 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:20:04 AM	Tube furnace set to 150
3/30/2012	10:20:34 AM	Helium valve closed
3/30/2012	10:20:34 AM	H2 valve closed
3/30/2012	10:20:34 AM	BCl3 valve closed
3/30/2012	10:20:34 AM	PH3 valve closed
3/30/2012	10:20:34 AM	SiCl4 pre valve closed
3/30/2012	10:20:34 AM	SiCl4 post valve closed
3/30/2012	10:20:34 AM	Bypass valve closed
3/30/2012	10:20:34 AM	Bubbler valve closed
3/30/2012	10:20:34 AM	Main Vac valve opened
3/30/2012	10:20:34 AM	Helium MFC set to  0.000000
3/30/2012	10:20:34 AM	H2 MFC set to  0.000000
3/30/2012	10:20:34 AM	BCl3 MFC set to  0.000000
3/30/2012	10:20:34 AM	PH3 MFC set to  0.000000
3/30/2012	10:20:34 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:20:34 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:20:34 AM	Tube furnace set to 150
3/30/2012	10:21:04 AM	H2 valve closed
3/30/2012	10:21:04 AM	BCl3 valve closed
3/30/2012	10:21:04 AM	PH3 valve closed
3/30/2012	10:21:04 AM	SiCl4 pre valve closed
3/30/2012	10:21:04 AM	SiCl4 post valve closed
3/30/2012	10:21:04 AM	Bypass valve closed
3/30/2012	10:21:04 AM	Bubbler valve closed
3/30/2012	10:21:04 AM	Helium valve opened
3/30/2012	10:21:04 AM	Main Vac valve opened
3/30/2012	10:21:04 AM	Helium MFC set to  20.000000
3/30/2012	10:21:04 AM	H2 MFC set to  0.000000
3/30/2012	10:21:04 AM	BCl3 MFC set to  0.000000
3/30/2012	10:21:04 AM	PH3 MFC set to  0.000000
3/30/2012	10:21:04 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:21:04 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:21:04 AM	Tube furnace set to 150
3/30/2012	10:21:35 AM	Helium valve closed
3/30/2012	10:21:35 AM	H2 valve closed
3/30/2012	10:21:35 AM	BCl3 valve closed
3/30/2012	10:21:35 AM	PH3 valve closed
3/30/2012	10:21:35 AM	SiCl4 pre valve closed
3/30/2012	10:21:35 AM	SiCl4 post valve closed
3/30/2012	10:21:35 AM	Bypass valve closed
3/30/2012	10:21:35 AM	Bubbler valve closed
3/30/2012	10:21:35 AM	Main Vac valve opened
3/30/2012	10:21:35 AM	Helium MFC set to  0.000000
3/30/2012	10:21:35 AM	H2 MFC set to  0.000000
3/30/2012	10:21:35 AM	BCl3 MFC set to  0.000000
3/30/2012	10:21:35 AM	PH3 MFC set to  0.000000
3/30/2012	10:21:35 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:21:35 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:21:35 AM	Tube furnace set to 150
3/30/2012	10:22:05 AM	H2 valve closed
3/30/2012	10:22:05 AM	BCl3 valve closed
3/30/2012	10:22:05 AM	PH3 valve closed
3/30/2012	10:22:05 AM	SiCl4 pre valve closed
3/30/2012	10:22:05 AM	SiCl4 post valve closed
3/30/2012	10:22:05 AM	Bypass valve closed
3/30/2012	10:22:05 AM	Bubbler valve closed
3/30/2012	10:22:05 AM	Helium valve opened
3/30/2012	10:22:05 AM	Main Vac valve opened
3/30/2012	10:22:05 AM	Helium MFC set to  20.000000
3/30/2012	10:22:05 AM	H2 MFC set to  0.000000
3/30/2012	10:22:05 AM	BCl3 MFC set to  0.000000
3/30/2012	10:22:05 AM	PH3 MFC set to  0.000000
3/30/2012	10:22:05 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:22:05 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:22:05 AM	Tube furnace set to 150
3/30/2012	10:22:35 AM	Helium valve closed
3/30/2012	10:22:35 AM	H2 valve closed
3/30/2012	10:22:35 AM	BCl3 valve closed
3/30/2012	10:22:35 AM	PH3 valve closed
3/30/2012	10:22:35 AM	SiCl4 pre valve closed
3/30/2012	10:22:35 AM	SiCl4 post valve closed
3/30/2012	10:22:35 AM	Bypass valve closed
3/30/2012	10:22:35 AM	Bubbler valve closed
3/30/2012	10:22:35 AM	Main Vac valve opened
3/30/2012	10:22:35 AM	Helium MFC set to  0.000000
3/30/2012	10:22:35 AM	H2 MFC set to  0.000000
3/30/2012	10:22:35 AM	BCl3 MFC set to  0.000000
3/30/2012	10:22:35 AM	PH3 MFC set to  0.000000
3/30/2012	10:22:35 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:22:35 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:22:35 AM	Tube furnace set to 150
3/30/2012	10:23:05 AM	H2 valve closed
3/30/2012	10:23:05 AM	BCl3 valve closed
3/30/2012	10:23:05 AM	PH3 valve closed
3/30/2012	10:23:05 AM	SiCl4 pre valve closed
3/30/2012	10:23:05 AM	SiCl4 post valve closed
3/30/2012	10:23:05 AM	Bypass valve closed
3/30/2012	10:23:05 AM	Bubbler valve closed
3/30/2012	10:23:05 AM	Helium valve opened
3/30/2012	10:23:05 AM	Main Vac valve opened
3/30/2012	10:23:05 AM	Helium MFC set to  20.000000
3/30/2012	10:23:05 AM	H2 MFC set to  0.000000
3/30/2012	10:23:05 AM	BCl3 MFC set to  0.000000
3/30/2012	10:23:05 AM	PH3 MFC set to  0.000000
3/30/2012	10:23:05 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:23:05 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:23:05 AM	Tube furnace set to 150
3/30/2012	10:23:35 AM	Helium valve closed
3/30/2012	10:23:35 AM	H2 valve closed
3/30/2012	10:23:35 AM	BCl3 valve closed
3/30/2012	10:23:35 AM	PH3 valve closed
3/30/2012	10:23:35 AM	SiCl4 pre valve closed
3/30/2012	10:23:35 AM	SiCl4 post valve closed
3/30/2012	10:23:35 AM	Bypass valve closed
3/30/2012	10:23:35 AM	Bubbler valve closed
3/30/2012	10:23:35 AM	Main Vac valve opened
3/30/2012	10:23:35 AM	Helium MFC set to  0.000000
3/30/2012	10:23:35 AM	H2 MFC set to  0.000000
3/30/2012	10:23:35 AM	BCl3 MFC set to  0.000000
3/30/2012	10:23:35 AM	PH3 MFC set to  0.000000
3/30/2012	10:23:35 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:23:35 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:23:36 AM	Tube furnace set to 150
3/30/2012	10:24:05 AM	H2 valve closed
3/30/2012	10:24:05 AM	BCl3 valve closed
3/30/2012	10:24:05 AM	PH3 valve closed
3/30/2012	10:24:05 AM	SiCl4 pre valve closed
3/30/2012	10:24:06 AM	SiCl4 post valve closed
3/30/2012	10:24:06 AM	Bypass valve closed
3/30/2012	10:24:06 AM	Bubbler valve closed
3/30/2012	10:24:06 AM	Helium valve opened
3/30/2012	10:24:06 AM	Main Vac valve opened
3/30/2012	10:24:06 AM	Helium MFC set to  20.000000
3/30/2012	10:24:06 AM	H2 MFC set to  0.000000
3/30/2012	10:24:06 AM	BCl3 MFC set to  0.000000
3/30/2012	10:24:06 AM	PH3 MFC set to  0.000000
3/30/2012	10:24:06 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:24:06 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:24:06 AM	Tube furnace set to 150
3/30/2012	10:24:36 AM	Helium valve closed
3/30/2012	10:24:36 AM	H2 valve closed
3/30/2012	10:24:36 AM	BCl3 valve closed
3/30/2012	10:24:36 AM	PH3 valve closed
3/30/2012	10:24:36 AM	SiCl4 pre valve closed
3/30/2012	10:24:36 AM	SiCl4 post valve closed
3/30/2012	10:24:36 AM	Bypass valve closed
3/30/2012	10:24:36 AM	Bubbler valve closed
3/30/2012	10:24:36 AM	Main Vac valve opened
3/30/2012	10:24:36 AM	Helium MFC set to  0.000000
3/30/2012	10:24:36 AM	H2 MFC set to  0.000000
3/30/2012	10:24:36 AM	BCl3 MFC set to  0.000000
3/30/2012	10:24:36 AM	PH3 MFC set to  0.000000
3/30/2012	10:24:36 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:24:36 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:24:36 AM	Tube furnace set to 150
3/30/2012	10:25:06 AM	H2 valve closed
3/30/2012	10:25:06 AM	BCl3 valve closed
3/30/2012	10:25:06 AM	PH3 valve closed
3/30/2012	10:25:06 AM	SiCl4 pre valve closed
3/30/2012	10:25:06 AM	SiCl4 post valve closed
3/30/2012	10:25:06 AM	Bypass valve closed
3/30/2012	10:25:06 AM	Bubbler valve closed
3/30/2012	10:25:06 AM	Helium valve opened
3/30/2012	10:25:06 AM	Main Vac valve opened
3/30/2012	10:25:06 AM	Helium MFC set to  20.000000
3/30/2012	10:25:06 AM	H2 MFC set to  0.000000
3/30/2012	10:25:06 AM	BCl3 MFC set to  0.000000
3/30/2012	10:25:06 AM	PH3 MFC set to  0.000000
3/30/2012	10:25:06 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:25:06 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:25:06 AM	Tube furnace set to 150
3/30/2012	10:25:36 AM	Helium valve closed
3/30/2012	10:25:36 AM	H2 valve closed
3/30/2012	10:25:36 AM	BCl3 valve closed
3/30/2012	10:25:36 AM	PH3 valve closed
3/30/2012	10:25:36 AM	SiCl4 pre valve closed
3/30/2012	10:25:36 AM	SiCl4 post valve closed
3/30/2012	10:25:36 AM	Bypass valve closed
3/30/2012	10:25:36 AM	Bubbler valve closed
3/30/2012	10:25:36 AM	Main Vac valve opened
3/30/2012	10:25:36 AM	Helium MFC set to  0.000000
3/30/2012	10:25:36 AM	H2 MFC set to  0.000000
3/30/2012	10:25:36 AM	BCl3 MFC set to  0.000000
3/30/2012	10:25:36 AM	PH3 MFC set to  0.000000
3/30/2012	10:25:36 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:25:36 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:25:36 AM	Tube furnace set to 150
3/30/2012	10:25:37 AM	Run finished at 10:25 AM
3/30/2012	10:26:48 AM	Recipe started at 10:26 AM
3/30/2012	10:26:48 AM	Helium valve closed
3/30/2012	10:26:48 AM	H2 valve closed
3/30/2012	10:26:48 AM	BCl3 valve closed
3/30/2012	10:26:48 AM	PH3 valve closed
3/30/2012	10:26:48 AM	SiCl4 pre valve closed
3/30/2012	10:26:48 AM	SiCl4 post valve closed
3/30/2012	10:26:48 AM	Bypass valve closed
3/30/2012	10:26:48 AM	Bubbler valve closed
3/30/2012	10:26:48 AM	Main Vac valve opened
3/30/2012	10:26:48 AM	Helium MFC set to  0.000000
3/30/2012	10:26:48 AM	H2 MFC set to  0.000000
3/30/2012	10:26:48 AM	BCl3 MFC set to  0.000000
3/30/2012	10:26:48 AM	PH3 MFC set to  0.000000
3/30/2012	10:26:48 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:26:48 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:26:48 AM	Tube furnace set to 150
3/30/2012	10:27:18 AM	H2 valve closed
3/30/2012	10:27:18 AM	BCl3 valve closed
3/30/2012	10:27:18 AM	PH3 valve closed
3/30/2012	10:27:18 AM	SiCl4 pre valve closed
3/30/2012	10:27:18 AM	SiCl4 post valve closed
3/30/2012	10:27:18 AM	Bypass valve closed
3/30/2012	10:27:18 AM	Bubbler valve closed
3/30/2012	10:27:18 AM	Helium valve opened
3/30/2012	10:27:18 AM	Main Vac valve opened
3/30/2012	10:27:18 AM	Helium MFC set to  20.000000
3/30/2012	10:27:18 AM	H2 MFC set to  0.000000
3/30/2012	10:27:18 AM	BCl3 MFC set to  0.000000
3/30/2012	10:27:18 AM	PH3 MFC set to  0.000000
3/30/2012	10:27:18 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:27:18 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:27:18 AM	Tube furnace set to 150
3/30/2012	10:27:48 AM	Helium valve closed
3/30/2012	10:27:48 AM	H2 valve closed
3/30/2012	10:27:48 AM	BCl3 valve closed
3/30/2012	10:27:48 AM	PH3 valve closed
3/30/2012	10:27:48 AM	SiCl4 pre valve closed
3/30/2012	10:27:48 AM	SiCl4 post valve closed
3/30/2012	10:27:48 AM	Bypass valve closed
3/30/2012	10:27:48 AM	Bubbler valve closed
3/30/2012	10:27:48 AM	Main Vac valve opened
3/30/2012	10:27:48 AM	Helium MFC set to  0.000000
3/30/2012	10:27:48 AM	H2 MFC set to  0.000000
3/30/2012	10:27:48 AM	BCl3 MFC set to  0.000000
3/30/2012	10:27:48 AM	PH3 MFC set to  0.000000
3/30/2012	10:27:48 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:27:48 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:27:48 AM	Tube furnace set to 150
3/30/2012	10:28:18 AM	H2 valve closed
3/30/2012	10:28:18 AM	BCl3 valve closed
3/30/2012	10:28:18 AM	PH3 valve closed
3/30/2012	10:28:18 AM	SiCl4 pre valve closed
3/30/2012	10:28:18 AM	SiCl4 post valve closed
3/30/2012	10:28:18 AM	Bypass valve closed
3/30/2012	10:28:18 AM	Bubbler valve closed
3/30/2012	10:28:18 AM	Helium valve opened
3/30/2012	10:28:18 AM	Main Vac valve opened
3/30/2012	10:28:18 AM	Helium MFC set to  20.000000
3/30/2012	10:28:18 AM	H2 MFC set to  0.000000
3/30/2012	10:28:18 AM	BCl3 MFC set to  0.000000
3/30/2012	10:28:18 AM	PH3 MFC set to  0.000000
3/30/2012	10:28:18 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:28:18 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:28:19 AM	Tube furnace set to 150
3/30/2012	10:28:49 AM	Helium valve closed
3/30/2012	10:28:49 AM	H2 valve closed
3/30/2012	10:28:49 AM	BCl3 valve closed
3/30/2012	10:28:49 AM	PH3 valve closed
3/30/2012	10:28:49 AM	SiCl4 pre valve closed
3/30/2012	10:28:49 AM	SiCl4 post valve closed
3/30/2012	10:28:49 AM	Bypass valve closed
3/30/2012	10:28:49 AM	Bubbler valve closed
3/30/2012	10:28:49 AM	Main Vac valve opened
3/30/2012	10:28:49 AM	Helium MFC set to  0.000000
3/30/2012	10:28:49 AM	H2 MFC set to  0.000000
3/30/2012	10:28:49 AM	BCl3 MFC set to  0.000000
3/30/2012	10:28:49 AM	PH3 MFC set to  0.000000
3/30/2012	10:28:49 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:28:49 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:28:49 AM	Tube furnace set to 150
3/30/2012	10:29:19 AM	H2 valve closed
3/30/2012	10:29:19 AM	BCl3 valve closed
3/30/2012	10:29:19 AM	PH3 valve closed
3/30/2012	10:29:19 AM	SiCl4 pre valve closed
3/30/2012	10:29:19 AM	SiCl4 post valve closed
3/30/2012	10:29:19 AM	Bypass valve closed
3/30/2012	10:29:19 AM	Bubbler valve closed
3/30/2012	10:29:19 AM	Helium valve opened
3/30/2012	10:29:19 AM	Main Vac valve opened
3/30/2012	10:29:19 AM	Helium MFC set to  20.000000
3/30/2012	10:29:19 AM	H2 MFC set to  0.000000
3/30/2012	10:29:19 AM	BCl3 MFC set to  0.000000
3/30/2012	10:29:19 AM	PH3 MFC set to  0.000000
3/30/2012	10:29:19 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:29:19 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:29:19 AM	Tube furnace set to 150
3/30/2012	10:29:49 AM	Helium valve closed
3/30/2012	10:29:49 AM	H2 valve closed
3/30/2012	10:29:49 AM	BCl3 valve closed
3/30/2012	10:29:49 AM	PH3 valve closed
3/30/2012	10:29:49 AM	SiCl4 pre valve closed
3/30/2012	10:29:49 AM	SiCl4 post valve closed
3/30/2012	10:29:49 AM	Bypass valve closed
3/30/2012	10:29:49 AM	Bubbler valve closed
3/30/2012	10:29:49 AM	Main Vac valve opened
3/30/2012	10:29:49 AM	Helium MFC set to  0.000000
3/30/2012	10:29:49 AM	H2 MFC set to  0.000000
3/30/2012	10:29:49 AM	BCl3 MFC set to  0.000000
3/30/2012	10:29:49 AM	PH3 MFC set to  0.000000
3/30/2012	10:29:49 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:29:49 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:29:49 AM	Tube furnace set to 150
3/30/2012	10:30:19 AM	H2 valve closed
3/30/2012	10:30:19 AM	BCl3 valve closed
3/30/2012	10:30:19 AM	PH3 valve closed
3/30/2012	10:30:19 AM	SiCl4 pre valve closed
3/30/2012	10:30:19 AM	SiCl4 post valve closed
3/30/2012	10:30:19 AM	Bypass valve closed
3/30/2012	10:30:19 AM	Bubbler valve closed
3/30/2012	10:30:19 AM	Helium valve opened
3/30/2012	10:30:19 AM	Main Vac valve opened
3/30/2012	10:30:19 AM	Helium MFC set to  20.000000
3/30/2012	10:30:19 AM	H2 MFC set to  0.000000
3/30/2012	10:30:19 AM	BCl3 MFC set to  0.000000
3/30/2012	10:30:19 AM	PH3 MFC set to  0.000000
3/30/2012	10:30:19 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:30:19 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:30:20 AM	Tube furnace set to 150
3/30/2012	10:30:50 AM	Helium valve closed
3/30/2012	10:30:50 AM	H2 valve closed
3/30/2012	10:30:50 AM	BCl3 valve closed
3/30/2012	10:30:50 AM	PH3 valve closed
3/30/2012	10:30:50 AM	SiCl4 pre valve closed
3/30/2012	10:30:50 AM	SiCl4 post valve closed
3/30/2012	10:30:50 AM	Bypass valve closed
3/30/2012	10:30:50 AM	Bubbler valve closed
3/30/2012	10:30:50 AM	Main Vac valve opened
3/30/2012	10:30:50 AM	Helium MFC set to  0.000000
3/30/2012	10:30:50 AM	H2 MFC set to  0.000000
3/30/2012	10:30:50 AM	BCl3 MFC set to  0.000000
3/30/2012	10:30:50 AM	PH3 MFC set to  0.000000
3/30/2012	10:30:50 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:30:50 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:30:50 AM	Tube furnace set to 150
3/30/2012	10:31:20 AM	H2 valve closed
3/30/2012	10:31:20 AM	BCl3 valve closed
3/30/2012	10:31:20 AM	PH3 valve closed
3/30/2012	10:31:20 AM	SiCl4 pre valve closed
3/30/2012	10:31:20 AM	SiCl4 post valve closed
3/30/2012	10:31:20 AM	Bypass valve closed
3/30/2012	10:31:20 AM	Bubbler valve closed
3/30/2012	10:31:20 AM	Helium valve opened
3/30/2012	10:31:20 AM	Main Vac valve opened
3/30/2012	10:31:20 AM	Helium MFC set to  20.000000
3/30/2012	10:31:20 AM	H2 MFC set to  0.000000
3/30/2012	10:31:20 AM	BCl3 MFC set to  0.000000
3/30/2012	10:31:20 AM	PH3 MFC set to  0.000000
3/30/2012	10:31:20 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:31:20 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:31:20 AM	Tube furnace set to 150
3/30/2012	10:31:50 AM	Helium valve closed
3/30/2012	10:31:50 AM	H2 valve closed
3/30/2012	10:31:50 AM	BCl3 valve closed
3/30/2012	10:31:50 AM	PH3 valve closed
3/30/2012	10:31:50 AM	SiCl4 pre valve closed
3/30/2012	10:31:50 AM	SiCl4 post valve closed
3/30/2012	10:31:50 AM	Bypass valve closed
3/30/2012	10:31:50 AM	Bubbler valve closed
3/30/2012	10:31:50 AM	Main Vac valve opened
3/30/2012	10:31:50 AM	Helium MFC set to  0.000000
3/30/2012	10:31:50 AM	H2 MFC set to  0.000000
3/30/2012	10:31:50 AM	BCl3 MFC set to  0.000000
3/30/2012	10:31:50 AM	PH3 MFC set to  0.000000
3/30/2012	10:31:50 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:31:50 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:31:50 AM	Tube furnace set to 150
3/30/2012	10:32:20 AM	H2 valve closed
3/30/2012	10:32:20 AM	BCl3 valve closed
3/30/2012	10:32:20 AM	PH3 valve closed
3/30/2012	10:32:20 AM	SiCl4 pre valve closed
3/30/2012	10:32:20 AM	SiCl4 post valve closed
3/30/2012	10:32:20 AM	Bypass valve closed
3/30/2012	10:32:20 AM	Bubbler valve closed
3/30/2012	10:32:20 AM	Helium valve opened
3/30/2012	10:32:20 AM	Main Vac valve opened
3/30/2012	10:32:20 AM	Helium MFC set to  20.000000
3/30/2012	10:32:20 AM	H2 MFC set to  0.000000
3/30/2012	10:32:20 AM	BCl3 MFC set to  0.000000
3/30/2012	10:32:20 AM	PH3 MFC set to  0.000000
3/30/2012	10:32:20 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:32:20 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:32:21 AM	Tube furnace set to 150
3/30/2012	10:32:51 AM	Helium valve closed
3/30/2012	10:32:51 AM	H2 valve closed
3/30/2012	10:32:51 AM	BCl3 valve closed
3/30/2012	10:32:51 AM	PH3 valve closed
3/30/2012	10:32:51 AM	SiCl4 pre valve closed
3/30/2012	10:32:51 AM	SiCl4 post valve closed
3/30/2012	10:32:51 AM	Bypass valve closed
3/30/2012	10:32:51 AM	Bubbler valve closed
3/30/2012	10:32:51 AM	Main Vac valve opened
3/30/2012	10:32:51 AM	Helium MFC set to  0.000000
3/30/2012	10:32:51 AM	H2 MFC set to  0.000000
3/30/2012	10:32:51 AM	BCl3 MFC set to  0.000000
3/30/2012	10:32:51 AM	PH3 MFC set to  0.000000
3/30/2012	10:32:51 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:32:51 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:32:51 AM	Tube furnace set to 150
3/30/2012	10:33:21 AM	H2 valve closed
3/30/2012	10:33:21 AM	BCl3 valve closed
3/30/2012	10:33:21 AM	PH3 valve closed
3/30/2012	10:33:21 AM	SiCl4 pre valve closed
3/30/2012	10:33:21 AM	SiCl4 post valve closed
3/30/2012	10:33:21 AM	Bypass valve closed
3/30/2012	10:33:21 AM	Bubbler valve closed
3/30/2012	10:33:21 AM	Helium valve opened
3/30/2012	10:33:21 AM	Main Vac valve opened
3/30/2012	10:33:21 AM	Helium MFC set to  20.000000
3/30/2012	10:33:21 AM	H2 MFC set to  0.000000
3/30/2012	10:33:21 AM	BCl3 MFC set to  0.000000
3/30/2012	10:33:21 AM	PH3 MFC set to  0.000000
3/30/2012	10:33:21 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:33:21 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:33:21 AM	Tube furnace set to 150
3/30/2012	10:33:51 AM	Helium valve closed
3/30/2012	10:33:51 AM	H2 valve closed
3/30/2012	10:33:51 AM	BCl3 valve closed
3/30/2012	10:33:51 AM	PH3 valve closed
3/30/2012	10:33:51 AM	SiCl4 pre valve closed
3/30/2012	10:33:51 AM	SiCl4 post valve closed
3/30/2012	10:33:51 AM	Bypass valve closed
3/30/2012	10:33:51 AM	Bubbler valve closed
3/30/2012	10:33:51 AM	Main Vac valve opened
3/30/2012	10:33:51 AM	Helium MFC set to  0.000000
3/30/2012	10:33:51 AM	H2 MFC set to  0.000000
3/30/2012	10:33:51 AM	BCl3 MFC set to  0.000000
3/30/2012	10:33:51 AM	PH3 MFC set to  0.000000
3/30/2012	10:33:51 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:33:51 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:33:51 AM	Tube furnace set to 150
3/30/2012	10:34:21 AM	H2 valve closed
3/30/2012	10:34:21 AM	BCl3 valve closed
3/30/2012	10:34:21 AM	PH3 valve closed
3/30/2012	10:34:21 AM	SiCl4 pre valve closed
3/30/2012	10:34:21 AM	SiCl4 post valve closed
3/30/2012	10:34:21 AM	Bypass valve closed
3/30/2012	10:34:21 AM	Bubbler valve closed
3/30/2012	10:34:21 AM	Helium valve opened
3/30/2012	10:34:21 AM	Main Vac valve opened
3/30/2012	10:34:21 AM	Helium MFC set to  20.000000
3/30/2012	10:34:21 AM	H2 MFC set to  0.000000
3/30/2012	10:34:21 AM	BCl3 MFC set to  0.000000
3/30/2012	10:34:21 AM	PH3 MFC set to  0.000000
3/30/2012	10:34:21 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:34:21 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:34:21 AM	Tube furnace set to 150
3/30/2012	10:34:52 AM	Helium valve closed
3/30/2012	10:34:52 AM	H2 valve closed
3/30/2012	10:34:52 AM	BCl3 valve closed
3/30/2012	10:34:52 AM	PH3 valve closed
3/30/2012	10:34:52 AM	SiCl4 pre valve closed
3/30/2012	10:34:52 AM	SiCl4 post valve closed
3/30/2012	10:34:52 AM	Bypass valve closed
3/30/2012	10:34:52 AM	Bubbler valve closed
3/30/2012	10:34:52 AM	Main Vac valve opened
3/30/2012	10:34:52 AM	Helium MFC set to  0.000000
3/30/2012	10:34:52 AM	H2 MFC set to  0.000000
3/30/2012	10:34:52 AM	BCl3 MFC set to  0.000000
3/30/2012	10:34:52 AM	PH3 MFC set to  0.000000
3/30/2012	10:34:52 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:34:52 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:34:52 AM	Tube furnace set to 150
3/30/2012	10:35:22 AM	H2 valve closed
3/30/2012	10:35:22 AM	BCl3 valve closed
3/30/2012	10:35:22 AM	PH3 valve closed
3/30/2012	10:35:22 AM	SiCl4 pre valve closed
3/30/2012	10:35:22 AM	SiCl4 post valve closed
3/30/2012	10:35:22 AM	Bypass valve closed
3/30/2012	10:35:22 AM	Bubbler valve closed
3/30/2012	10:35:22 AM	Helium valve opened
3/30/2012	10:35:22 AM	Main Vac valve opened
3/30/2012	10:35:22 AM	Helium MFC set to  20.000000
3/30/2012	10:35:22 AM	H2 MFC set to  0.000000
3/30/2012	10:35:22 AM	BCl3 MFC set to  0.000000
3/30/2012	10:35:22 AM	PH3 MFC set to  0.000000
3/30/2012	10:35:22 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:35:22 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:35:22 AM	Tube furnace set to 150
3/30/2012	10:35:52 AM	Helium valve closed
3/30/2012	10:35:52 AM	H2 valve closed
3/30/2012	10:35:52 AM	BCl3 valve closed
3/30/2012	10:35:52 AM	PH3 valve closed
3/30/2012	10:35:52 AM	SiCl4 pre valve closed
3/30/2012	10:35:52 AM	SiCl4 post valve closed
3/30/2012	10:35:52 AM	Bypass valve closed
3/30/2012	10:35:52 AM	Bubbler valve closed
3/30/2012	10:35:52 AM	Main Vac valve opened
3/30/2012	10:35:52 AM	Helium MFC set to  0.000000
3/30/2012	10:35:52 AM	H2 MFC set to  0.000000
3/30/2012	10:35:52 AM	BCl3 MFC set to  0.000000
3/30/2012	10:35:52 AM	PH3 MFC set to  0.000000
3/30/2012	10:35:52 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:35:52 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:35:52 AM	Tube furnace set to 150
3/30/2012	10:36:22 AM	H2 valve closed
3/30/2012	10:36:22 AM	BCl3 valve closed
3/30/2012	10:36:22 AM	PH3 valve closed
3/30/2012	10:36:22 AM	SiCl4 pre valve closed
3/30/2012	10:36:22 AM	SiCl4 post valve closed
3/30/2012	10:36:22 AM	Bypass valve closed
3/30/2012	10:36:22 AM	Bubbler valve closed
3/30/2012	10:36:22 AM	Helium valve opened
3/30/2012	10:36:22 AM	Main Vac valve opened
3/30/2012	10:36:22 AM	Helium MFC set to  20.000000
3/30/2012	10:36:22 AM	H2 MFC set to  0.000000
3/30/2012	10:36:22 AM	BCl3 MFC set to  0.000000
3/30/2012	10:36:22 AM	PH3 MFC set to  0.000000
3/30/2012	10:36:22 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:36:22 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:36:22 AM	Tube furnace set to 150
3/30/2012	10:36:52 AM	Helium valve closed
3/30/2012	10:36:52 AM	H2 valve closed
3/30/2012	10:36:52 AM	BCl3 valve closed
3/30/2012	10:36:52 AM	PH3 valve closed
3/30/2012	10:36:52 AM	SiCl4 pre valve closed
3/30/2012	10:36:52 AM	SiCl4 post valve closed
3/30/2012	10:36:52 AM	Bypass valve closed
3/30/2012	10:36:52 AM	Bubbler valve closed
3/30/2012	10:36:52 AM	Main Vac valve opened
3/30/2012	10:36:52 AM	Helium MFC set to  0.000000
3/30/2012	10:36:52 AM	H2 MFC set to  0.000000
3/30/2012	10:36:53 AM	BCl3 MFC set to  0.000000
3/30/2012	10:36:53 AM	PH3 MFC set to  0.000000
3/30/2012	10:36:53 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:36:53 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:36:53 AM	Tube furnace set to 150
3/30/2012	10:36:54 AM	Run finished at 10:36 AM
3/30/2012	10:38:18 AM	Recipe started at 10:38 AM
3/30/2012	10:38:18 AM	Helium valve closed
3/30/2012	10:38:18 AM	H2 valve closed
3/30/2012	10:38:18 AM	BCl3 valve closed
3/30/2012	10:38:18 AM	PH3 valve closed
3/30/2012	10:38:18 AM	SiCl4 pre valve closed
3/30/2012	10:38:18 AM	SiCl4 post valve closed
3/30/2012	10:38:18 AM	Bypass valve closed
3/30/2012	10:38:18 AM	Bubbler valve closed
3/30/2012	10:38:18 AM	Main Vac valve opened
3/30/2012	10:38:18 AM	Helium MFC set to  0.000000
3/30/2012	10:38:18 AM	H2 MFC set to  0.000000
3/30/2012	10:38:18 AM	BCl3 MFC set to  0.000000
3/30/2012	10:38:18 AM	PH3 MFC set to  0.000000
3/30/2012	10:38:18 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:38:18 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:38:18 AM	Tube furnace set to 150
3/30/2012	10:38:22 AM	H2 valve closed
3/30/2012	10:38:22 AM	BCl3 valve closed
3/30/2012	10:38:22 AM	PH3 valve closed
3/30/2012	10:38:22 AM	SiCl4 pre valve closed
3/30/2012	10:38:22 AM	SiCl4 post valve closed
3/30/2012	10:38:22 AM	Bypass valve closed
3/30/2012	10:38:22 AM	Bubbler valve closed
3/30/2012	10:38:22 AM	Helium valve opened
3/30/2012	10:38:22 AM	Main Vac valve opened
3/30/2012	10:38:22 AM	Helium MFC set to  20.000000
3/30/2012	10:38:22 AM	H2 MFC set to  0.000000
3/30/2012	10:38:22 AM	BCl3 MFC set to  0.000000
3/30/2012	10:38:22 AM	PH3 MFC set to  0.000000
3/30/2012	10:38:22 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:38:22 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:38:23 AM	Tube furnace set to 150
3/30/2012	10:38:53 AM	Helium valve closed
3/30/2012	10:38:53 AM	H2 valve closed
3/30/2012	10:38:53 AM	BCl3 valve closed
3/30/2012	10:38:53 AM	PH3 valve closed
3/30/2012	10:38:53 AM	SiCl4 pre valve closed
3/30/2012	10:38:53 AM	SiCl4 post valve closed
3/30/2012	10:38:53 AM	Bypass valve closed
3/30/2012	10:38:53 AM	Bubbler valve closed
3/30/2012	10:38:53 AM	Main Vac valve opened
3/30/2012	10:38:53 AM	Helium MFC set to  0.000000
3/30/2012	10:38:53 AM	H2 MFC set to  0.000000
3/30/2012	10:38:53 AM	BCl3 MFC set to  0.000000
3/30/2012	10:38:53 AM	PH3 MFC set to  0.000000
3/30/2012	10:38:53 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:38:53 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:38:53 AM	Tube furnace set to 150
3/30/2012	10:39:23 AM	H2 valve closed
3/30/2012	10:39:23 AM	BCl3 valve closed
3/30/2012	10:39:23 AM	PH3 valve closed
3/30/2012	10:39:23 AM	SiCl4 pre valve closed
3/30/2012	10:39:23 AM	SiCl4 post valve closed
3/30/2012	10:39:23 AM	Bypass valve closed
3/30/2012	10:39:23 AM	Bubbler valve closed
3/30/2012	10:39:23 AM	Helium valve opened
3/30/2012	10:39:23 AM	Main Vac valve opened
3/30/2012	10:39:23 AM	Helium MFC set to  20.000000
3/30/2012	10:39:23 AM	H2 MFC set to  0.000000
3/30/2012	10:39:23 AM	BCl3 MFC set to  0.000000
3/30/2012	10:39:23 AM	PH3 MFC set to  0.000000
3/30/2012	10:39:23 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:39:23 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:39:23 AM	Tube furnace set to 150
3/30/2012	10:39:53 AM	Helium valve closed
3/30/2012	10:39:53 AM	H2 valve closed
3/30/2012	10:39:53 AM	BCl3 valve closed
3/30/2012	10:39:53 AM	PH3 valve closed
3/30/2012	10:39:53 AM	SiCl4 pre valve closed
3/30/2012	10:39:53 AM	SiCl4 post valve closed
3/30/2012	10:39:53 AM	Bypass valve closed
3/30/2012	10:39:53 AM	Bubbler valve closed
3/30/2012	10:39:53 AM	Main Vac valve opened
3/30/2012	10:39:53 AM	Helium MFC set to  0.000000
3/30/2012	10:39:53 AM	H2 MFC set to  0.000000
3/30/2012	10:39:53 AM	BCl3 MFC set to  0.000000
3/30/2012	10:39:53 AM	PH3 MFC set to  0.000000
3/30/2012	10:39:53 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:39:53 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:39:53 AM	Tube furnace set to 150
3/30/2012	10:40:23 AM	H2 valve closed
3/30/2012	10:40:23 AM	BCl3 valve closed
3/30/2012	10:40:23 AM	PH3 valve closed
3/30/2012	10:40:23 AM	SiCl4 pre valve closed
3/30/2012	10:40:23 AM	SiCl4 post valve closed
3/30/2012	10:40:23 AM	Bypass valve closed
3/30/2012	10:40:23 AM	Bubbler valve closed
3/30/2012	10:40:23 AM	Helium valve opened
3/30/2012	10:40:23 AM	Main Vac valve opened
3/30/2012	10:40:23 AM	Helium MFC set to  20.000000
3/30/2012	10:40:23 AM	H2 MFC set to  0.000000
3/30/2012	10:40:23 AM	BCl3 MFC set to  0.000000
3/30/2012	10:40:23 AM	PH3 MFC set to  0.000000
3/30/2012	10:40:23 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:40:23 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:40:23 AM	Tube furnace set to 150
3/30/2012	10:40:53 AM	Helium valve closed
3/30/2012	10:40:53 AM	H2 valve closed
3/30/2012	10:40:53 AM	BCl3 valve closed
3/30/2012	10:40:53 AM	PH3 valve closed
3/30/2012	10:40:53 AM	SiCl4 pre valve closed
3/30/2012	10:40:54 AM	SiCl4 post valve closed
3/30/2012	10:40:54 AM	Bypass valve closed
3/30/2012	10:40:54 AM	Bubbler valve closed
3/30/2012	10:40:54 AM	Main Vac valve opened
3/30/2012	10:40:54 AM	Helium MFC set to  0.000000
3/30/2012	10:40:54 AM	H2 MFC set to  0.000000
3/30/2012	10:40:54 AM	BCl3 MFC set to  0.000000
3/30/2012	10:40:54 AM	PH3 MFC set to  0.000000
3/30/2012	10:40:54 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:40:54 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:40:54 AM	Tube furnace set to 150
3/30/2012	10:41:24 AM	H2 valve closed
3/30/2012	10:41:24 AM	BCl3 valve closed
3/30/2012	10:41:24 AM	PH3 valve closed
3/30/2012	10:41:24 AM	SiCl4 pre valve closed
3/30/2012	10:41:24 AM	SiCl4 post valve closed
3/30/2012	10:41:24 AM	Bypass valve closed
3/30/2012	10:41:24 AM	Bubbler valve closed
3/30/2012	10:41:24 AM	Helium valve opened
3/30/2012	10:41:24 AM	Main Vac valve opened
3/30/2012	10:41:24 AM	Helium MFC set to  20.000000
3/30/2012	10:41:24 AM	H2 MFC set to  0.000000
3/30/2012	10:41:24 AM	BCl3 MFC set to  0.000000
3/30/2012	10:41:24 AM	PH3 MFC set to  0.000000
3/30/2012	10:41:24 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:41:24 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:41:24 AM	Tube furnace set to 150
3/30/2012	10:41:54 AM	Helium valve closed
3/30/2012	10:41:54 AM	H2 valve closed
3/30/2012	10:41:54 AM	BCl3 valve closed
3/30/2012	10:41:54 AM	PH3 valve closed
3/30/2012	10:41:54 AM	SiCl4 pre valve closed
3/30/2012	10:41:54 AM	SiCl4 post valve closed
3/30/2012	10:41:54 AM	Bypass valve closed
3/30/2012	10:41:54 AM	Bubbler valve closed
3/30/2012	10:41:54 AM	Main Vac valve opened
3/30/2012	10:41:54 AM	Helium MFC set to  0.000000
3/30/2012	10:41:54 AM	H2 MFC set to  0.000000
3/30/2012	10:41:54 AM	BCl3 MFC set to  0.000000
3/30/2012	10:41:54 AM	PH3 MFC set to  0.000000
3/30/2012	10:41:54 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:41:54 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:41:54 AM	Tube furnace set to 150
3/30/2012	10:42:24 AM	H2 valve closed
3/30/2012	10:42:24 AM	BCl3 valve closed
3/30/2012	10:42:24 AM	PH3 valve closed
3/30/2012	10:42:24 AM	SiCl4 pre valve closed
3/30/2012	10:42:24 AM	SiCl4 post valve closed
3/30/2012	10:42:24 AM	Bypass valve closed
3/30/2012	10:42:24 AM	Bubbler valve closed
3/30/2012	10:42:24 AM	Helium valve opened
3/30/2012	10:42:24 AM	Main Vac valve opened
3/30/2012	10:42:24 AM	Helium MFC set to  20.000000
3/30/2012	10:42:24 AM	H2 MFC set to  0.000000
3/30/2012	10:42:24 AM	BCl3 MFC set to  0.000000
3/30/2012	10:42:24 AM	PH3 MFC set to  0.000000
3/30/2012	10:42:24 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:42:24 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:42:24 AM	Tube furnace set to 150
3/30/2012	10:42:54 AM	Helium valve closed
3/30/2012	10:42:54 AM	H2 valve closed
3/30/2012	10:42:54 AM	BCl3 valve closed
3/30/2012	10:42:54 AM	PH3 valve closed
3/30/2012	10:42:54 AM	SiCl4 pre valve closed
3/30/2012	10:42:54 AM	SiCl4 post valve closed
3/30/2012	10:42:54 AM	Bypass valve closed
3/30/2012	10:42:54 AM	Bubbler valve closed
3/30/2012	10:42:54 AM	Main Vac valve opened
3/30/2012	10:42:54 AM	Helium MFC set to  0.000000
3/30/2012	10:42:54 AM	H2 MFC set to  0.000000
3/30/2012	10:42:54 AM	BCl3 MFC set to  0.000000
3/30/2012	10:42:54 AM	PH3 MFC set to  0.000000
3/30/2012	10:42:54 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:42:54 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:42:55 AM	Tube furnace set to 150
3/30/2012	10:43:25 AM	H2 valve closed
3/30/2012	10:43:25 AM	BCl3 valve closed
3/30/2012	10:43:25 AM	PH3 valve closed
3/30/2012	10:43:25 AM	SiCl4 pre valve closed
3/30/2012	10:43:25 AM	SiCl4 post valve closed
3/30/2012	10:43:25 AM	Bypass valve closed
3/30/2012	10:43:25 AM	Bubbler valve closed
3/30/2012	10:43:25 AM	Helium valve opened
3/30/2012	10:43:25 AM	Main Vac valve opened
3/30/2012	10:43:25 AM	Helium MFC set to  20.000000
3/30/2012	10:43:25 AM	H2 MFC set to  0.000000
3/30/2012	10:43:25 AM	BCl3 MFC set to  0.000000
3/30/2012	10:43:25 AM	PH3 MFC set to  0.000000
3/30/2012	10:43:25 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:43:25 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:43:25 AM	Tube furnace set to 150
3/30/2012	10:43:55 AM	Helium valve closed
3/30/2012	10:43:55 AM	H2 valve closed
3/30/2012	10:43:55 AM	BCl3 valve closed
3/30/2012	10:43:55 AM	PH3 valve closed
3/30/2012	10:43:55 AM	SiCl4 pre valve closed
3/30/2012	10:43:55 AM	SiCl4 post valve closed
3/30/2012	10:43:55 AM	Bypass valve closed
3/30/2012	10:43:55 AM	Bubbler valve closed
3/30/2012	10:43:55 AM	Main Vac valve opened
3/30/2012	10:43:55 AM	Helium MFC set to  0.000000
3/30/2012	10:43:55 AM	H2 MFC set to  0.000000
3/30/2012	10:43:55 AM	BCl3 MFC set to  0.000000
3/30/2012	10:43:55 AM	PH3 MFC set to  0.000000
3/30/2012	10:43:55 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:43:55 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:43:55 AM	Tube furnace set to 150
3/30/2012	10:44:25 AM	H2 valve closed
3/30/2012	10:44:25 AM	BCl3 valve closed
3/30/2012	10:44:25 AM	PH3 valve closed
3/30/2012	10:44:25 AM	SiCl4 pre valve closed
3/30/2012	10:44:25 AM	SiCl4 post valve closed
3/30/2012	10:44:25 AM	Bypass valve closed
3/30/2012	10:44:25 AM	Bubbler valve closed
3/30/2012	10:44:25 AM	Helium valve opened
3/30/2012	10:44:25 AM	Main Vac valve opened
3/30/2012	10:44:25 AM	Helium MFC set to  20.000000
3/30/2012	10:44:25 AM	H2 MFC set to  0.000000
3/30/2012	10:44:25 AM	BCl3 MFC set to  0.000000
3/30/2012	10:44:25 AM	PH3 MFC set to  0.000000
3/30/2012	10:44:25 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:44:25 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:44:25 AM	Tube furnace set to 150
3/30/2012	10:44:55 AM	Helium valve closed
3/30/2012	10:44:55 AM	H2 valve closed
3/30/2012	10:44:55 AM	BCl3 valve closed
3/30/2012	10:44:55 AM	PH3 valve closed
3/30/2012	10:44:55 AM	SiCl4 pre valve closed
3/30/2012	10:44:55 AM	SiCl4 post valve closed
3/30/2012	10:44:55 AM	Bypass valve closed
3/30/2012	10:44:55 AM	Bubbler valve closed
3/30/2012	10:44:55 AM	Main Vac valve opened
3/30/2012	10:44:55 AM	Helium MFC set to  0.000000
3/30/2012	10:44:55 AM	H2 MFC set to  0.000000
3/30/2012	10:44:55 AM	BCl3 MFC set to  0.000000
3/30/2012	10:44:55 AM	PH3 MFC set to  0.000000
3/30/2012	10:44:55 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:44:55 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:44:56 AM	Tube furnace set to 150
3/30/2012	10:45:26 AM	H2 valve closed
3/30/2012	10:45:26 AM	BCl3 valve closed
3/30/2012	10:45:26 AM	PH3 valve closed
3/30/2012	10:45:26 AM	SiCl4 pre valve closed
3/30/2012	10:45:26 AM	SiCl4 post valve closed
3/30/2012	10:45:26 AM	Bypass valve closed
3/30/2012	10:45:26 AM	Bubbler valve closed
3/30/2012	10:45:26 AM	Helium valve opened
3/30/2012	10:45:26 AM	Main Vac valve opened
3/30/2012	10:45:26 AM	Helium MFC set to  20.000000
3/30/2012	10:45:26 AM	H2 MFC set to  0.000000
3/30/2012	10:45:26 AM	BCl3 MFC set to  0.000000
3/30/2012	10:45:26 AM	PH3 MFC set to  0.000000
3/30/2012	10:45:26 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:45:26 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:45:26 AM	Tube furnace set to 150
3/30/2012	10:45:56 AM	Helium valve closed
3/30/2012	10:45:56 AM	H2 valve closed
3/30/2012	10:45:56 AM	BCl3 valve closed
3/30/2012	10:45:56 AM	PH3 valve closed
3/30/2012	10:45:56 AM	SiCl4 pre valve closed
3/30/2012	10:45:56 AM	SiCl4 post valve closed
3/30/2012	10:45:56 AM	Bypass valve closed
3/30/2012	10:45:56 AM	Bubbler valve closed
3/30/2012	10:45:56 AM	Main Vac valve opened
3/30/2012	10:45:56 AM	Helium MFC set to  0.000000
3/30/2012	10:45:56 AM	H2 MFC set to  0.000000
3/30/2012	10:45:56 AM	BCl3 MFC set to  0.000000
3/30/2012	10:45:56 AM	PH3 MFC set to  0.000000
3/30/2012	10:45:56 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:45:56 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:45:56 AM	Tube furnace set to 150
3/30/2012	10:46:26 AM	H2 valve closed
3/30/2012	10:46:26 AM	BCl3 valve closed
3/30/2012	10:46:26 AM	PH3 valve closed
3/30/2012	10:46:26 AM	SiCl4 pre valve closed
3/30/2012	10:46:26 AM	SiCl4 post valve closed
3/30/2012	10:46:26 AM	Bypass valve closed
3/30/2012	10:46:26 AM	Bubbler valve closed
3/30/2012	10:46:26 AM	Helium valve opened
3/30/2012	10:46:26 AM	Main Vac valve opened
3/30/2012	10:46:26 AM	Helium MFC set to  20.000000
3/30/2012	10:46:26 AM	H2 MFC set to  0.000000
3/30/2012	10:46:26 AM	BCl3 MFC set to  0.000000
3/30/2012	10:46:26 AM	PH3 MFC set to  0.000000
3/30/2012	10:46:26 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:46:26 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:46:26 AM	Tube furnace set to 150
3/30/2012	10:46:56 AM	Helium valve closed
3/30/2012	10:46:56 AM	H2 valve closed
3/30/2012	10:46:56 AM	BCl3 valve closed
3/30/2012	10:46:56 AM	PH3 valve closed
3/30/2012	10:46:56 AM	SiCl4 pre valve closed
3/30/2012	10:46:56 AM	SiCl4 post valve closed
3/30/2012	10:46:56 AM	Bypass valve closed
3/30/2012	10:46:56 AM	Bubbler valve closed
3/30/2012	10:46:56 AM	Main Vac valve opened
3/30/2012	10:46:56 AM	Helium MFC set to  0.000000
3/30/2012	10:46:56 AM	H2 MFC set to  0.000000
3/30/2012	10:46:56 AM	BCl3 MFC set to  0.000000
3/30/2012	10:46:56 AM	PH3 MFC set to  0.000000
3/30/2012	10:46:56 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:46:56 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:46:57 AM	Tube furnace set to 150
3/30/2012	10:47:27 AM	H2 valve closed
3/30/2012	10:47:27 AM	BCl3 valve closed
3/30/2012	10:47:27 AM	PH3 valve closed
3/30/2012	10:47:27 AM	SiCl4 pre valve closed
3/30/2012	10:47:27 AM	SiCl4 post valve closed
3/30/2012	10:47:27 AM	Bypass valve closed
3/30/2012	10:47:27 AM	Bubbler valve closed
3/30/2012	10:47:27 AM	Helium valve opened
3/30/2012	10:47:27 AM	Main Vac valve opened
3/30/2012	10:47:27 AM	Helium MFC set to  20.000000
3/30/2012	10:47:27 AM	H2 MFC set to  0.000000
3/30/2012	10:47:27 AM	BCl3 MFC set to  0.000000
3/30/2012	10:47:27 AM	PH3 MFC set to  0.000000
3/30/2012	10:47:27 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:47:27 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:47:27 AM	Tube furnace set to 150
3/30/2012	10:47:57 AM	Helium valve closed
3/30/2012	10:47:57 AM	H2 valve closed
3/30/2012	10:47:57 AM	BCl3 valve closed
3/30/2012	10:47:57 AM	PH3 valve closed
3/30/2012	10:47:57 AM	SiCl4 pre valve closed
3/30/2012	10:47:57 AM	SiCl4 post valve closed
3/30/2012	10:47:57 AM	Bypass valve closed
3/30/2012	10:47:57 AM	Bubbler valve closed
3/30/2012	10:47:57 AM	Main Vac valve opened
3/30/2012	10:47:57 AM	Helium MFC set to  0.000000
3/30/2012	10:47:57 AM	H2 MFC set to  0.000000
3/30/2012	10:47:57 AM	BCl3 MFC set to  0.000000
3/30/2012	10:47:57 AM	PH3 MFC set to  0.000000
3/30/2012	10:47:57 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:47:57 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:47:57 AM	Tube furnace set to 150
3/30/2012	10:47:58 AM	Run finished at 10:47 AM
3/30/2012	10:48:29 AM	Main Vac valve closed
3/30/2012	10:48:41 AM	Main Vac valve opened
3/30/2012	10:49:15 AM	Recipe started at 10:49 AM
3/30/2012	10:49:15 AM	Helium valve closed
3/30/2012	10:49:15 AM	H2 valve closed
3/30/2012	10:49:15 AM	BCl3 valve closed
3/30/2012	10:49:15 AM	PH3 valve closed
3/30/2012	10:49:15 AM	SiCl4 pre valve closed
3/30/2012	10:49:15 AM	SiCl4 post valve closed
3/30/2012	10:49:15 AM	Main Vac valve closed
3/30/2012	10:49:15 AM	Bypass valve closed
3/30/2012	10:49:15 AM	Bubbler valve closed
3/30/2012	10:49:15 AM	Helium MFC set to  0.000000
3/30/2012	10:49:15 AM	H2 MFC set to  0.000000
3/30/2012	10:49:15 AM	BCl3 MFC set to  0.000000
3/30/2012	10:49:15 AM	PH3 MFC set to  0.000000
3/30/2012	10:49:15 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:49:15 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:49:15 AM	Tube furnace set to 0
3/30/2012	10:49:18 AM	Helium valve closed
3/30/2012	10:49:18 AM	BCl3 valve closed
3/30/2012	10:49:18 AM	PH3 valve closed
3/30/2012	10:49:18 AM	SiCl4 pre valve closed
3/30/2012	10:49:18 AM	SiCl4 post valve closed
3/30/2012	10:49:18 AM	Main Vac valve closed
3/30/2012	10:49:18 AM	Bypass valve closed
3/30/2012	10:49:18 AM	Bubbler valve closed
3/30/2012	10:49:18 AM	H2 valve opened
3/30/2012	10:49:18 AM	Helium MFC set to  0.000000
3/30/2012	10:49:18 AM	H2 MFC set to  500.000000
3/30/2012	10:49:18 AM	BCl3 MFC set to  0.000000
3/30/2012	10:49:18 AM	PH3 MFC set to  0.000000
3/30/2012	10:49:18 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:49:18 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:49:19 AM	Tube furnace set to 0
3/30/2012	10:50:22 AM	Helium valve closed
3/30/2012	10:50:22 AM	BCl3 valve closed
3/30/2012	10:50:22 AM	PH3 valve closed
3/30/2012	10:50:22 AM	SiCl4 pre valve closed
3/30/2012	10:50:22 AM	SiCl4 post valve closed
3/30/2012	10:50:22 AM	Main Vac valve closed
3/30/2012	10:50:22 AM	Bypass valve closed
3/30/2012	10:50:22 AM	H2 valve opened
3/30/2012	10:50:22 AM	Bubbler valve opened
3/30/2012	10:50:22 AM	Helium MFC set to  0.000000
3/30/2012	10:50:22 AM	H2 MFC set to  500.000000
3/30/2012	10:50:22 AM	BCl3 MFC set to  0.000000
3/30/2012	10:50:22 AM	PH3 MFC set to  0.000000
3/30/2012	10:50:22 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:50:22 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:50:23 AM	Tube furnace set to 0
3/30/2012	10:50:24 AM	Helium valve closed
3/30/2012	10:50:24 AM	BCl3 valve closed
3/30/2012	10:50:24 AM	PH3 valve closed
3/30/2012	10:50:24 AM	SiCl4 pre valve closed
3/30/2012	10:50:24 AM	SiCl4 post valve closed
3/30/2012	10:50:24 AM	Main Vac valve closed
3/30/2012	10:50:24 AM	Bypass valve closed
3/30/2012	10:50:24 AM	H2 valve opened
3/30/2012	10:50:24 AM	Bubbler valve opened
3/30/2012	10:50:24 AM	Helium MFC set to  0.000000
3/30/2012	10:50:24 AM	H2 MFC set to  450.000000
3/30/2012	10:50:24 AM	BCl3 MFC set to  0.000000
3/30/2012	10:50:24 AM	PH3 MFC set to  0.000000
3/30/2012	10:50:24 AM	SiCl4 MFC set to  0.000000
3/30/2012	10:50:24 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	10:50:24 AM	Tube furnace set to 1000
3/30/2012	11:15:24 AM	Helium valve closed
3/30/2012	11:15:24 AM	PH3 valve closed
3/30/2012	11:15:24 AM	Main Vac valve closed
3/30/2012	11:15:24 AM	Bypass valve closed
3/30/2012	11:15:24 AM	H2 valve opened
3/30/2012	11:15:24 AM	BCl3 valve opened
3/30/2012	11:15:24 AM	SiCl4 pre valve opened
3/30/2012	11:15:24 AM	SiCl4 post valve opened
3/30/2012	11:15:24 AM	Bubbler valve opened
3/30/2012	11:15:24 AM	Helium MFC set to  0.000000
3/30/2012	11:15:24 AM	H2 MFC set to  450.000000
3/30/2012	11:15:24 AM	BCl3 MFC set to  1.500000
3/30/2012	11:15:24 AM	PH3 MFC set to  0.000000
3/30/2012	11:15:24 AM	SiCl4 MFC set to  50.000000
3/30/2012	11:15:24 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	11:15:24 AM	Tube furnace set to 1000
3/30/2012	11:20:24 AM	Helium valve closed
3/30/2012	11:20:24 AM	BCl3 valve closed
3/30/2012	11:20:24 AM	PH3 valve closed
3/30/2012	11:20:24 AM	SiCl4 pre valve closed
3/30/2012	11:20:24 AM	SiCl4 post valve closed
3/30/2012	11:20:24 AM	Main Vac valve closed
3/30/2012	11:20:24 AM	Bypass valve closed
3/30/2012	11:20:24 AM	H2 valve opened
3/30/2012	11:20:24 AM	Bubbler valve opened
3/30/2012	11:20:24 AM	Helium MFC set to  0.000000
3/30/2012	11:20:24 AM	H2 MFC set to  500.000000
3/30/2012	11:20:24 AM	BCl3 MFC set to  0.000000
3/30/2012	11:20:24 AM	PH3 MFC set to  0.000000
3/30/2012	11:20:24 AM	SiCl4 MFC set to  0.000000
3/30/2012	11:20:24 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	11:20:24 AM	Tube furnace set to 750
3/30/2012	11:25:24 AM	H2 valve closed
3/30/2012	11:25:24 AM	BCl3 valve closed
3/30/2012	11:25:24 AM	PH3 valve closed
3/30/2012	11:25:24 AM	SiCl4 pre valve closed
3/30/2012	11:25:24 AM	SiCl4 post valve closed
3/30/2012	11:25:24 AM	Main Vac valve closed
3/30/2012	11:25:24 AM	Bypass valve closed
3/30/2012	11:25:24 AM	Helium valve opened
3/30/2012	11:25:24 AM	Bubbler valve opened
3/30/2012	11:25:24 AM	Helium MFC set to  500.000000
3/30/2012	11:25:24 AM	H2 MFC set to  0.000000
3/30/2012	11:25:24 AM	BCl3 MFC set to  0.000000
3/30/2012	11:25:24 AM	PH3 MFC set to  0.000000
3/30/2012	11:25:24 AM	SiCl4 MFC set to  0.000000
3/30/2012	11:25:24 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	11:25:24 AM	Tube furnace set to 0
3/30/2012	11:45:24 AM	Helium valve closed
3/30/2012	11:45:24 AM	H2 valve closed
3/30/2012	11:45:24 AM	BCl3 valve closed
3/30/2012	11:45:24 AM	PH3 valve closed
3/30/2012	11:45:24 AM	SiCl4 pre valve closed
3/30/2012	11:45:24 AM	SiCl4 post valve closed
3/30/2012	11:45:24 AM	Main Vac valve closed
3/30/2012	11:45:24 AM	Bypass valve closed
3/30/2012	11:45:24 AM	Bubbler valve closed
3/30/2012	11:45:24 AM	Helium MFC set to  0.000000
3/30/2012	11:45:24 AM	H2 MFC set to  0.000000
3/30/2012	11:45:24 AM	BCl3 MFC set to  0.000000
3/30/2012	11:45:24 AM	PH3 MFC set to  0.000000
3/30/2012	11:45:24 AM	SiCl4 MFC set to  0.000000
3/30/2012	11:45:24 AM	Bypass solenoid MFC set to  0.000000
3/30/2012	11:45:25 AM	Tube furnace set to 0
3/30/2012	11:45:26 AM	Run finished at 11:45 AM
3/30/2012	12:10:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/30/2012	12:10:55 PM	Recipe started at 12:10 PM
3/30/2012	12:10:55 PM	Helium valve closed
3/30/2012	12:10:55 PM	H2 valve closed
3/30/2012	12:10:55 PM	BCl3 valve closed
3/30/2012	12:10:55 PM	PH3 valve closed
3/30/2012	12:10:55 PM	SiCl4 pre valve closed
3/30/2012	12:10:55 PM	SiCl4 post valve closed
3/30/2012	12:10:55 PM	Main Vac valve closed
3/30/2012	12:10:55 PM	Bypass valve closed
3/30/2012	12:10:55 PM	Bubbler valve closed
3/30/2012	12:10:55 PM	Helium MFC set to  0.000000
3/30/2012	12:10:55 PM	H2 MFC set to  0.000000
3/30/2012	12:10:55 PM	BCl3 MFC set to  0.000000
3/30/2012	12:10:55 PM	PH3 MFC set to  0.000000
3/30/2012	12:10:55 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:10:55 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:10:55 PM	Tube furnace set to 0
3/30/2012	12:10:58 PM	H2 valve closed
3/30/2012	12:10:58 PM	BCl3 valve closed
3/30/2012	12:10:58 PM	PH3 valve closed
3/30/2012	12:10:58 PM	SiCl4 pre valve closed
3/30/2012	12:10:58 PM	SiCl4 post valve closed
3/30/2012	12:10:58 PM	Main Vac valve closed
3/30/2012	12:10:58 PM	Bypass valve closed
3/30/2012	12:10:58 PM	Bubbler valve closed
3/30/2012	12:10:58 PM	Helium valve opened
3/30/2012	12:10:58 PM	Helium MFC set to  500.000000
3/30/2012	12:10:58 PM	H2 MFC set to  0.000000
3/30/2012	12:10:58 PM	BCl3 MFC set to  0.000000
3/30/2012	12:10:58 PM	PH3 MFC set to  0.000000
3/30/2012	12:10:58 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:10:58 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:10:58 PM	Tube furnace set to 0
3/30/2012	12:10:59 PM	Helium valve closed
3/30/2012	12:10:59 PM	H2 valve closed
3/30/2012	12:10:59 PM	BCl3 valve closed
3/30/2012	12:10:59 PM	PH3 valve closed
3/30/2012	12:10:59 PM	SiCl4 pre valve closed
3/30/2012	12:10:59 PM	SiCl4 post valve closed
3/30/2012	12:10:59 PM	Main Vac valve closed
3/30/2012	12:10:59 PM	Bypass valve closed
3/30/2012	12:10:59 PM	Bubbler valve closed
3/30/2012	12:10:59 PM	Helium MFC set to  0.000000
3/30/2012	12:10:59 PM	H2 MFC set to  0.000000
3/30/2012	12:10:59 PM	BCl3 MFC set to  0.000000
3/30/2012	12:10:59 PM	PH3 MFC set to  0.000000
3/30/2012	12:10:59 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:10:59 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:10:59 PM	Tube furnace set to 0
3/30/2012	12:11:00 PM	Run finished at 12:11 PM
3/30/2012	12:11:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/30/2012	12:17:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2012	12:17:43 PM	Recipe started at 12:17 PM
3/30/2012	12:17:43 PM	Helium valve closed
3/30/2012	12:17:43 PM	H2 valve closed
3/30/2012	12:17:43 PM	BCl3 valve closed
3/30/2012	12:17:43 PM	PH3 valve closed
3/30/2012	12:17:43 PM	SiCl4 pre valve closed
3/30/2012	12:17:43 PM	SiCl4 post valve closed
3/30/2012	12:17:43 PM	Main Vac valve closed
3/30/2012	12:17:43 PM	Bubbler valve closed
3/30/2012	12:17:43 PM	Bypass valve opened
3/30/2012	12:17:43 PM	Helium MFC set to  0.000000
3/30/2012	12:17:43 PM	H2 MFC set to  0.000000
3/30/2012	12:17:43 PM	BCl3 MFC set to  0.000000
3/30/2012	12:17:43 PM	PH3 MFC set to  0.000000
3/30/2012	12:17:43 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:17:43 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:17:44 PM	Tube furnace set to 0
3/30/2012	12:18:46 PM	Helium valve closed
3/30/2012	12:18:46 PM	H2 valve closed
3/30/2012	12:18:46 PM	BCl3 valve closed
3/30/2012	12:18:46 PM	PH3 valve closed
3/30/2012	12:18:46 PM	SiCl4 pre valve closed
3/30/2012	12:18:46 PM	SiCl4 post valve closed
3/30/2012	12:18:46 PM	Main Vac valve closed
3/30/2012	12:18:46 PM	Bubbler valve closed
3/30/2012	12:18:46 PM	Bypass valve opened
3/30/2012	12:18:46 PM	Helium MFC set to  0.000000
3/30/2012	12:18:46 PM	H2 MFC set to  0.000000
3/30/2012	12:18:46 PM	BCl3 MFC set to  0.000000
3/30/2012	12:18:46 PM	PH3 MFC set to  0.000000
3/30/2012	12:18:46 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:18:46 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:18:46 PM	Tube furnace set to 0
3/30/2012	12:19:46 PM	Helium valve closed
3/30/2012	12:19:46 PM	H2 valve closed
3/30/2012	12:19:46 PM	BCl3 valve closed
3/30/2012	12:19:46 PM	PH3 valve closed
3/30/2012	12:19:46 PM	SiCl4 pre valve closed
3/30/2012	12:19:46 PM	SiCl4 post valve closed
3/30/2012	12:19:46 PM	Bypass valve closed
3/30/2012	12:19:46 PM	Bubbler valve closed
3/30/2012	12:19:46 PM	Main Vac valve opened
3/30/2012	12:19:46 PM	Helium MFC set to  0.000000
3/30/2012	12:19:46 PM	H2 MFC set to  0.000000
3/30/2012	12:19:46 PM	BCl3 MFC set to  0.000000
3/30/2012	12:19:46 PM	PH3 MFC set to  0.000000
3/30/2012	12:19:46 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:19:46 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:19:47 PM	Tube furnace set to 0
3/30/2012	12:19:48 PM	Run finished at 12:19 PM
3/30/2012	12:19:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2012	12:25:14 PM	Recipe started at 12:25 PM
3/30/2012	12:25:14 PM	Helium valve closed
3/30/2012	12:25:14 PM	H2 valve closed
3/30/2012	12:25:14 PM	BCl3 valve closed
3/30/2012	12:25:14 PM	PH3 valve closed
3/30/2012	12:25:14 PM	SiCl4 pre valve closed
3/30/2012	12:25:14 PM	SiCl4 post valve closed
3/30/2012	12:25:14 PM	Bypass valve closed
3/30/2012	12:25:14 PM	Bubbler valve closed
3/30/2012	12:25:14 PM	Main Vac valve opened
3/30/2012	12:25:14 PM	Helium MFC set to  0.000000
3/30/2012	12:25:14 PM	H2 MFC set to  0.000000
3/30/2012	12:25:14 PM	BCl3 MFC set to  0.000000
3/30/2012	12:25:14 PM	PH3 MFC set to  0.000000
3/30/2012	12:25:14 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:25:14 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:25:14 PM	Tube furnace set to 150
3/30/2012	12:25:44 PM	H2 valve closed
3/30/2012	12:25:44 PM	BCl3 valve closed
3/30/2012	12:25:44 PM	PH3 valve closed
3/30/2012	12:25:44 PM	SiCl4 pre valve closed
3/30/2012	12:25:44 PM	SiCl4 post valve closed
3/30/2012	12:25:44 PM	Bypass valve closed
3/30/2012	12:25:44 PM	Bubbler valve closed
3/30/2012	12:25:44 PM	Helium valve opened
3/30/2012	12:25:44 PM	Main Vac valve opened
3/30/2012	12:25:44 PM	Helium MFC set to  20.000000
3/30/2012	12:25:44 PM	H2 MFC set to  0.000000
3/30/2012	12:25:44 PM	BCl3 MFC set to  0.000000
3/30/2012	12:25:44 PM	PH3 MFC set to  0.000000
3/30/2012	12:25:44 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:25:44 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:25:44 PM	Tube furnace set to 150
3/30/2012	12:26:14 PM	Helium valve closed
3/30/2012	12:26:14 PM	H2 valve closed
3/30/2012	12:26:14 PM	BCl3 valve closed
3/30/2012	12:26:14 PM	PH3 valve closed
3/30/2012	12:26:14 PM	SiCl4 pre valve closed
3/30/2012	12:26:14 PM	SiCl4 post valve closed
3/30/2012	12:26:14 PM	Bypass valve closed
3/30/2012	12:26:14 PM	Bubbler valve closed
3/30/2012	12:26:14 PM	Main Vac valve opened
3/30/2012	12:26:14 PM	Helium MFC set to  0.000000
3/30/2012	12:26:14 PM	H2 MFC set to  0.000000
3/30/2012	12:26:14 PM	BCl3 MFC set to  0.000000
3/30/2012	12:26:14 PM	PH3 MFC set to  0.000000
3/30/2012	12:26:14 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:26:14 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:26:14 PM	Tube furnace set to 150
3/30/2012	12:26:44 PM	H2 valve closed
3/30/2012	12:26:44 PM	BCl3 valve closed
3/30/2012	12:26:44 PM	PH3 valve closed
3/30/2012	12:26:44 PM	SiCl4 pre valve closed
3/30/2012	12:26:44 PM	SiCl4 post valve closed
3/30/2012	12:26:44 PM	Bypass valve closed
3/30/2012	12:26:44 PM	Bubbler valve closed
3/30/2012	12:26:44 PM	Helium valve opened
3/30/2012	12:26:44 PM	Main Vac valve opened
3/30/2012	12:26:44 PM	Helium MFC set to  20.000000
3/30/2012	12:26:44 PM	H2 MFC set to  0.000000
3/30/2012	12:26:44 PM	BCl3 MFC set to  0.000000
3/30/2012	12:26:44 PM	PH3 MFC set to  0.000000
3/30/2012	12:26:44 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:26:44 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:26:45 PM	Tube furnace set to 150
3/30/2012	12:27:15 PM	Helium valve closed
3/30/2012	12:27:15 PM	H2 valve closed
3/30/2012	12:27:15 PM	BCl3 valve closed
3/30/2012	12:27:15 PM	PH3 valve closed
3/30/2012	12:27:15 PM	SiCl4 pre valve closed
3/30/2012	12:27:15 PM	SiCl4 post valve closed
3/30/2012	12:27:15 PM	Bypass valve closed
3/30/2012	12:27:15 PM	Bubbler valve closed
3/30/2012	12:27:15 PM	Main Vac valve opened
3/30/2012	12:27:15 PM	Helium MFC set to  0.000000
3/30/2012	12:27:15 PM	H2 MFC set to  0.000000
3/30/2012	12:27:15 PM	BCl3 MFC set to  0.000000
3/30/2012	12:27:15 PM	PH3 MFC set to  0.000000
3/30/2012	12:27:15 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:27:15 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:27:15 PM	Tube furnace set to 150
3/30/2012	12:27:45 PM	H2 valve closed
3/30/2012	12:27:45 PM	BCl3 valve closed
3/30/2012	12:27:45 PM	PH3 valve closed
3/30/2012	12:27:45 PM	SiCl4 pre valve closed
3/30/2012	12:27:45 PM	SiCl4 post valve closed
3/30/2012	12:27:45 PM	Bypass valve closed
3/30/2012	12:27:45 PM	Bubbler valve closed
3/30/2012	12:27:45 PM	Helium valve opened
3/30/2012	12:27:45 PM	Main Vac valve opened
3/30/2012	12:27:45 PM	Helium MFC set to  20.000000
3/30/2012	12:27:45 PM	H2 MFC set to  0.000000
3/30/2012	12:27:45 PM	BCl3 MFC set to  0.000000
3/30/2012	12:27:45 PM	PH3 MFC set to  0.000000
3/30/2012	12:27:45 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:27:45 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:27:45 PM	Tube furnace set to 150
3/30/2012	12:28:15 PM	Helium valve closed
3/30/2012	12:28:15 PM	H2 valve closed
3/30/2012	12:28:15 PM	BCl3 valve closed
3/30/2012	12:28:15 PM	PH3 valve closed
3/30/2012	12:28:15 PM	SiCl4 pre valve closed
3/30/2012	12:28:15 PM	SiCl4 post valve closed
3/30/2012	12:28:15 PM	Bypass valve closed
3/30/2012	12:28:15 PM	Bubbler valve closed
3/30/2012	12:28:15 PM	Main Vac valve opened
3/30/2012	12:28:15 PM	Helium MFC set to  0.000000
3/30/2012	12:28:15 PM	H2 MFC set to  0.000000
3/30/2012	12:28:15 PM	BCl3 MFC set to  0.000000
3/30/2012	12:28:15 PM	PH3 MFC set to  0.000000
3/30/2012	12:28:15 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:28:15 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:28:15 PM	Tube furnace set to 150
3/30/2012	12:28:45 PM	H2 valve closed
3/30/2012	12:28:45 PM	BCl3 valve closed
3/30/2012	12:28:45 PM	PH3 valve closed
3/30/2012	12:28:45 PM	SiCl4 pre valve closed
3/30/2012	12:28:45 PM	SiCl4 post valve closed
3/30/2012	12:28:45 PM	Bypass valve closed
3/30/2012	12:28:45 PM	Bubbler valve closed
3/30/2012	12:28:45 PM	Helium valve opened
3/30/2012	12:28:45 PM	Main Vac valve opened
3/30/2012	12:28:45 PM	Helium MFC set to  20.000000
3/30/2012	12:28:45 PM	H2 MFC set to  0.000000
3/30/2012	12:28:45 PM	BCl3 MFC set to  0.000000
3/30/2012	12:28:45 PM	PH3 MFC set to  0.000000
3/30/2012	12:28:45 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:28:45 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:28:45 PM	Tube furnace set to 150
3/30/2012	12:29:15 PM	Helium valve closed
3/30/2012	12:29:15 PM	H2 valve closed
3/30/2012	12:29:15 PM	BCl3 valve closed
3/30/2012	12:29:16 PM	PH3 valve closed
3/30/2012	12:29:16 PM	SiCl4 pre valve closed
3/30/2012	12:29:16 PM	SiCl4 post valve closed
3/30/2012	12:29:16 PM	Bypass valve closed
3/30/2012	12:29:16 PM	Bubbler valve closed
3/30/2012	12:29:16 PM	Main Vac valve opened
3/30/2012	12:29:16 PM	Helium MFC set to  0.000000
3/30/2012	12:29:16 PM	H2 MFC set to  0.000000
3/30/2012	12:29:16 PM	BCl3 MFC set to  0.000000
3/30/2012	12:29:16 PM	PH3 MFC set to  0.000000
3/30/2012	12:29:16 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:29:16 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:29:16 PM	Tube furnace set to 150
3/30/2012	12:29:46 PM	H2 valve closed
3/30/2012	12:29:46 PM	BCl3 valve closed
3/30/2012	12:29:46 PM	PH3 valve closed
3/30/2012	12:29:46 PM	SiCl4 pre valve closed
3/30/2012	12:29:46 PM	SiCl4 post valve closed
3/30/2012	12:29:46 PM	Bypass valve closed
3/30/2012	12:29:46 PM	Bubbler valve closed
3/30/2012	12:29:46 PM	Helium valve opened
3/30/2012	12:29:46 PM	Main Vac valve opened
3/30/2012	12:29:46 PM	Helium MFC set to  20.000000
3/30/2012	12:29:46 PM	H2 MFC set to  0.000000
3/30/2012	12:29:46 PM	BCl3 MFC set to  0.000000
3/30/2012	12:29:46 PM	PH3 MFC set to  0.000000
3/30/2012	12:29:46 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:29:46 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:29:46 PM	Tube furnace set to 150
3/30/2012	12:30:16 PM	Helium valve closed
3/30/2012	12:30:16 PM	H2 valve closed
3/30/2012	12:30:16 PM	BCl3 valve closed
3/30/2012	12:30:16 PM	PH3 valve closed
3/30/2012	12:30:16 PM	SiCl4 pre valve closed
3/30/2012	12:30:16 PM	SiCl4 post valve closed
3/30/2012	12:30:16 PM	Bypass valve closed
3/30/2012	12:30:16 PM	Bubbler valve closed
3/30/2012	12:30:16 PM	Main Vac valve opened
3/30/2012	12:30:16 PM	Helium MFC set to  0.000000
3/30/2012	12:30:16 PM	H2 MFC set to  0.000000
3/30/2012	12:30:16 PM	BCl3 MFC set to  0.000000
3/30/2012	12:30:16 PM	PH3 MFC set to  0.000000
3/30/2012	12:30:16 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:30:16 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:30:16 PM	Tube furnace set to 150
3/30/2012	12:30:46 PM	H2 valve closed
3/30/2012	12:30:46 PM	BCl3 valve closed
3/30/2012	12:30:46 PM	PH3 valve closed
3/30/2012	12:30:46 PM	SiCl4 pre valve closed
3/30/2012	12:30:46 PM	SiCl4 post valve closed
3/30/2012	12:30:46 PM	Bypass valve closed
3/30/2012	12:30:46 PM	Bubbler valve closed
3/30/2012	12:30:46 PM	Helium valve opened
3/30/2012	12:30:46 PM	Main Vac valve opened
3/30/2012	12:30:46 PM	Helium MFC set to  20.000000
3/30/2012	12:30:46 PM	H2 MFC set to  0.000000
3/30/2012	12:30:46 PM	BCl3 MFC set to  0.000000
3/30/2012	12:30:46 PM	PH3 MFC set to  0.000000
3/30/2012	12:30:46 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:30:46 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:30:46 PM	Tube furnace set to 150
3/30/2012	12:31:16 PM	Helium valve closed
3/30/2012	12:31:16 PM	H2 valve closed
3/30/2012	12:31:16 PM	BCl3 valve closed
3/30/2012	12:31:16 PM	PH3 valve closed
3/30/2012	12:31:16 PM	SiCl4 pre valve closed
3/30/2012	12:31:16 PM	SiCl4 post valve closed
3/30/2012	12:31:16 PM	Bypass valve closed
3/30/2012	12:31:16 PM	Bubbler valve closed
3/30/2012	12:31:16 PM	Main Vac valve opened
3/30/2012	12:31:16 PM	Helium MFC set to  0.000000
3/30/2012	12:31:16 PM	H2 MFC set to  0.000000
3/30/2012	12:31:16 PM	BCl3 MFC set to  0.000000
3/30/2012	12:31:16 PM	PH3 MFC set to  0.000000
3/30/2012	12:31:17 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:31:17 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:31:17 PM	Tube furnace set to 150
3/30/2012	12:31:47 PM	H2 valve closed
3/30/2012	12:31:47 PM	BCl3 valve closed
3/30/2012	12:31:47 PM	PH3 valve closed
3/30/2012	12:31:47 PM	SiCl4 pre valve closed
3/30/2012	12:31:47 PM	SiCl4 post valve closed
3/30/2012	12:31:47 PM	Bypass valve closed
3/30/2012	12:31:47 PM	Bubbler valve closed
3/30/2012	12:31:47 PM	Helium valve opened
3/30/2012	12:31:47 PM	Main Vac valve opened
3/30/2012	12:31:47 PM	Helium MFC set to  20.000000
3/30/2012	12:31:47 PM	H2 MFC set to  0.000000
3/30/2012	12:31:47 PM	BCl3 MFC set to  0.000000
3/30/2012	12:31:47 PM	PH3 MFC set to  0.000000
3/30/2012	12:31:47 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:31:47 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:31:47 PM	Tube furnace set to 150
3/30/2012	12:32:17 PM	Helium valve closed
3/30/2012	12:32:17 PM	H2 valve closed
3/30/2012	12:32:17 PM	BCl3 valve closed
3/30/2012	12:32:17 PM	PH3 valve closed
3/30/2012	12:32:17 PM	SiCl4 pre valve closed
3/30/2012	12:32:17 PM	SiCl4 post valve closed
3/30/2012	12:32:17 PM	Bypass valve closed
3/30/2012	12:32:17 PM	Bubbler valve closed
3/30/2012	12:32:17 PM	Main Vac valve opened
3/30/2012	12:32:17 PM	Helium MFC set to  0.000000
3/30/2012	12:32:17 PM	H2 MFC set to  0.000000
3/30/2012	12:32:17 PM	BCl3 MFC set to  0.000000
3/30/2012	12:32:17 PM	PH3 MFC set to  0.000000
3/30/2012	12:32:17 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:32:17 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:32:17 PM	Tube furnace set to 150
3/30/2012	12:32:47 PM	H2 valve closed
3/30/2012	12:32:47 PM	BCl3 valve closed
3/30/2012	12:32:47 PM	PH3 valve closed
3/30/2012	12:32:47 PM	SiCl4 pre valve closed
3/30/2012	12:32:47 PM	SiCl4 post valve closed
3/30/2012	12:32:47 PM	Bypass valve closed
3/30/2012	12:32:47 PM	Bubbler valve closed
3/30/2012	12:32:47 PM	Helium valve opened
3/30/2012	12:32:47 PM	Main Vac valve opened
3/30/2012	12:32:47 PM	Helium MFC set to  20.000000
3/30/2012	12:32:47 PM	H2 MFC set to  0.000000
3/30/2012	12:32:47 PM	BCl3 MFC set to  0.000000
3/30/2012	12:32:47 PM	PH3 MFC set to  0.000000
3/30/2012	12:32:47 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:32:47 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:32:47 PM	Tube furnace set to 150
3/30/2012	12:33:17 PM	Helium valve closed
3/30/2012	12:33:17 PM	H2 valve closed
3/30/2012	12:33:17 PM	BCl3 valve closed
3/30/2012	12:33:17 PM	PH3 valve closed
3/30/2012	12:33:17 PM	SiCl4 pre valve closed
3/30/2012	12:33:17 PM	SiCl4 post valve closed
3/30/2012	12:33:17 PM	Bypass valve closed
3/30/2012	12:33:17 PM	Bubbler valve closed
3/30/2012	12:33:17 PM	Main Vac valve opened
3/30/2012	12:33:17 PM	Helium MFC set to  0.000000
3/30/2012	12:33:17 PM	H2 MFC set to  0.000000
3/30/2012	12:33:17 PM	BCl3 MFC set to  0.000000
3/30/2012	12:33:17 PM	PH3 MFC set to  0.000000
3/30/2012	12:33:17 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:33:17 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:33:18 PM	Tube furnace set to 150
3/30/2012	12:33:48 PM	H2 valve closed
3/30/2012	12:33:48 PM	BCl3 valve closed
3/30/2012	12:33:48 PM	PH3 valve closed
3/30/2012	12:33:48 PM	SiCl4 pre valve closed
3/30/2012	12:33:48 PM	SiCl4 post valve closed
3/30/2012	12:33:48 PM	Bypass valve closed
3/30/2012	12:33:48 PM	Bubbler valve closed
3/30/2012	12:33:48 PM	Helium valve opened
3/30/2012	12:33:48 PM	Main Vac valve opened
3/30/2012	12:33:48 PM	Helium MFC set to  20.000000
3/30/2012	12:33:48 PM	H2 MFC set to  0.000000
3/30/2012	12:33:48 PM	BCl3 MFC set to  0.000000
3/30/2012	12:33:48 PM	PH3 MFC set to  0.000000
3/30/2012	12:33:48 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:33:48 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:33:48 PM	Tube furnace set to 150
3/30/2012	12:34:18 PM	Helium valve closed
3/30/2012	12:34:18 PM	H2 valve closed
3/30/2012	12:34:18 PM	BCl3 valve closed
3/30/2012	12:34:18 PM	PH3 valve closed
3/30/2012	12:34:18 PM	SiCl4 pre valve closed
3/30/2012	12:34:18 PM	SiCl4 post valve closed
3/30/2012	12:34:18 PM	Bypass valve closed
3/30/2012	12:34:18 PM	Bubbler valve closed
3/30/2012	12:34:18 PM	Main Vac valve opened
3/30/2012	12:34:18 PM	Helium MFC set to  0.000000
3/30/2012	12:34:18 PM	H2 MFC set to  0.000000
3/30/2012	12:34:18 PM	BCl3 MFC set to  0.000000
3/30/2012	12:34:18 PM	PH3 MFC set to  0.000000
3/30/2012	12:34:18 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:34:18 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:34:18 PM	Tube furnace set to 150
3/30/2012	12:34:48 PM	H2 valve closed
3/30/2012	12:34:48 PM	BCl3 valve closed
3/30/2012	12:34:48 PM	PH3 valve closed
3/30/2012	12:34:48 PM	SiCl4 pre valve closed
3/30/2012	12:34:48 PM	SiCl4 post valve closed
3/30/2012	12:34:48 PM	Bypass valve closed
3/30/2012	12:34:48 PM	Bubbler valve closed
3/30/2012	12:34:48 PM	Helium valve opened
3/30/2012	12:34:48 PM	Main Vac valve opened
3/30/2012	12:34:48 PM	Helium MFC set to  20.000000
3/30/2012	12:34:48 PM	H2 MFC set to  0.000000
3/30/2012	12:34:48 PM	BCl3 MFC set to  0.000000
3/30/2012	12:34:48 PM	PH3 MFC set to  0.000000
3/30/2012	12:34:48 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:34:48 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:34:48 PM	Tube furnace set to 150
3/30/2012	12:35:18 PM	Helium valve closed
3/30/2012	12:35:18 PM	H2 valve closed
3/30/2012	12:35:18 PM	BCl3 valve closed
3/30/2012	12:35:18 PM	PH3 valve closed
3/30/2012	12:35:18 PM	SiCl4 pre valve closed
3/30/2012	12:35:18 PM	SiCl4 post valve closed
3/30/2012	12:35:18 PM	Bypass valve closed
3/30/2012	12:35:18 PM	Bubbler valve closed
3/30/2012	12:35:18 PM	Main Vac valve opened
3/30/2012	12:35:18 PM	Helium MFC set to  0.000000
3/30/2012	12:35:18 PM	H2 MFC set to  0.000000
3/30/2012	12:35:18 PM	BCl3 MFC set to  0.000000
3/30/2012	12:35:18 PM	PH3 MFC set to  0.000000
3/30/2012	12:35:18 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:35:18 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:35:19 PM	Tube furnace set to 150
3/30/2012	12:35:20 PM	Run finished at 12:35 PM
3/30/2012	12:35:53 PM	Recipe started at 12:35 PM
3/30/2012	12:35:53 PM	Helium valve closed
3/30/2012	12:35:53 PM	H2 valve closed
3/30/2012	12:35:53 PM	BCl3 valve closed
3/30/2012	12:35:53 PM	PH3 valve closed
3/30/2012	12:35:53 PM	SiCl4 pre valve closed
3/30/2012	12:35:53 PM	SiCl4 post valve closed
3/30/2012	12:35:53 PM	Bypass valve closed
3/30/2012	12:35:53 PM	Bubbler valve closed
3/30/2012	12:35:53 PM	Main Vac valve opened
3/30/2012	12:35:53 PM	Helium MFC set to  0.000000
3/30/2012	12:35:53 PM	H2 MFC set to  0.000000
3/30/2012	12:35:53 PM	BCl3 MFC set to  0.000000
3/30/2012	12:35:53 PM	PH3 MFC set to  0.000000
3/30/2012	12:35:53 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:35:54 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:35:54 PM	Tube furnace set to 150
3/30/2012	12:36:24 PM	H2 valve closed
3/30/2012	12:36:24 PM	BCl3 valve closed
3/30/2012	12:36:24 PM	PH3 valve closed
3/30/2012	12:36:24 PM	SiCl4 pre valve closed
3/30/2012	12:36:24 PM	SiCl4 post valve closed
3/30/2012	12:36:24 PM	Bypass valve closed
3/30/2012	12:36:24 PM	Bubbler valve closed
3/30/2012	12:36:24 PM	Helium valve opened
3/30/2012	12:36:24 PM	Main Vac valve opened
3/30/2012	12:36:24 PM	Helium MFC set to  20.000000
3/30/2012	12:36:24 PM	H2 MFC set to  0.000000
3/30/2012	12:36:24 PM	BCl3 MFC set to  0.000000
3/30/2012	12:36:24 PM	PH3 MFC set to  0.000000
3/30/2012	12:36:24 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:36:24 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:36:24 PM	Tube furnace set to 150
3/30/2012	12:36:54 PM	Helium valve closed
3/30/2012	12:36:54 PM	H2 valve closed
3/30/2012	12:36:54 PM	BCl3 valve closed
3/30/2012	12:36:54 PM	PH3 valve closed
3/30/2012	12:36:54 PM	SiCl4 pre valve closed
3/30/2012	12:36:54 PM	SiCl4 post valve closed
3/30/2012	12:36:54 PM	Bypass valve closed
3/30/2012	12:36:54 PM	Bubbler valve closed
3/30/2012	12:36:54 PM	Main Vac valve opened
3/30/2012	12:36:54 PM	Helium MFC set to  0.000000
3/30/2012	12:36:54 PM	H2 MFC set to  0.000000
3/30/2012	12:36:54 PM	BCl3 MFC set to  0.000000
3/30/2012	12:36:54 PM	PH3 MFC set to  0.000000
3/30/2012	12:36:54 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:36:54 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:36:54 PM	Tube furnace set to 150
3/30/2012	12:37:24 PM	H2 valve closed
3/30/2012	12:37:24 PM	BCl3 valve closed
3/30/2012	12:37:24 PM	PH3 valve closed
3/30/2012	12:37:24 PM	SiCl4 pre valve closed
3/30/2012	12:37:24 PM	SiCl4 post valve closed
3/30/2012	12:37:24 PM	Bypass valve closed
3/30/2012	12:37:24 PM	Bubbler valve closed
3/30/2012	12:37:24 PM	Helium valve opened
3/30/2012	12:37:24 PM	Main Vac valve opened
3/30/2012	12:37:24 PM	Helium MFC set to  20.000000
3/30/2012	12:37:24 PM	H2 MFC set to  0.000000
3/30/2012	12:37:24 PM	BCl3 MFC set to  0.000000
3/30/2012	12:37:24 PM	PH3 MFC set to  0.000000
3/30/2012	12:37:24 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:37:24 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:37:24 PM	Tube furnace set to 150
3/30/2012	12:37:54 PM	Helium valve closed
3/30/2012	12:37:54 PM	H2 valve closed
3/30/2012	12:37:54 PM	BCl3 valve closed
3/30/2012	12:37:54 PM	PH3 valve closed
3/30/2012	12:37:54 PM	SiCl4 pre valve closed
3/30/2012	12:37:54 PM	SiCl4 post valve closed
3/30/2012	12:37:54 PM	Bypass valve closed
3/30/2012	12:37:54 PM	Bubbler valve closed
3/30/2012	12:37:54 PM	Main Vac valve opened
3/30/2012	12:37:54 PM	Helium MFC set to  0.000000
3/30/2012	12:37:54 PM	H2 MFC set to  0.000000
3/30/2012	12:37:54 PM	BCl3 MFC set to  0.000000
3/30/2012	12:37:54 PM	PH3 MFC set to  0.000000
3/30/2012	12:37:54 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:37:54 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:37:55 PM	Tube furnace set to 150
3/30/2012	12:38:25 PM	H2 valve closed
3/30/2012	12:38:25 PM	BCl3 valve closed
3/30/2012	12:38:25 PM	PH3 valve closed
3/30/2012	12:38:25 PM	SiCl4 pre valve closed
3/30/2012	12:38:25 PM	SiCl4 post valve closed
3/30/2012	12:38:25 PM	Bypass valve closed
3/30/2012	12:38:25 PM	Bubbler valve closed
3/30/2012	12:38:25 PM	Helium valve opened
3/30/2012	12:38:25 PM	Main Vac valve opened
3/30/2012	12:38:25 PM	Helium MFC set to  20.000000
3/30/2012	12:38:25 PM	H2 MFC set to  0.000000
3/30/2012	12:38:25 PM	BCl3 MFC set to  0.000000
3/30/2012	12:38:25 PM	PH3 MFC set to  0.000000
3/30/2012	12:38:25 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:38:25 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:38:25 PM	Tube furnace set to 150
3/30/2012	12:38:55 PM	Helium valve closed
3/30/2012	12:38:55 PM	H2 valve closed
3/30/2012	12:38:55 PM	BCl3 valve closed
3/30/2012	12:38:55 PM	PH3 valve closed
3/30/2012	12:38:55 PM	SiCl4 pre valve closed
3/30/2012	12:38:55 PM	SiCl4 post valve closed
3/30/2012	12:38:55 PM	Bypass valve closed
3/30/2012	12:38:55 PM	Bubbler valve closed
3/30/2012	12:38:55 PM	Main Vac valve opened
3/30/2012	12:38:55 PM	Helium MFC set to  0.000000
3/30/2012	12:38:55 PM	H2 MFC set to  0.000000
3/30/2012	12:38:55 PM	BCl3 MFC set to  0.000000
3/30/2012	12:38:55 PM	PH3 MFC set to  0.000000
3/30/2012	12:38:55 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:38:55 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:38:55 PM	Tube furnace set to 150
3/30/2012	12:39:25 PM	H2 valve closed
3/30/2012	12:39:25 PM	BCl3 valve closed
3/30/2012	12:39:25 PM	PH3 valve closed
3/30/2012	12:39:25 PM	SiCl4 pre valve closed
3/30/2012	12:39:25 PM	SiCl4 post valve closed
3/30/2012	12:39:25 PM	Bypass valve closed
3/30/2012	12:39:25 PM	Bubbler valve closed
3/30/2012	12:39:25 PM	Helium valve opened
3/30/2012	12:39:25 PM	Main Vac valve opened
3/30/2012	12:39:25 PM	Helium MFC set to  20.000000
3/30/2012	12:39:25 PM	H2 MFC set to  0.000000
3/30/2012	12:39:25 PM	BCl3 MFC set to  0.000000
3/30/2012	12:39:25 PM	PH3 MFC set to  0.000000
3/30/2012	12:39:25 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:39:25 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:39:25 PM	Tube furnace set to 150
3/30/2012	12:39:55 PM	Helium valve closed
3/30/2012	12:39:55 PM	H2 valve closed
3/30/2012	12:39:55 PM	BCl3 valve closed
3/30/2012	12:39:55 PM	PH3 valve closed
3/30/2012	12:39:55 PM	SiCl4 pre valve closed
3/30/2012	12:39:55 PM	SiCl4 post valve closed
3/30/2012	12:39:55 PM	Bypass valve closed
3/30/2012	12:39:55 PM	Bubbler valve closed
3/30/2012	12:39:55 PM	Main Vac valve opened
3/30/2012	12:39:55 PM	Helium MFC set to  0.000000
3/30/2012	12:39:55 PM	H2 MFC set to  0.000000
3/30/2012	12:39:55 PM	BCl3 MFC set to  0.000000
3/30/2012	12:39:55 PM	PH3 MFC set to  0.000000
3/30/2012	12:39:55 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:39:55 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:39:56 PM	Tube furnace set to 150
3/30/2012	12:40:26 PM	H2 valve closed
3/30/2012	12:40:26 PM	BCl3 valve closed
3/30/2012	12:40:26 PM	PH3 valve closed
3/30/2012	12:40:26 PM	SiCl4 pre valve closed
3/30/2012	12:40:26 PM	SiCl4 post valve closed
3/30/2012	12:40:26 PM	Bypass valve closed
3/30/2012	12:40:26 PM	Bubbler valve closed
3/30/2012	12:40:26 PM	Helium valve opened
3/30/2012	12:40:26 PM	Main Vac valve opened
3/30/2012	12:40:26 PM	Helium MFC set to  20.000000
3/30/2012	12:40:26 PM	H2 MFC set to  0.000000
3/30/2012	12:40:26 PM	BCl3 MFC set to  0.000000
3/30/2012	12:40:26 PM	PH3 MFC set to  0.000000
3/30/2012	12:40:26 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:40:26 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:40:26 PM	Tube furnace set to 150
3/30/2012	12:40:56 PM	Helium valve closed
3/30/2012	12:40:56 PM	H2 valve closed
3/30/2012	12:40:56 PM	BCl3 valve closed
3/30/2012	12:40:56 PM	PH3 valve closed
3/30/2012	12:40:56 PM	SiCl4 pre valve closed
3/30/2012	12:40:56 PM	SiCl4 post valve closed
3/30/2012	12:40:56 PM	Bypass valve closed
3/30/2012	12:40:56 PM	Bubbler valve closed
3/30/2012	12:40:56 PM	Main Vac valve opened
3/30/2012	12:40:56 PM	Helium MFC set to  0.000000
3/30/2012	12:40:56 PM	H2 MFC set to  0.000000
3/30/2012	12:40:56 PM	BCl3 MFC set to  0.000000
3/30/2012	12:40:56 PM	PH3 MFC set to  0.000000
3/30/2012	12:40:56 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:40:56 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:40:56 PM	Tube furnace set to 150
3/30/2012	12:41:26 PM	H2 valve closed
3/30/2012	12:41:26 PM	BCl3 valve closed
3/30/2012	12:41:26 PM	PH3 valve closed
3/30/2012	12:41:26 PM	SiCl4 pre valve closed
3/30/2012	12:41:26 PM	SiCl4 post valve closed
3/30/2012	12:41:26 PM	Bypass valve closed
3/30/2012	12:41:26 PM	Bubbler valve closed
3/30/2012	12:41:26 PM	Helium valve opened
3/30/2012	12:41:26 PM	Main Vac valve opened
3/30/2012	12:41:26 PM	Helium MFC set to  20.000000
3/30/2012	12:41:26 PM	H2 MFC set to  0.000000
3/30/2012	12:41:26 PM	BCl3 MFC set to  0.000000
3/30/2012	12:41:26 PM	PH3 MFC set to  0.000000
3/30/2012	12:41:26 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:41:26 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:41:26 PM	Tube furnace set to 150
3/30/2012	12:41:56 PM	Helium valve closed
3/30/2012	12:41:56 PM	H2 valve closed
3/30/2012	12:41:56 PM	BCl3 valve closed
3/30/2012	12:41:56 PM	PH3 valve closed
3/30/2012	12:41:56 PM	SiCl4 pre valve closed
3/30/2012	12:41:56 PM	SiCl4 post valve closed
3/30/2012	12:41:56 PM	Bypass valve closed
3/30/2012	12:41:56 PM	Bubbler valve closed
3/30/2012	12:41:56 PM	Main Vac valve opened
3/30/2012	12:41:56 PM	Helium MFC set to  0.000000
3/30/2012	12:41:56 PM	H2 MFC set to  0.000000
3/30/2012	12:41:56 PM	BCl3 MFC set to  0.000000
3/30/2012	12:41:56 PM	PH3 MFC set to  0.000000
3/30/2012	12:41:56 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:41:56 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:41:56 PM	Tube furnace set to 150
3/30/2012	12:42:27 PM	H2 valve closed
3/30/2012	12:42:27 PM	BCl3 valve closed
3/30/2012	12:42:27 PM	PH3 valve closed
3/30/2012	12:42:27 PM	SiCl4 pre valve closed
3/30/2012	12:42:27 PM	SiCl4 post valve closed
3/30/2012	12:42:27 PM	Bypass valve closed
3/30/2012	12:42:27 PM	Bubbler valve closed
3/30/2012	12:42:27 PM	Helium valve opened
3/30/2012	12:42:27 PM	Main Vac valve opened
3/30/2012	12:42:27 PM	Helium MFC set to  20.000000
3/30/2012	12:42:27 PM	H2 MFC set to  0.000000
3/30/2012	12:42:27 PM	BCl3 MFC set to  0.000000
3/30/2012	12:42:27 PM	PH3 MFC set to  0.000000
3/30/2012	12:42:27 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:42:27 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:42:27 PM	Tube furnace set to 150
3/30/2012	12:42:57 PM	Helium valve closed
3/30/2012	12:42:57 PM	H2 valve closed
3/30/2012	12:42:57 PM	BCl3 valve closed
3/30/2012	12:42:57 PM	PH3 valve closed
3/30/2012	12:42:57 PM	SiCl4 pre valve closed
3/30/2012	12:42:57 PM	SiCl4 post valve closed
3/30/2012	12:42:57 PM	Bypass valve closed
3/30/2012	12:42:57 PM	Bubbler valve closed
3/30/2012	12:42:57 PM	Main Vac valve opened
3/30/2012	12:42:57 PM	Helium MFC set to  0.000000
3/30/2012	12:42:57 PM	H2 MFC set to  0.000000
3/30/2012	12:42:57 PM	BCl3 MFC set to  0.000000
3/30/2012	12:42:57 PM	PH3 MFC set to  0.000000
3/30/2012	12:42:57 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:42:57 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:42:57 PM	Tube furnace set to 150
3/30/2012	12:43:27 PM	H2 valve closed
3/30/2012	12:43:27 PM	BCl3 valve closed
3/30/2012	12:43:27 PM	PH3 valve closed
3/30/2012	12:43:27 PM	SiCl4 pre valve closed
3/30/2012	12:43:27 PM	SiCl4 post valve closed
3/30/2012	12:43:27 PM	Bypass valve closed
3/30/2012	12:43:27 PM	Bubbler valve closed
3/30/2012	12:43:27 PM	Helium valve opened
3/30/2012	12:43:27 PM	Main Vac valve opened
3/30/2012	12:43:27 PM	Helium MFC set to  20.000000
3/30/2012	12:43:27 PM	H2 MFC set to  0.000000
3/30/2012	12:43:27 PM	BCl3 MFC set to  0.000000
3/30/2012	12:43:27 PM	PH3 MFC set to  0.000000
3/30/2012	12:43:27 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:43:27 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:43:27 PM	Tube furnace set to 150
3/30/2012	12:43:57 PM	Helium valve closed
3/30/2012	12:43:57 PM	H2 valve closed
3/30/2012	12:43:57 PM	BCl3 valve closed
3/30/2012	12:43:57 PM	PH3 valve closed
3/30/2012	12:43:57 PM	SiCl4 pre valve closed
3/30/2012	12:43:57 PM	SiCl4 post valve closed
3/30/2012	12:43:57 PM	Bypass valve closed
3/30/2012	12:43:57 PM	Bubbler valve closed
3/30/2012	12:43:57 PM	Main Vac valve opened
3/30/2012	12:43:57 PM	Helium MFC set to  0.000000
3/30/2012	12:43:57 PM	H2 MFC set to  0.000000
3/30/2012	12:43:57 PM	BCl3 MFC set to  0.000000
3/30/2012	12:43:57 PM	PH3 MFC set to  0.000000
3/30/2012	12:43:57 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:43:57 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:43:57 PM	Tube furnace set to 150
3/30/2012	12:44:27 PM	H2 valve closed
3/30/2012	12:44:27 PM	BCl3 valve closed
3/30/2012	12:44:27 PM	PH3 valve closed
3/30/2012	12:44:27 PM	SiCl4 pre valve closed
3/30/2012	12:44:27 PM	SiCl4 post valve closed
3/30/2012	12:44:27 PM	Bypass valve closed
3/30/2012	12:44:27 PM	Bubbler valve closed
3/30/2012	12:44:27 PM	Helium valve opened
3/30/2012	12:44:27 PM	Main Vac valve opened
3/30/2012	12:44:27 PM	Helium MFC set to  20.000000
3/30/2012	12:44:27 PM	H2 MFC set to  0.000000
3/30/2012	12:44:27 PM	BCl3 MFC set to  0.000000
3/30/2012	12:44:27 PM	PH3 MFC set to  0.000000
3/30/2012	12:44:28 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:44:28 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:44:28 PM	Tube furnace set to 150
3/30/2012	12:44:58 PM	Helium valve closed
3/30/2012	12:44:58 PM	H2 valve closed
3/30/2012	12:44:58 PM	BCl3 valve closed
3/30/2012	12:44:58 PM	PH3 valve closed
3/30/2012	12:44:58 PM	SiCl4 pre valve closed
3/30/2012	12:44:58 PM	SiCl4 post valve closed
3/30/2012	12:44:58 PM	Bypass valve closed
3/30/2012	12:44:58 PM	Bubbler valve closed
3/30/2012	12:44:58 PM	Main Vac valve opened
3/30/2012	12:44:58 PM	Helium MFC set to  0.000000
3/30/2012	12:44:58 PM	H2 MFC set to  0.000000
3/30/2012	12:44:58 PM	BCl3 MFC set to  0.000000
3/30/2012	12:44:58 PM	PH3 MFC set to  0.000000
3/30/2012	12:44:58 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:44:58 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:44:58 PM	Tube furnace set to 150
3/30/2012	12:45:28 PM	H2 valve closed
3/30/2012	12:45:28 PM	BCl3 valve closed
3/30/2012	12:45:28 PM	PH3 valve closed
3/30/2012	12:45:28 PM	SiCl4 pre valve closed
3/30/2012	12:45:28 PM	SiCl4 post valve closed
3/30/2012	12:45:28 PM	Bypass valve closed
3/30/2012	12:45:28 PM	Bubbler valve closed
3/30/2012	12:45:28 PM	Helium valve opened
3/30/2012	12:45:28 PM	Main Vac valve opened
3/30/2012	12:45:28 PM	Helium MFC set to  20.000000
3/30/2012	12:45:28 PM	H2 MFC set to  0.000000
3/30/2012	12:45:28 PM	BCl3 MFC set to  0.000000
3/30/2012	12:45:28 PM	PH3 MFC set to  0.000000
3/30/2012	12:45:28 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:45:28 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:45:28 PM	Tube furnace set to 150
3/30/2012	12:45:58 PM	Helium valve closed
3/30/2012	12:45:58 PM	H2 valve closed
3/30/2012	12:45:58 PM	BCl3 valve closed
3/30/2012	12:45:58 PM	PH3 valve closed
3/30/2012	12:45:58 PM	SiCl4 pre valve closed
3/30/2012	12:45:58 PM	SiCl4 post valve closed
3/30/2012	12:45:58 PM	Bypass valve closed
3/30/2012	12:45:58 PM	Bubbler valve closed
3/30/2012	12:45:58 PM	Main Vac valve opened
3/30/2012	12:45:58 PM	Helium MFC set to  0.000000
3/30/2012	12:45:58 PM	H2 MFC set to  0.000000
3/30/2012	12:45:58 PM	BCl3 MFC set to  0.000000
3/30/2012	12:45:58 PM	PH3 MFC set to  0.000000
3/30/2012	12:45:58 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:45:58 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:45:58 PM	Tube furnace set to 150
3/30/2012	12:45:59 PM	Run finished at 12:45 PM
3/30/2012	12:46:35 PM	Recipe started at 12:46 PM
3/30/2012	12:46:35 PM	Helium valve closed
3/30/2012	12:46:35 PM	H2 valve closed
3/30/2012	12:46:35 PM	BCl3 valve closed
3/30/2012	12:46:35 PM	PH3 valve closed
3/30/2012	12:46:35 PM	SiCl4 pre valve closed
3/30/2012	12:46:35 PM	SiCl4 post valve closed
3/30/2012	12:46:35 PM	Bypass valve closed
3/30/2012	12:46:35 PM	Bubbler valve closed
3/30/2012	12:46:35 PM	Main Vac valve opened
3/30/2012	12:46:35 PM	Helium MFC set to  0.000000
3/30/2012	12:46:35 PM	H2 MFC set to  0.000000
3/30/2012	12:46:35 PM	BCl3 MFC set to  0.000000
3/30/2012	12:46:35 PM	PH3 MFC set to  0.000000
3/30/2012	12:46:35 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:46:35 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:46:35 PM	Tube furnace set to 150
3/30/2012	12:47:05 PM	H2 valve closed
3/30/2012	12:47:05 PM	BCl3 valve closed
3/30/2012	12:47:05 PM	PH3 valve closed
3/30/2012	12:47:05 PM	SiCl4 pre valve closed
3/30/2012	12:47:05 PM	SiCl4 post valve closed
3/30/2012	12:47:05 PM	Bypass valve closed
3/30/2012	12:47:05 PM	Bubbler valve closed
3/30/2012	12:47:05 PM	Helium valve opened
3/30/2012	12:47:05 PM	Main Vac valve opened
3/30/2012	12:47:05 PM	Helium MFC set to  20.000000
3/30/2012	12:47:05 PM	H2 MFC set to  0.000000
3/30/2012	12:47:05 PM	BCl3 MFC set to  0.000000
3/30/2012	12:47:05 PM	PH3 MFC set to  0.000000
3/30/2012	12:47:05 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:47:05 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:47:06 PM	Tube furnace set to 150
3/30/2012	12:47:36 PM	Helium valve closed
3/30/2012	12:47:36 PM	H2 valve closed
3/30/2012	12:47:36 PM	BCl3 valve closed
3/30/2012	12:47:36 PM	PH3 valve closed
3/30/2012	12:47:36 PM	SiCl4 pre valve closed
3/30/2012	12:47:36 PM	SiCl4 post valve closed
3/30/2012	12:47:36 PM	Bypass valve closed
3/30/2012	12:47:36 PM	Bubbler valve closed
3/30/2012	12:47:36 PM	Main Vac valve opened
3/30/2012	12:47:36 PM	Helium MFC set to  0.000000
3/30/2012	12:47:36 PM	H2 MFC set to  0.000000
3/30/2012	12:47:36 PM	BCl3 MFC set to  0.000000
3/30/2012	12:47:36 PM	PH3 MFC set to  0.000000
3/30/2012	12:47:36 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:47:36 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:47:36 PM	Tube furnace set to 150
3/30/2012	12:48:06 PM	H2 valve closed
3/30/2012	12:48:06 PM	BCl3 valve closed
3/30/2012	12:48:06 PM	PH3 valve closed
3/30/2012	12:48:06 PM	SiCl4 pre valve closed
3/30/2012	12:48:06 PM	SiCl4 post valve closed
3/30/2012	12:48:06 PM	Bypass valve closed
3/30/2012	12:48:06 PM	Bubbler valve closed
3/30/2012	12:48:06 PM	Helium valve opened
3/30/2012	12:48:06 PM	Main Vac valve opened
3/30/2012	12:48:06 PM	Helium MFC set to  20.000000
3/30/2012	12:48:06 PM	H2 MFC set to  0.000000
3/30/2012	12:48:06 PM	BCl3 MFC set to  0.000000
3/30/2012	12:48:06 PM	PH3 MFC set to  0.000000
3/30/2012	12:48:06 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:48:06 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:48:06 PM	Tube furnace set to 150
3/30/2012	12:48:36 PM	Helium valve closed
3/30/2012	12:48:36 PM	H2 valve closed
3/30/2012	12:48:36 PM	BCl3 valve closed
3/30/2012	12:48:36 PM	PH3 valve closed
3/30/2012	12:48:36 PM	SiCl4 pre valve closed
3/30/2012	12:48:36 PM	SiCl4 post valve closed
3/30/2012	12:48:36 PM	Bypass valve closed
3/30/2012	12:48:36 PM	Bubbler valve closed
3/30/2012	12:48:36 PM	Main Vac valve opened
3/30/2012	12:48:36 PM	Helium MFC set to  0.000000
3/30/2012	12:48:36 PM	H2 MFC set to  0.000000
3/30/2012	12:48:36 PM	BCl3 MFC set to  0.000000
3/30/2012	12:48:36 PM	PH3 MFC set to  0.000000
3/30/2012	12:48:36 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:48:36 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:48:36 PM	Tube furnace set to 150
3/30/2012	12:49:06 PM	H2 valve closed
3/30/2012	12:49:06 PM	BCl3 valve closed
3/30/2012	12:49:06 PM	PH3 valve closed
3/30/2012	12:49:06 PM	SiCl4 pre valve closed
3/30/2012	12:49:06 PM	SiCl4 post valve closed
3/30/2012	12:49:06 PM	Bypass valve closed
3/30/2012	12:49:06 PM	Bubbler valve closed
3/30/2012	12:49:06 PM	Helium valve opened
3/30/2012	12:49:06 PM	Main Vac valve opened
3/30/2012	12:49:06 PM	Helium MFC set to  20.000000
3/30/2012	12:49:06 PM	H2 MFC set to  0.000000
3/30/2012	12:49:06 PM	BCl3 MFC set to  0.000000
3/30/2012	12:49:06 PM	PH3 MFC set to  0.000000
3/30/2012	12:49:06 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:49:06 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:49:06 PM	Tube furnace set to 150
3/30/2012	12:49:36 PM	Helium valve closed
3/30/2012	12:49:36 PM	H2 valve closed
3/30/2012	12:49:36 PM	BCl3 valve closed
3/30/2012	12:49:37 PM	PH3 valve closed
3/30/2012	12:49:37 PM	SiCl4 pre valve closed
3/30/2012	12:49:37 PM	SiCl4 post valve closed
3/30/2012	12:49:37 PM	Bypass valve closed
3/30/2012	12:49:37 PM	Bubbler valve closed
3/30/2012	12:49:37 PM	Main Vac valve opened
3/30/2012	12:49:37 PM	Helium MFC set to  0.000000
3/30/2012	12:49:37 PM	H2 MFC set to  0.000000
3/30/2012	12:49:37 PM	BCl3 MFC set to  0.000000
3/30/2012	12:49:37 PM	PH3 MFC set to  0.000000
3/30/2012	12:49:37 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:49:37 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:49:37 PM	Tube furnace set to 150
3/30/2012	12:50:07 PM	H2 valve closed
3/30/2012	12:50:07 PM	BCl3 valve closed
3/30/2012	12:50:07 PM	PH3 valve closed
3/30/2012	12:50:07 PM	SiCl4 pre valve closed
3/30/2012	12:50:07 PM	SiCl4 post valve closed
3/30/2012	12:50:07 PM	Bypass valve closed
3/30/2012	12:50:07 PM	Bubbler valve closed
3/30/2012	12:50:07 PM	Helium valve opened
3/30/2012	12:50:07 PM	Main Vac valve opened
3/30/2012	12:50:07 PM	Helium MFC set to  20.000000
3/30/2012	12:50:07 PM	H2 MFC set to  0.000000
3/30/2012	12:50:07 PM	BCl3 MFC set to  0.000000
3/30/2012	12:50:07 PM	PH3 MFC set to  0.000000
3/30/2012	12:50:07 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:50:07 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:50:07 PM	Tube furnace set to 150
3/30/2012	12:50:37 PM	Helium valve closed
3/30/2012	12:50:37 PM	H2 valve closed
3/30/2012	12:50:37 PM	BCl3 valve closed
3/30/2012	12:50:37 PM	PH3 valve closed
3/30/2012	12:50:37 PM	SiCl4 pre valve closed
3/30/2012	12:50:37 PM	SiCl4 post valve closed
3/30/2012	12:50:37 PM	Bypass valve closed
3/30/2012	12:50:37 PM	Bubbler valve closed
3/30/2012	12:50:37 PM	Main Vac valve opened
3/30/2012	12:50:37 PM	Helium MFC set to  0.000000
3/30/2012	12:50:37 PM	H2 MFC set to  0.000000
3/30/2012	12:50:37 PM	BCl3 MFC set to  0.000000
3/30/2012	12:50:37 PM	PH3 MFC set to  0.000000
3/30/2012	12:50:37 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:50:37 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:50:37 PM	Tube furnace set to 150
3/30/2012	12:51:07 PM	H2 valve closed
3/30/2012	12:51:07 PM	BCl3 valve closed
3/30/2012	12:51:07 PM	PH3 valve closed
3/30/2012	12:51:07 PM	SiCl4 pre valve closed
3/30/2012	12:51:07 PM	SiCl4 post valve closed
3/30/2012	12:51:07 PM	Bypass valve closed
3/30/2012	12:51:07 PM	Bubbler valve closed
3/30/2012	12:51:07 PM	Helium valve opened
3/30/2012	12:51:07 PM	Main Vac valve opened
3/30/2012	12:51:07 PM	Helium MFC set to  20.000000
3/30/2012	12:51:07 PM	H2 MFC set to  0.000000
3/30/2012	12:51:07 PM	BCl3 MFC set to  0.000000
3/30/2012	12:51:07 PM	PH3 MFC set to  0.000000
3/30/2012	12:51:07 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:51:07 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:51:07 PM	Tube furnace set to 150
3/30/2012	12:51:37 PM	Helium valve closed
3/30/2012	12:51:37 PM	H2 valve closed
3/30/2012	12:51:37 PM	BCl3 valve closed
3/30/2012	12:51:37 PM	PH3 valve closed
3/30/2012	12:51:37 PM	SiCl4 pre valve closed
3/30/2012	12:51:37 PM	SiCl4 post valve closed
3/30/2012	12:51:37 PM	Bypass valve closed
3/30/2012	12:51:37 PM	Bubbler valve closed
3/30/2012	12:51:37 PM	Main Vac valve opened
3/30/2012	12:51:37 PM	Helium MFC set to  0.000000
3/30/2012	12:51:37 PM	H2 MFC set to  0.000000
3/30/2012	12:51:37 PM	BCl3 MFC set to  0.000000
3/30/2012	12:51:37 PM	PH3 MFC set to  0.000000
3/30/2012	12:51:37 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:51:37 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:51:38 PM	Tube furnace set to 150
3/30/2012	12:52:08 PM	H2 valve closed
3/30/2012	12:52:08 PM	BCl3 valve closed
3/30/2012	12:52:08 PM	PH3 valve closed
3/30/2012	12:52:08 PM	SiCl4 pre valve closed
3/30/2012	12:52:08 PM	SiCl4 post valve closed
3/30/2012	12:52:08 PM	Bypass valve closed
3/30/2012	12:52:08 PM	Bubbler valve closed
3/30/2012	12:52:08 PM	Helium valve opened
3/30/2012	12:52:08 PM	Main Vac valve opened
3/30/2012	12:52:08 PM	Helium MFC set to  20.000000
3/30/2012	12:52:08 PM	H2 MFC set to  0.000000
3/30/2012	12:52:08 PM	BCl3 MFC set to  0.000000
3/30/2012	12:52:08 PM	PH3 MFC set to  0.000000
3/30/2012	12:52:08 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:52:08 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:52:08 PM	Tube furnace set to 150
3/30/2012	12:52:38 PM	Helium valve closed
3/30/2012	12:52:38 PM	H2 valve closed
3/30/2012	12:52:38 PM	BCl3 valve closed
3/30/2012	12:52:38 PM	PH3 valve closed
3/30/2012	12:52:38 PM	SiCl4 pre valve closed
3/30/2012	12:52:38 PM	SiCl4 post valve closed
3/30/2012	12:52:38 PM	Bypass valve closed
3/30/2012	12:52:38 PM	Bubbler valve closed
3/30/2012	12:52:38 PM	Main Vac valve opened
3/30/2012	12:52:38 PM	Helium MFC set to  0.000000
3/30/2012	12:52:38 PM	H2 MFC set to  0.000000
3/30/2012	12:52:38 PM	BCl3 MFC set to  0.000000
3/30/2012	12:52:38 PM	PH3 MFC set to  0.000000
3/30/2012	12:52:38 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:52:38 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:52:38 PM	Tube furnace set to 150
3/30/2012	12:53:08 PM	H2 valve closed
3/30/2012	12:53:08 PM	BCl3 valve closed
3/30/2012	12:53:08 PM	PH3 valve closed
3/30/2012	12:53:08 PM	SiCl4 pre valve closed
3/30/2012	12:53:08 PM	SiCl4 post valve closed
3/30/2012	12:53:08 PM	Bypass valve closed
3/30/2012	12:53:08 PM	Bubbler valve closed
3/30/2012	12:53:08 PM	Helium valve opened
3/30/2012	12:53:08 PM	Main Vac valve opened
3/30/2012	12:53:08 PM	Helium MFC set to  20.000000
3/30/2012	12:53:08 PM	H2 MFC set to  0.000000
3/30/2012	12:53:08 PM	BCl3 MFC set to  0.000000
3/30/2012	12:53:08 PM	PH3 MFC set to  0.000000
3/30/2012	12:53:08 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:53:08 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:53:08 PM	Tube furnace set to 150
3/30/2012	12:53:38 PM	Helium valve closed
3/30/2012	12:53:38 PM	H2 valve closed
3/30/2012	12:53:38 PM	BCl3 valve closed
3/30/2012	12:53:38 PM	PH3 valve closed
3/30/2012	12:53:38 PM	SiCl4 pre valve closed
3/30/2012	12:53:38 PM	SiCl4 post valve closed
3/30/2012	12:53:38 PM	Bypass valve closed
3/30/2012	12:53:38 PM	Bubbler valve closed
3/30/2012	12:53:38 PM	Main Vac valve opened
3/30/2012	12:53:38 PM	Helium MFC set to  0.000000
3/30/2012	12:53:38 PM	H2 MFC set to  0.000000
3/30/2012	12:53:38 PM	BCl3 MFC set to  0.000000
3/30/2012	12:53:38 PM	PH3 MFC set to  0.000000
3/30/2012	12:53:38 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:53:38 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:53:39 PM	Tube furnace set to 150
3/30/2012	12:54:09 PM	H2 valve closed
3/30/2012	12:54:09 PM	BCl3 valve closed
3/30/2012	12:54:09 PM	PH3 valve closed
3/30/2012	12:54:09 PM	SiCl4 pre valve closed
3/30/2012	12:54:09 PM	SiCl4 post valve closed
3/30/2012	12:54:09 PM	Bypass valve closed
3/30/2012	12:54:09 PM	Bubbler valve closed
3/30/2012	12:54:09 PM	Helium valve opened
3/30/2012	12:54:09 PM	Main Vac valve opened
3/30/2012	12:54:09 PM	Helium MFC set to  20.000000
3/30/2012	12:54:09 PM	H2 MFC set to  0.000000
3/30/2012	12:54:09 PM	BCl3 MFC set to  0.000000
3/30/2012	12:54:09 PM	PH3 MFC set to  0.000000
3/30/2012	12:54:09 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:54:09 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:54:09 PM	Tube furnace set to 150
3/30/2012	12:54:39 PM	Helium valve closed
3/30/2012	12:54:39 PM	H2 valve closed
3/30/2012	12:54:39 PM	BCl3 valve closed
3/30/2012	12:54:39 PM	PH3 valve closed
3/30/2012	12:54:39 PM	SiCl4 pre valve closed
3/30/2012	12:54:39 PM	SiCl4 post valve closed
3/30/2012	12:54:39 PM	Bypass valve closed
3/30/2012	12:54:39 PM	Bubbler valve closed
3/30/2012	12:54:39 PM	Main Vac valve opened
3/30/2012	12:54:39 PM	Helium MFC set to  0.000000
3/30/2012	12:54:39 PM	H2 MFC set to  0.000000
3/30/2012	12:54:39 PM	BCl3 MFC set to  0.000000
3/30/2012	12:54:39 PM	PH3 MFC set to  0.000000
3/30/2012	12:54:39 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:54:39 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:54:39 PM	Tube furnace set to 150
3/30/2012	12:55:09 PM	H2 valve closed
3/30/2012	12:55:09 PM	BCl3 valve closed
3/30/2012	12:55:09 PM	PH3 valve closed
3/30/2012	12:55:09 PM	SiCl4 pre valve closed
3/30/2012	12:55:09 PM	SiCl4 post valve closed
3/30/2012	12:55:09 PM	Bypass valve closed
3/30/2012	12:55:09 PM	Bubbler valve closed
3/30/2012	12:55:09 PM	Helium valve opened
3/30/2012	12:55:09 PM	Main Vac valve opened
3/30/2012	12:55:09 PM	Helium MFC set to  20.000000
3/30/2012	12:55:09 PM	H2 MFC set to  0.000000
3/30/2012	12:55:09 PM	BCl3 MFC set to  0.000000
3/30/2012	12:55:09 PM	PH3 MFC set to  0.000000
3/30/2012	12:55:09 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:55:09 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:55:09 PM	Tube furnace set to 150
3/30/2012	12:55:39 PM	Helium valve closed
3/30/2012	12:55:39 PM	H2 valve closed
3/30/2012	12:55:39 PM	BCl3 valve closed
3/30/2012	12:55:39 PM	PH3 valve closed
3/30/2012	12:55:39 PM	SiCl4 pre valve closed
3/30/2012	12:55:39 PM	SiCl4 post valve closed
3/30/2012	12:55:39 PM	Bypass valve closed
3/30/2012	12:55:39 PM	Bubbler valve closed
3/30/2012	12:55:39 PM	Main Vac valve opened
3/30/2012	12:55:39 PM	Helium MFC set to  0.000000
3/30/2012	12:55:39 PM	H2 MFC set to  0.000000
3/30/2012	12:55:39 PM	BCl3 MFC set to  0.000000
3/30/2012	12:55:39 PM	PH3 MFC set to  0.000000
3/30/2012	12:55:39 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:55:39 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:55:40 PM	Tube furnace set to 150
3/30/2012	12:56:10 PM	H2 valve closed
3/30/2012	12:56:10 PM	BCl3 valve closed
3/30/2012	12:56:10 PM	PH3 valve closed
3/30/2012	12:56:10 PM	SiCl4 pre valve closed
3/30/2012	12:56:10 PM	SiCl4 post valve closed
3/30/2012	12:56:10 PM	Bypass valve closed
3/30/2012	12:56:10 PM	Bubbler valve closed
3/30/2012	12:56:10 PM	Helium valve opened
3/30/2012	12:56:10 PM	Main Vac valve opened
3/30/2012	12:56:10 PM	Helium MFC set to  20.000000
3/30/2012	12:56:10 PM	H2 MFC set to  0.000000
3/30/2012	12:56:10 PM	BCl3 MFC set to  0.000000
3/30/2012	12:56:10 PM	PH3 MFC set to  0.000000
3/30/2012	12:56:10 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:56:10 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:56:10 PM	Tube furnace set to 150
3/30/2012	12:56:40 PM	Helium valve closed
3/30/2012	12:56:40 PM	H2 valve closed
3/30/2012	12:56:40 PM	BCl3 valve closed
3/30/2012	12:56:40 PM	PH3 valve closed
3/30/2012	12:56:40 PM	SiCl4 pre valve closed
3/30/2012	12:56:40 PM	SiCl4 post valve closed
3/30/2012	12:56:40 PM	Bypass valve closed
3/30/2012	12:56:40 PM	Bubbler valve closed
3/30/2012	12:56:40 PM	Main Vac valve opened
3/30/2012	12:56:40 PM	Helium MFC set to  0.000000
3/30/2012	12:56:40 PM	H2 MFC set to  0.000000
3/30/2012	12:56:40 PM	BCl3 MFC set to  0.000000
3/30/2012	12:56:40 PM	PH3 MFC set to  0.000000
3/30/2012	12:56:40 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:56:40 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:56:40 PM	Tube furnace set to 150
3/30/2012	12:56:41 PM	Run finished at 12:56 PM
3/30/2012	12:57:02 PM	Main Vac valve closed
3/30/2012	12:57:12 PM	Main Vac valve opened
3/30/2012	12:57:25 PM	Main Vac valve closed
3/30/2012	12:57:40 PM	Main Vac valve opened
3/30/2012	12:58:19 PM	Recipe started at 12:58 PM
3/30/2012	12:58:19 PM	Helium valve closed
3/30/2012	12:58:19 PM	H2 valve closed
3/30/2012	12:58:19 PM	BCl3 valve closed
3/30/2012	12:58:19 PM	PH3 valve closed
3/30/2012	12:58:19 PM	SiCl4 pre valve closed
3/30/2012	12:58:19 PM	SiCl4 post valve closed
3/30/2012	12:58:19 PM	Main Vac valve closed
3/30/2012	12:58:19 PM	Bypass valve closed
3/30/2012	12:58:19 PM	Bubbler valve closed
3/30/2012	12:58:19 PM	Helium MFC set to  0.000000
3/30/2012	12:58:19 PM	H2 MFC set to  0.000000
3/30/2012	12:58:19 PM	BCl3 MFC set to  0.000000
3/30/2012	12:58:19 PM	PH3 MFC set to  0.000000
3/30/2012	12:58:19 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:58:19 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:58:20 PM	Tube furnace set to 0
3/30/2012	12:58:23 PM	Helium valve closed
3/30/2012	12:58:23 PM	BCl3 valve closed
3/30/2012	12:58:23 PM	PH3 valve closed
3/30/2012	12:58:23 PM	SiCl4 pre valve closed
3/30/2012	12:58:23 PM	SiCl4 post valve closed
3/30/2012	12:58:23 PM	Main Vac valve closed
3/30/2012	12:58:23 PM	Bypass valve closed
3/30/2012	12:58:23 PM	Bubbler valve closed
3/30/2012	12:58:23 PM	H2 valve opened
3/30/2012	12:58:23 PM	Helium MFC set to  0.000000
3/30/2012	12:58:23 PM	H2 MFC set to  500.000000
3/30/2012	12:58:23 PM	BCl3 MFC set to  0.000000
3/30/2012	12:58:23 PM	PH3 MFC set to  0.000000
3/30/2012	12:58:23 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:58:23 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:58:23 PM	Tube furnace set to 0
3/30/2012	12:59:26 PM	Helium valve closed
3/30/2012	12:59:26 PM	BCl3 valve closed
3/30/2012	12:59:26 PM	PH3 valve closed
3/30/2012	12:59:26 PM	SiCl4 pre valve closed
3/30/2012	12:59:26 PM	SiCl4 post valve closed
3/30/2012	12:59:26 PM	Main Vac valve closed
3/30/2012	12:59:26 PM	Bypass valve closed
3/30/2012	12:59:26 PM	H2 valve opened
3/30/2012	12:59:26 PM	Bubbler valve opened
3/30/2012	12:59:26 PM	Helium MFC set to  0.000000
3/30/2012	12:59:26 PM	H2 MFC set to  500.000000
3/30/2012	12:59:26 PM	BCl3 MFC set to  0.000000
3/30/2012	12:59:26 PM	PH3 MFC set to  0.000000
3/30/2012	12:59:26 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:59:26 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:59:26 PM	Tube furnace set to 0
3/30/2012	12:59:27 PM	Helium valve closed
3/30/2012	12:59:27 PM	BCl3 valve closed
3/30/2012	12:59:27 PM	PH3 valve closed
3/30/2012	12:59:27 PM	SiCl4 pre valve closed
3/30/2012	12:59:27 PM	SiCl4 post valve closed
3/30/2012	12:59:27 PM	Main Vac valve closed
3/30/2012	12:59:27 PM	Bypass valve closed
3/30/2012	12:59:27 PM	H2 valve opened
3/30/2012	12:59:27 PM	Bubbler valve opened
3/30/2012	12:59:27 PM	Helium MFC set to  0.000000
3/30/2012	12:59:27 PM	H2 MFC set to  450.000000
3/30/2012	12:59:27 PM	BCl3 MFC set to  0.000000
3/30/2012	12:59:27 PM	PH3 MFC set to  0.000000
3/30/2012	12:59:27 PM	SiCl4 MFC set to  0.000000
3/30/2012	12:59:27 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	12:59:27 PM	Tube furnace set to 1000
3/30/2012	1:24:27 PM	Helium valve closed
3/30/2012	1:24:27 PM	PH3 valve closed
3/30/2012	1:24:27 PM	Main Vac valve closed
3/30/2012	1:24:27 PM	Bypass valve closed
3/30/2012	1:24:27 PM	H2 valve opened
3/30/2012	1:24:27 PM	BCl3 valve opened
3/30/2012	1:24:27 PM	SiCl4 pre valve opened
3/30/2012	1:24:27 PM	SiCl4 post valve opened
3/30/2012	1:24:27 PM	Bubbler valve opened
3/30/2012	1:24:27 PM	Helium MFC set to  0.000000
3/30/2012	1:24:27 PM	H2 MFC set to  450.000000
3/30/2012	1:24:27 PM	BCl3 MFC set to  1.500000
3/30/2012	1:24:27 PM	PH3 MFC set to  0.000000
3/30/2012	1:24:27 PM	SiCl4 MFC set to  50.000000
3/30/2012	1:24:27 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	1:24:27 PM	Tube furnace set to 1000
3/30/2012	1:29:27 PM	Helium valve closed
3/30/2012	1:29:27 PM	BCl3 valve closed
3/30/2012	1:29:27 PM	PH3 valve closed
3/30/2012	1:29:27 PM	SiCl4 pre valve closed
3/30/2012	1:29:27 PM	SiCl4 post valve closed
3/30/2012	1:29:27 PM	Main Vac valve closed
3/30/2012	1:29:27 PM	Bypass valve closed
3/30/2012	1:29:27 PM	H2 valve opened
3/30/2012	1:29:27 PM	Bubbler valve opened
3/30/2012	1:29:28 PM	Helium MFC set to  0.000000
3/30/2012	1:29:28 PM	H2 MFC set to  500.000000
3/30/2012	1:29:28 PM	BCl3 MFC set to  0.000000
3/30/2012	1:29:28 PM	PH3 MFC set to  0.000000
3/30/2012	1:29:28 PM	SiCl4 MFC set to  0.000000
3/30/2012	1:29:28 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	1:29:28 PM	Tube furnace set to 750
3/30/2012	1:34:28 PM	H2 valve closed
3/30/2012	1:34:28 PM	BCl3 valve closed
3/30/2012	1:34:28 PM	PH3 valve closed
3/30/2012	1:34:28 PM	SiCl4 pre valve closed
3/30/2012	1:34:28 PM	SiCl4 post valve closed
3/30/2012	1:34:28 PM	Main Vac valve closed
3/30/2012	1:34:28 PM	Bypass valve closed
3/30/2012	1:34:28 PM	Helium valve opened
3/30/2012	1:34:28 PM	Bubbler valve opened
3/30/2012	1:34:28 PM	Helium MFC set to  500.000000
3/30/2012	1:34:28 PM	H2 MFC set to  0.000000
3/30/2012	1:34:28 PM	BCl3 MFC set to  0.000000
3/30/2012	1:34:28 PM	PH3 MFC set to  0.000000
3/30/2012	1:34:28 PM	SiCl4 MFC set to  0.000000
3/30/2012	1:34:28 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	1:34:28 PM	Tube furnace set to 0
3/30/2012	1:54:28 PM	Helium valve closed
3/30/2012	1:54:28 PM	H2 valve closed
3/30/2012	1:54:28 PM	BCl3 valve closed
3/30/2012	1:54:28 PM	PH3 valve closed
3/30/2012	1:54:28 PM	SiCl4 pre valve closed
3/30/2012	1:54:28 PM	SiCl4 post valve closed
3/30/2012	1:54:28 PM	Main Vac valve closed
3/30/2012	1:54:28 PM	Bypass valve closed
3/30/2012	1:54:28 PM	Bubbler valve closed
3/30/2012	1:54:28 PM	Helium MFC set to  0.000000
3/30/2012	1:54:28 PM	H2 MFC set to  0.000000
3/30/2012	1:54:28 PM	BCl3 MFC set to  0.000000
3/30/2012	1:54:28 PM	PH3 MFC set to  0.000000
3/30/2012	1:54:28 PM	SiCl4 MFC set to  0.000000
3/30/2012	1:54:28 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	1:54:28 PM	Tube furnace set to 0
3/30/2012	1:54:29 PM	Run finished at 1:54 PM
3/30/2012	1:58:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/30/2012	1:58:17 PM	Recipe started at 1:58 PM
3/30/2012	1:58:17 PM	Helium valve closed
3/30/2012	1:58:17 PM	H2 valve closed
3/30/2012	1:58:17 PM	BCl3 valve closed
3/30/2012	1:58:17 PM	PH3 valve closed
3/30/2012	1:58:17 PM	SiCl4 pre valve closed
3/30/2012	1:58:17 PM	SiCl4 post valve closed
3/30/2012	1:58:17 PM	Main Vac valve closed
3/30/2012	1:58:17 PM	Bypass valve closed
3/30/2012	1:58:17 PM	Bubbler valve closed
3/30/2012	1:58:17 PM	Helium MFC set to  0.000000
3/30/2012	1:58:17 PM	H2 MFC set to  0.000000
3/30/2012	1:58:17 PM	BCl3 MFC set to  0.000000
3/30/2012	1:58:17 PM	PH3 MFC set to  0.000000
3/30/2012	1:58:17 PM	SiCl4 MFC set to  0.000000
3/30/2012	1:58:17 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	1:58:17 PM	Tube furnace set to 0
3/30/2012	1:58:20 PM	H2 valve closed
3/30/2012	1:58:20 PM	BCl3 valve closed
3/30/2012	1:58:20 PM	PH3 valve closed
3/30/2012	1:58:20 PM	SiCl4 pre valve closed
3/30/2012	1:58:20 PM	SiCl4 post valve closed
3/30/2012	1:58:20 PM	Main Vac valve closed
3/30/2012	1:58:20 PM	Bypass valve closed
3/30/2012	1:58:20 PM	Bubbler valve closed
3/30/2012	1:58:20 PM	Helium valve opened
3/30/2012	1:58:20 PM	Helium MFC set to  500.000000
3/30/2012	1:58:20 PM	H2 MFC set to  0.000000
3/30/2012	1:58:20 PM	BCl3 MFC set to  0.000000
3/30/2012	1:58:20 PM	PH3 MFC set to  0.000000
3/30/2012	1:58:20 PM	SiCl4 MFC set to  0.000000
3/30/2012	1:58:20 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	1:58:20 PM	Tube furnace set to 0
3/30/2012	1:58:20 PM	Helium valve closed
3/30/2012	1:58:20 PM	H2 valve closed
3/30/2012	1:58:21 PM	BCl3 valve closed
3/30/2012	1:58:21 PM	PH3 valve closed
3/30/2012	1:58:21 PM	SiCl4 pre valve closed
3/30/2012	1:58:21 PM	SiCl4 post valve closed
3/30/2012	1:58:21 PM	Main Vac valve closed
3/30/2012	1:58:21 PM	Bypass valve closed
3/30/2012	1:58:21 PM	Bubbler valve closed
3/30/2012	1:58:21 PM	Helium MFC set to  0.000000
3/30/2012	1:58:21 PM	H2 MFC set to  0.000000
3/30/2012	1:58:21 PM	BCl3 MFC set to  0.000000
3/30/2012	1:58:21 PM	PH3 MFC set to  0.000000
3/30/2012	1:58:21 PM	SiCl4 MFC set to  0.000000
3/30/2012	1:58:21 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	1:58:21 PM	Tube furnace set to 0
3/30/2012	1:58:22 PM	Run finished at 1:58 PM
3/30/2012	1:58:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/30/2012	2:01:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2012	2:01:54 PM	Recipe started at 2:01 PM
3/30/2012	2:01:54 PM	Helium valve closed
3/30/2012	2:01:54 PM	H2 valve closed
3/30/2012	2:01:54 PM	BCl3 valve closed
3/30/2012	2:01:54 PM	PH3 valve closed
3/30/2012	2:01:54 PM	SiCl4 pre valve closed
3/30/2012	2:01:54 PM	SiCl4 post valve closed
3/30/2012	2:01:54 PM	Main Vac valve closed
3/30/2012	2:01:54 PM	Bubbler valve closed
3/30/2012	2:01:54 PM	Bypass valve opened
3/30/2012	2:01:54 PM	Helium MFC set to  0.000000
3/30/2012	2:01:54 PM	H2 MFC set to  0.000000
3/30/2012	2:01:54 PM	BCl3 MFC set to  0.000000
3/30/2012	2:01:54 PM	PH3 MFC set to  0.000000
3/30/2012	2:01:54 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:01:54 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:01:54 PM	Tube furnace set to 0
3/30/2012	2:02:55 PM	Helium valve closed
3/30/2012	2:02:55 PM	H2 valve closed
3/30/2012	2:02:55 PM	BCl3 valve closed
3/30/2012	2:02:55 PM	PH3 valve closed
3/30/2012	2:02:55 PM	SiCl4 pre valve closed
3/30/2012	2:02:55 PM	SiCl4 post valve closed
3/30/2012	2:02:55 PM	Main Vac valve closed
3/30/2012	2:02:55 PM	Bubbler valve closed
3/30/2012	2:02:55 PM	Bypass valve opened
3/30/2012	2:02:55 PM	Helium MFC set to  0.000000
3/30/2012	2:02:55 PM	H2 MFC set to  0.000000
3/30/2012	2:02:55 PM	BCl3 MFC set to  0.000000
3/30/2012	2:02:55 PM	PH3 MFC set to  0.000000
3/30/2012	2:02:55 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:02:55 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:02:55 PM	Tube furnace set to 0
3/30/2012	2:03:55 PM	Helium valve closed
3/30/2012	2:03:56 PM	H2 valve closed
3/30/2012	2:03:56 PM	BCl3 valve closed
3/30/2012	2:03:56 PM	PH3 valve closed
3/30/2012	2:03:56 PM	SiCl4 pre valve closed
3/30/2012	2:03:56 PM	SiCl4 post valve closed
3/30/2012	2:03:56 PM	Bypass valve closed
3/30/2012	2:03:56 PM	Bubbler valve closed
3/30/2012	2:03:56 PM	Main Vac valve opened
3/30/2012	2:03:56 PM	Helium MFC set to  0.000000
3/30/2012	2:03:56 PM	H2 MFC set to  0.000000
3/30/2012	2:03:56 PM	BCl3 MFC set to  0.000000
3/30/2012	2:03:56 PM	PH3 MFC set to  0.000000
3/30/2012	2:03:56 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:03:56 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:03:56 PM	Tube furnace set to 0
3/30/2012	2:03:57 PM	Run finished at 2:03 PM
3/30/2012	2:03:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2012	2:32:57 PM	Recipe started at 2:32 PM
3/30/2012	2:32:57 PM	Helium valve closed
3/30/2012	2:32:57 PM	H2 valve closed
3/30/2012	2:32:57 PM	BCl3 valve closed
3/30/2012	2:32:57 PM	PH3 valve closed
3/30/2012	2:32:57 PM	SiCl4 pre valve closed
3/30/2012	2:32:57 PM	SiCl4 post valve closed
3/30/2012	2:32:57 PM	Bypass valve closed
3/30/2012	2:32:57 PM	Bubbler valve closed
3/30/2012	2:32:57 PM	Main Vac valve opened
3/30/2012	2:32:57 PM	Helium MFC set to  0.000000
3/30/2012	2:32:58 PM	H2 MFC set to  0.000000
3/30/2012	2:32:58 PM	BCl3 MFC set to  0.000000
3/30/2012	2:32:58 PM	PH3 MFC set to  0.000000
3/30/2012	2:32:58 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:32:58 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:32:58 PM	Tube furnace set to 150
3/30/2012	2:33:28 PM	H2 valve closed
3/30/2012	2:33:28 PM	BCl3 valve closed
3/30/2012	2:33:28 PM	PH3 valve closed
3/30/2012	2:33:28 PM	SiCl4 pre valve closed
3/30/2012	2:33:28 PM	SiCl4 post valve closed
3/30/2012	2:33:28 PM	Bypass valve closed
3/30/2012	2:33:28 PM	Bubbler valve closed
3/30/2012	2:33:28 PM	Helium valve opened
3/30/2012	2:33:28 PM	Main Vac valve opened
3/30/2012	2:33:28 PM	Helium MFC set to  20.000000
3/30/2012	2:33:28 PM	H2 MFC set to  0.000000
3/30/2012	2:33:28 PM	BCl3 MFC set to  0.000000
3/30/2012	2:33:28 PM	PH3 MFC set to  0.000000
3/30/2012	2:33:28 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:33:28 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:33:28 PM	Tube furnace set to 150
3/30/2012	2:33:58 PM	Helium valve closed
3/30/2012	2:33:58 PM	H2 valve closed
3/30/2012	2:33:58 PM	BCl3 valve closed
3/30/2012	2:33:58 PM	PH3 valve closed
3/30/2012	2:33:58 PM	SiCl4 pre valve closed
3/30/2012	2:33:58 PM	SiCl4 post valve closed
3/30/2012	2:33:58 PM	Bypass valve closed
3/30/2012	2:33:58 PM	Bubbler valve closed
3/30/2012	2:33:58 PM	Main Vac valve opened
3/30/2012	2:33:58 PM	Helium MFC set to  0.000000
3/30/2012	2:33:58 PM	H2 MFC set to  0.000000
3/30/2012	2:33:58 PM	BCl3 MFC set to  0.000000
3/30/2012	2:33:58 PM	PH3 MFC set to  0.000000
3/30/2012	2:33:58 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:33:58 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:33:58 PM	Tube furnace set to 150
3/30/2012	2:34:28 PM	H2 valve closed
3/30/2012	2:34:28 PM	BCl3 valve closed
3/30/2012	2:34:28 PM	PH3 valve closed
3/30/2012	2:34:28 PM	SiCl4 pre valve closed
3/30/2012	2:34:28 PM	SiCl4 post valve closed
3/30/2012	2:34:28 PM	Bypass valve closed
3/30/2012	2:34:28 PM	Bubbler valve closed
3/30/2012	2:34:28 PM	Helium valve opened
3/30/2012	2:34:28 PM	Main Vac valve opened
3/30/2012	2:34:28 PM	Helium MFC set to  20.000000
3/30/2012	2:34:28 PM	H2 MFC set to  0.000000
3/30/2012	2:34:28 PM	BCl3 MFC set to  0.000000
3/30/2012	2:34:28 PM	PH3 MFC set to  0.000000
3/30/2012	2:34:28 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:34:28 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:34:28 PM	Tube furnace set to 150
3/30/2012	2:34:58 PM	Helium valve closed
3/30/2012	2:34:58 PM	H2 valve closed
3/30/2012	2:34:58 PM	BCl3 valve closed
3/30/2012	2:34:58 PM	PH3 valve closed
3/30/2012	2:34:58 PM	SiCl4 pre valve closed
3/30/2012	2:34:58 PM	SiCl4 post valve closed
3/30/2012	2:34:58 PM	Bypass valve closed
3/30/2012	2:34:58 PM	Bubbler valve closed
3/30/2012	2:34:58 PM	Main Vac valve opened
3/30/2012	2:34:58 PM	Helium MFC set to  0.000000
3/30/2012	2:34:58 PM	H2 MFC set to  0.000000
3/30/2012	2:34:58 PM	BCl3 MFC set to  0.000000
3/30/2012	2:34:58 PM	PH3 MFC set to  0.000000
3/30/2012	2:34:58 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:34:58 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:34:59 PM	Tube furnace set to 150
3/30/2012	2:35:29 PM	H2 valve closed
3/30/2012	2:35:29 PM	BCl3 valve closed
3/30/2012	2:35:29 PM	PH3 valve closed
3/30/2012	2:35:29 PM	SiCl4 pre valve closed
3/30/2012	2:35:29 PM	SiCl4 post valve closed
3/30/2012	2:35:29 PM	Bypass valve closed
3/30/2012	2:35:29 PM	Bubbler valve closed
3/30/2012	2:35:29 PM	Helium valve opened
3/30/2012	2:35:29 PM	Main Vac valve opened
3/30/2012	2:35:29 PM	Helium MFC set to  20.000000
3/30/2012	2:35:29 PM	H2 MFC set to  0.000000
3/30/2012	2:35:29 PM	BCl3 MFC set to  0.000000
3/30/2012	2:35:29 PM	PH3 MFC set to  0.000000
3/30/2012	2:35:29 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:35:29 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:35:29 PM	Tube furnace set to 150
3/30/2012	2:35:59 PM	Helium valve closed
3/30/2012	2:35:59 PM	H2 valve closed
3/30/2012	2:35:59 PM	BCl3 valve closed
3/30/2012	2:35:59 PM	PH3 valve closed
3/30/2012	2:35:59 PM	SiCl4 pre valve closed
3/30/2012	2:35:59 PM	SiCl4 post valve closed
3/30/2012	2:35:59 PM	Bypass valve closed
3/30/2012	2:35:59 PM	Bubbler valve closed
3/30/2012	2:35:59 PM	Main Vac valve opened
3/30/2012	2:35:59 PM	Helium MFC set to  0.000000
3/30/2012	2:35:59 PM	H2 MFC set to  0.000000
3/30/2012	2:35:59 PM	BCl3 MFC set to  0.000000
3/30/2012	2:35:59 PM	PH3 MFC set to  0.000000
3/30/2012	2:35:59 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:35:59 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:35:59 PM	Tube furnace set to 150
3/30/2012	2:36:29 PM	H2 valve closed
3/30/2012	2:36:29 PM	BCl3 valve closed
3/30/2012	2:36:29 PM	PH3 valve closed
3/30/2012	2:36:29 PM	SiCl4 pre valve closed
3/30/2012	2:36:29 PM	SiCl4 post valve closed
3/30/2012	2:36:29 PM	Bypass valve closed
3/30/2012	2:36:29 PM	Bubbler valve closed
3/30/2012	2:36:29 PM	Helium valve opened
3/30/2012	2:36:29 PM	Main Vac valve opened
3/30/2012	2:36:29 PM	Helium MFC set to  20.000000
3/30/2012	2:36:29 PM	H2 MFC set to  0.000000
3/30/2012	2:36:29 PM	BCl3 MFC set to  0.000000
3/30/2012	2:36:29 PM	PH3 MFC set to  0.000000
3/30/2012	2:36:29 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:36:29 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:36:29 PM	Tube furnace set to 150
3/30/2012	2:36:59 PM	Helium valve closed
3/30/2012	2:36:59 PM	H2 valve closed
3/30/2012	2:36:59 PM	BCl3 valve closed
3/30/2012	2:36:59 PM	PH3 valve closed
3/30/2012	2:36:59 PM	SiCl4 pre valve closed
3/30/2012	2:36:59 PM	SiCl4 post valve closed
3/30/2012	2:36:59 PM	Bypass valve closed
3/30/2012	2:36:59 PM	Bubbler valve closed
3/30/2012	2:36:59 PM	Main Vac valve opened
3/30/2012	2:36:59 PM	Helium MFC set to  0.000000
3/30/2012	2:36:59 PM	H2 MFC set to  0.000000
3/30/2012	2:36:59 PM	BCl3 MFC set to  0.000000
3/30/2012	2:36:59 PM	PH3 MFC set to  0.000000
3/30/2012	2:36:59 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:36:59 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:37:00 PM	Tube furnace set to 150
3/30/2012	2:37:30 PM	H2 valve closed
3/30/2012	2:37:30 PM	BCl3 valve closed
3/30/2012	2:37:30 PM	PH3 valve closed
3/30/2012	2:37:30 PM	SiCl4 pre valve closed
3/30/2012	2:37:30 PM	SiCl4 post valve closed
3/30/2012	2:37:30 PM	Bypass valve closed
3/30/2012	2:37:30 PM	Bubbler valve closed
3/30/2012	2:37:30 PM	Helium valve opened
3/30/2012	2:37:30 PM	Main Vac valve opened
3/30/2012	2:37:30 PM	Helium MFC set to  20.000000
3/30/2012	2:37:30 PM	H2 MFC set to  0.000000
3/30/2012	2:37:30 PM	BCl3 MFC set to  0.000000
3/30/2012	2:37:30 PM	PH3 MFC set to  0.000000
3/30/2012	2:37:30 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:37:30 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:37:30 PM	Tube furnace set to 150
3/30/2012	2:38:00 PM	Helium valve closed
3/30/2012	2:38:00 PM	H2 valve closed
3/30/2012	2:38:00 PM	BCl3 valve closed
3/30/2012	2:38:00 PM	PH3 valve closed
3/30/2012	2:38:00 PM	SiCl4 pre valve closed
3/30/2012	2:38:00 PM	SiCl4 post valve closed
3/30/2012	2:38:00 PM	Bypass valve closed
3/30/2012	2:38:00 PM	Bubbler valve closed
3/30/2012	2:38:00 PM	Main Vac valve opened
3/30/2012	2:38:00 PM	Helium MFC set to  0.000000
3/30/2012	2:38:00 PM	H2 MFC set to  0.000000
3/30/2012	2:38:00 PM	BCl3 MFC set to  0.000000
3/30/2012	2:38:00 PM	PH3 MFC set to  0.000000
3/30/2012	2:38:00 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:38:00 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:38:00 PM	Tube furnace set to 150
3/30/2012	2:38:30 PM	H2 valve closed
3/30/2012	2:38:30 PM	BCl3 valve closed
3/30/2012	2:38:30 PM	PH3 valve closed
3/30/2012	2:38:30 PM	SiCl4 pre valve closed
3/30/2012	2:38:30 PM	SiCl4 post valve closed
3/30/2012	2:38:30 PM	Bypass valve closed
3/30/2012	2:38:30 PM	Bubbler valve closed
3/30/2012	2:38:30 PM	Helium valve opened
3/30/2012	2:38:30 PM	Main Vac valve opened
3/30/2012	2:38:30 PM	Helium MFC set to  20.000000
3/30/2012	2:38:30 PM	H2 MFC set to  0.000000
3/30/2012	2:38:30 PM	BCl3 MFC set to  0.000000
3/30/2012	2:38:30 PM	PH3 MFC set to  0.000000
3/30/2012	2:38:30 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:38:30 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:38:30 PM	Tube furnace set to 150
3/30/2012	2:39:00 PM	Helium valve closed
3/30/2012	2:39:00 PM	H2 valve closed
3/30/2012	2:39:00 PM	BCl3 valve closed
3/30/2012	2:39:00 PM	PH3 valve closed
3/30/2012	2:39:00 PM	SiCl4 pre valve closed
3/30/2012	2:39:00 PM	SiCl4 post valve closed
3/30/2012	2:39:00 PM	Bypass valve closed
3/30/2012	2:39:00 PM	Bubbler valve closed
3/30/2012	2:39:00 PM	Main Vac valve opened
3/30/2012	2:39:00 PM	Helium MFC set to  0.000000
3/30/2012	2:39:00 PM	H2 MFC set to  0.000000
3/30/2012	2:39:00 PM	BCl3 MFC set to  0.000000
3/30/2012	2:39:00 PM	PH3 MFC set to  0.000000
3/30/2012	2:39:00 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:39:00 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:39:00 PM	Tube furnace set to 150
3/30/2012	2:39:31 PM	H2 valve closed
3/30/2012	2:39:31 PM	BCl3 valve closed
3/30/2012	2:39:31 PM	PH3 valve closed
3/30/2012	2:39:31 PM	SiCl4 pre valve closed
3/30/2012	2:39:31 PM	SiCl4 post valve closed
3/30/2012	2:39:31 PM	Bypass valve closed
3/30/2012	2:39:31 PM	Bubbler valve closed
3/30/2012	2:39:31 PM	Helium valve opened
3/30/2012	2:39:31 PM	Main Vac valve opened
3/30/2012	2:39:31 PM	Helium MFC set to  20.000000
3/30/2012	2:39:31 PM	H2 MFC set to  0.000000
3/30/2012	2:39:31 PM	BCl3 MFC set to  0.000000
3/30/2012	2:39:31 PM	PH3 MFC set to  0.000000
3/30/2012	2:39:31 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:39:31 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:39:31 PM	Tube furnace set to 150
3/30/2012	2:40:01 PM	Helium valve closed
3/30/2012	2:40:01 PM	H2 valve closed
3/30/2012	2:40:01 PM	BCl3 valve closed
3/30/2012	2:40:01 PM	PH3 valve closed
3/30/2012	2:40:01 PM	SiCl4 pre valve closed
3/30/2012	2:40:01 PM	SiCl4 post valve closed
3/30/2012	2:40:01 PM	Bypass valve closed
3/30/2012	2:40:01 PM	Bubbler valve closed
3/30/2012	2:40:01 PM	Main Vac valve opened
3/30/2012	2:40:01 PM	Helium MFC set to  0.000000
3/30/2012	2:40:01 PM	H2 MFC set to  0.000000
3/30/2012	2:40:01 PM	BCl3 MFC set to  0.000000
3/30/2012	2:40:01 PM	PH3 MFC set to  0.000000
3/30/2012	2:40:01 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:40:01 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:40:01 PM	Tube furnace set to 150
3/30/2012	2:40:31 PM	H2 valve closed
3/30/2012	2:40:31 PM	BCl3 valve closed
3/30/2012	2:40:31 PM	PH3 valve closed
3/30/2012	2:40:31 PM	SiCl4 pre valve closed
3/30/2012	2:40:31 PM	SiCl4 post valve closed
3/30/2012	2:40:31 PM	Bypass valve closed
3/30/2012	2:40:31 PM	Bubbler valve closed
3/30/2012	2:40:31 PM	Helium valve opened
3/30/2012	2:40:31 PM	Main Vac valve opened
3/30/2012	2:40:31 PM	Helium MFC set to  20.000000
3/30/2012	2:40:31 PM	H2 MFC set to  0.000000
3/30/2012	2:40:31 PM	BCl3 MFC set to  0.000000
3/30/2012	2:40:31 PM	PH3 MFC set to  0.000000
3/30/2012	2:40:31 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:40:31 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:40:31 PM	Tube furnace set to 150
3/30/2012	2:41:01 PM	Helium valve closed
3/30/2012	2:41:01 PM	H2 valve closed
3/30/2012	2:41:01 PM	BCl3 valve closed
3/30/2012	2:41:01 PM	PH3 valve closed
3/30/2012	2:41:01 PM	SiCl4 pre valve closed
3/30/2012	2:41:01 PM	SiCl4 post valve closed
3/30/2012	2:41:01 PM	Bypass valve closed
3/30/2012	2:41:01 PM	Bubbler valve closed
3/30/2012	2:41:01 PM	Main Vac valve opened
3/30/2012	2:41:01 PM	Helium MFC set to  0.000000
3/30/2012	2:41:01 PM	H2 MFC set to  0.000000
3/30/2012	2:41:01 PM	BCl3 MFC set to  0.000000
3/30/2012	2:41:01 PM	PH3 MFC set to  0.000000
3/30/2012	2:41:01 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:41:01 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:41:01 PM	Tube furnace set to 150
3/30/2012	2:41:31 PM	H2 valve closed
3/30/2012	2:41:31 PM	BCl3 valve closed
3/30/2012	2:41:31 PM	PH3 valve closed
3/30/2012	2:41:31 PM	SiCl4 pre valve closed
3/30/2012	2:41:31 PM	SiCl4 post valve closed
3/30/2012	2:41:31 PM	Bypass valve closed
3/30/2012	2:41:32 PM	Bubbler valve closed
3/30/2012	2:41:32 PM	Helium valve opened
3/30/2012	2:41:32 PM	Main Vac valve opened
3/30/2012	2:41:32 PM	Helium MFC set to  20.000000
3/30/2012	2:41:32 PM	H2 MFC set to  0.000000
3/30/2012	2:41:32 PM	BCl3 MFC set to  0.000000
3/30/2012	2:41:32 PM	PH3 MFC set to  0.000000
3/30/2012	2:41:32 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:41:32 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:41:32 PM	Tube furnace set to 150
3/30/2012	2:42:02 PM	Helium valve closed
3/30/2012	2:42:02 PM	H2 valve closed
3/30/2012	2:42:02 PM	BCl3 valve closed
3/30/2012	2:42:02 PM	PH3 valve closed
3/30/2012	2:42:02 PM	SiCl4 pre valve closed
3/30/2012	2:42:02 PM	SiCl4 post valve closed
3/30/2012	2:42:02 PM	Bypass valve closed
3/30/2012	2:42:02 PM	Bubbler valve closed
3/30/2012	2:42:02 PM	Main Vac valve opened
3/30/2012	2:42:02 PM	Helium MFC set to  0.000000
3/30/2012	2:42:02 PM	H2 MFC set to  0.000000
3/30/2012	2:42:02 PM	BCl3 MFC set to  0.000000
3/30/2012	2:42:02 PM	PH3 MFC set to  0.000000
3/30/2012	2:42:02 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:42:02 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:42:02 PM	Tube furnace set to 150
3/30/2012	2:42:32 PM	H2 valve closed
3/30/2012	2:42:32 PM	BCl3 valve closed
3/30/2012	2:42:32 PM	PH3 valve closed
3/30/2012	2:42:32 PM	SiCl4 pre valve closed
3/30/2012	2:42:32 PM	SiCl4 post valve closed
3/30/2012	2:42:32 PM	Bypass valve closed
3/30/2012	2:42:32 PM	Bubbler valve closed
3/30/2012	2:42:32 PM	Helium valve opened
3/30/2012	2:42:32 PM	Main Vac valve opened
3/30/2012	2:42:32 PM	Helium MFC set to  20.000000
3/30/2012	2:42:32 PM	H2 MFC set to  0.000000
3/30/2012	2:42:32 PM	BCl3 MFC set to  0.000000
3/30/2012	2:42:32 PM	PH3 MFC set to  0.000000
3/30/2012	2:42:32 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:42:32 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:42:32 PM	Tube furnace set to 150
3/30/2012	2:43:02 PM	Helium valve closed
3/30/2012	2:43:02 PM	H2 valve closed
3/30/2012	2:43:02 PM	BCl3 valve closed
3/30/2012	2:43:02 PM	PH3 valve closed
3/30/2012	2:43:02 PM	SiCl4 pre valve closed
3/30/2012	2:43:02 PM	SiCl4 post valve closed
3/30/2012	2:43:02 PM	Bypass valve closed
3/30/2012	2:43:02 PM	Bubbler valve closed
3/30/2012	2:43:02 PM	Main Vac valve opened
3/30/2012	2:43:02 PM	Helium MFC set to  0.000000
3/30/2012	2:43:02 PM	H2 MFC set to  0.000000
3/30/2012	2:43:02 PM	BCl3 MFC set to  0.000000
3/30/2012	2:43:02 PM	PH3 MFC set to  0.000000
3/30/2012	2:43:02 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:43:02 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:43:02 PM	Tube furnace set to 150
3/30/2012	2:43:03 PM	Run finished at 2:43 PM
3/30/2012	2:46:10 PM	Recipe started at 2:46 PM
3/30/2012	2:46:10 PM	Helium valve closed
3/30/2012	2:46:10 PM	H2 valve closed
3/30/2012	2:46:10 PM	BCl3 valve closed
3/30/2012	2:46:10 PM	PH3 valve closed
3/30/2012	2:46:10 PM	SiCl4 pre valve closed
3/30/2012	2:46:10 PM	SiCl4 post valve closed
3/30/2012	2:46:10 PM	Bypass valve closed
3/30/2012	2:46:10 PM	Bubbler valve closed
3/30/2012	2:46:10 PM	Main Vac valve opened
3/30/2012	2:46:10 PM	Helium MFC set to  0.000000
3/30/2012	2:46:10 PM	H2 MFC set to  0.000000
3/30/2012	2:46:10 PM	BCl3 MFC set to  0.000000
3/30/2012	2:46:10 PM	PH3 MFC set to  0.000000
3/30/2012	2:46:10 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:46:10 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:46:10 PM	Tube furnace set to 150
3/30/2012	2:46:40 PM	H2 valve closed
3/30/2012	2:46:40 PM	BCl3 valve closed
3/30/2012	2:46:40 PM	PH3 valve closed
3/30/2012	2:46:40 PM	SiCl4 pre valve closed
3/30/2012	2:46:40 PM	SiCl4 post valve closed
3/30/2012	2:46:40 PM	Bypass valve closed
3/30/2012	2:46:40 PM	Bubbler valve closed
3/30/2012	2:46:40 PM	Helium valve opened
3/30/2012	2:46:40 PM	Main Vac valve opened
3/30/2012	2:46:40 PM	Helium MFC set to  20.000000
3/30/2012	2:46:40 PM	H2 MFC set to  0.000000
3/30/2012	2:46:40 PM	BCl3 MFC set to  0.000000
3/30/2012	2:46:40 PM	PH3 MFC set to  0.000000
3/30/2012	2:46:40 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:46:40 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:46:40 PM	Tube furnace set to 150
3/30/2012	2:47:10 PM	Helium valve closed
3/30/2012	2:47:10 PM	H2 valve closed
3/30/2012	2:47:10 PM	BCl3 valve closed
3/30/2012	2:47:10 PM	PH3 valve closed
3/30/2012	2:47:10 PM	SiCl4 pre valve closed
3/30/2012	2:47:10 PM	SiCl4 post valve closed
3/30/2012	2:47:10 PM	Bypass valve closed
3/30/2012	2:47:10 PM	Bubbler valve closed
3/30/2012	2:47:10 PM	Main Vac valve opened
3/30/2012	2:47:10 PM	Helium MFC set to  0.000000
3/30/2012	2:47:10 PM	H2 MFC set to  0.000000
3/30/2012	2:47:10 PM	BCl3 MFC set to  0.000000
3/30/2012	2:47:10 PM	PH3 MFC set to  0.000000
3/30/2012	2:47:10 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:47:10 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:47:10 PM	Tube furnace set to 150
3/30/2012	2:47:40 PM	H2 valve closed
3/30/2012	2:47:40 PM	BCl3 valve closed
3/30/2012	2:47:40 PM	PH3 valve closed
3/30/2012	2:47:40 PM	SiCl4 pre valve closed
3/30/2012	2:47:40 PM	SiCl4 post valve closed
3/30/2012	2:47:40 PM	Bypass valve closed
3/30/2012	2:47:40 PM	Bubbler valve closed
3/30/2012	2:47:40 PM	Helium valve opened
3/30/2012	2:47:40 PM	Main Vac valve opened
3/30/2012	2:47:40 PM	Helium MFC set to  20.000000
3/30/2012	2:47:40 PM	H2 MFC set to  0.000000
3/30/2012	2:47:40 PM	BCl3 MFC set to  0.000000
3/30/2012	2:47:40 PM	PH3 MFC set to  0.000000
3/30/2012	2:47:40 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:47:40 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:47:40 PM	Tube furnace set to 150
3/30/2012	2:48:11 PM	Helium valve closed
3/30/2012	2:48:11 PM	H2 valve closed
3/30/2012	2:48:11 PM	BCl3 valve closed
3/30/2012	2:48:11 PM	PH3 valve closed
3/30/2012	2:48:11 PM	SiCl4 pre valve closed
3/30/2012	2:48:11 PM	SiCl4 post valve closed
3/30/2012	2:48:11 PM	Bypass valve closed
3/30/2012	2:48:11 PM	Bubbler valve closed
3/30/2012	2:48:11 PM	Main Vac valve opened
3/30/2012	2:48:11 PM	Helium MFC set to  0.000000
3/30/2012	2:48:11 PM	H2 MFC set to  0.000000
3/30/2012	2:48:11 PM	BCl3 MFC set to  0.000000
3/30/2012	2:48:11 PM	PH3 MFC set to  0.000000
3/30/2012	2:48:11 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:48:11 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:48:11 PM	Tube furnace set to 150
3/30/2012	2:48:41 PM	H2 valve closed
3/30/2012	2:48:41 PM	BCl3 valve closed
3/30/2012	2:48:41 PM	PH3 valve closed
3/30/2012	2:48:41 PM	SiCl4 pre valve closed
3/30/2012	2:48:41 PM	SiCl4 post valve closed
3/30/2012	2:48:41 PM	Bypass valve closed
3/30/2012	2:48:41 PM	Bubbler valve closed
3/30/2012	2:48:41 PM	Helium valve opened
3/30/2012	2:48:41 PM	Main Vac valve opened
3/30/2012	2:48:41 PM	Helium MFC set to  20.000000
3/30/2012	2:48:41 PM	H2 MFC set to  0.000000
3/30/2012	2:48:41 PM	BCl3 MFC set to  0.000000
3/30/2012	2:48:41 PM	PH3 MFC set to  0.000000
3/30/2012	2:48:41 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:48:41 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:48:41 PM	Tube furnace set to 150
3/30/2012	2:49:11 PM	Helium valve closed
3/30/2012	2:49:11 PM	H2 valve closed
3/30/2012	2:49:11 PM	BCl3 valve closed
3/30/2012	2:49:11 PM	PH3 valve closed
3/30/2012	2:49:11 PM	SiCl4 pre valve closed
3/30/2012	2:49:11 PM	SiCl4 post valve closed
3/30/2012	2:49:11 PM	Bypass valve closed
3/30/2012	2:49:11 PM	Bubbler valve closed
3/30/2012	2:49:11 PM	Main Vac valve opened
3/30/2012	2:49:11 PM	Helium MFC set to  0.000000
3/30/2012	2:49:11 PM	H2 MFC set to  0.000000
3/30/2012	2:49:11 PM	BCl3 MFC set to  0.000000
3/30/2012	2:49:11 PM	PH3 MFC set to  0.000000
3/30/2012	2:49:11 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:49:11 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:49:11 PM	Tube furnace set to 150
3/30/2012	2:49:41 PM	H2 valve closed
3/30/2012	2:49:41 PM	BCl3 valve closed
3/30/2012	2:49:41 PM	PH3 valve closed
3/30/2012	2:49:41 PM	SiCl4 pre valve closed
3/30/2012	2:49:41 PM	SiCl4 post valve closed
3/30/2012	2:49:41 PM	Bypass valve closed
3/30/2012	2:49:41 PM	Bubbler valve closed
3/30/2012	2:49:41 PM	Helium valve opened
3/30/2012	2:49:41 PM	Main Vac valve opened
3/30/2012	2:49:41 PM	Helium MFC set to  20.000000
3/30/2012	2:49:41 PM	H2 MFC set to  0.000000
3/30/2012	2:49:41 PM	BCl3 MFC set to  0.000000
3/30/2012	2:49:41 PM	PH3 MFC set to  0.000000
3/30/2012	2:49:41 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:49:41 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:49:41 PM	Tube furnace set to 150
3/30/2012	2:50:11 PM	Helium valve closed
3/30/2012	2:50:11 PM	H2 valve closed
3/30/2012	2:50:11 PM	BCl3 valve closed
3/30/2012	2:50:11 PM	PH3 valve closed
3/30/2012	2:50:11 PM	SiCl4 pre valve closed
3/30/2012	2:50:11 PM	SiCl4 post valve closed
3/30/2012	2:50:11 PM	Bypass valve closed
3/30/2012	2:50:11 PM	Bubbler valve closed
3/30/2012	2:50:11 PM	Main Vac valve opened
3/30/2012	2:50:11 PM	Helium MFC set to  0.000000
3/30/2012	2:50:12 PM	H2 MFC set to  0.000000
3/30/2012	2:50:12 PM	BCl3 MFC set to  0.000000
3/30/2012	2:50:12 PM	PH3 MFC set to  0.000000
3/30/2012	2:50:12 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:50:12 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:50:12 PM	Tube furnace set to 150
3/30/2012	2:50:42 PM	H2 valve closed
3/30/2012	2:50:42 PM	BCl3 valve closed
3/30/2012	2:50:42 PM	PH3 valve closed
3/30/2012	2:50:42 PM	SiCl4 pre valve closed
3/30/2012	2:50:42 PM	SiCl4 post valve closed
3/30/2012	2:50:42 PM	Bypass valve closed
3/30/2012	2:50:42 PM	Bubbler valve closed
3/30/2012	2:50:42 PM	Helium valve opened
3/30/2012	2:50:42 PM	Main Vac valve opened
3/30/2012	2:50:42 PM	Helium MFC set to  20.000000
3/30/2012	2:50:42 PM	H2 MFC set to  0.000000
3/30/2012	2:50:42 PM	BCl3 MFC set to  0.000000
3/30/2012	2:50:42 PM	PH3 MFC set to  0.000000
3/30/2012	2:50:42 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:50:42 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:50:42 PM	Tube furnace set to 150
3/30/2012	2:51:12 PM	Helium valve closed
3/30/2012	2:51:12 PM	H2 valve closed
3/30/2012	2:51:12 PM	BCl3 valve closed
3/30/2012	2:51:12 PM	PH3 valve closed
3/30/2012	2:51:12 PM	SiCl4 pre valve closed
3/30/2012	2:51:12 PM	SiCl4 post valve closed
3/30/2012	2:51:12 PM	Bypass valve closed
3/30/2012	2:51:12 PM	Bubbler valve closed
3/30/2012	2:51:12 PM	Main Vac valve opened
3/30/2012	2:51:12 PM	Helium MFC set to  0.000000
3/30/2012	2:51:12 PM	H2 MFC set to  0.000000
3/30/2012	2:51:12 PM	BCl3 MFC set to  0.000000
3/30/2012	2:51:12 PM	PH3 MFC set to  0.000000
3/30/2012	2:51:12 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:51:12 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:51:12 PM	Tube furnace set to 150
3/30/2012	2:51:42 PM	H2 valve closed
3/30/2012	2:51:42 PM	BCl3 valve closed
3/30/2012	2:51:42 PM	PH3 valve closed
3/30/2012	2:51:42 PM	SiCl4 pre valve closed
3/30/2012	2:51:42 PM	SiCl4 post valve closed
3/30/2012	2:51:42 PM	Bypass valve closed
3/30/2012	2:51:42 PM	Bubbler valve closed
3/30/2012	2:51:42 PM	Helium valve opened
3/30/2012	2:51:42 PM	Main Vac valve opened
3/30/2012	2:51:42 PM	Helium MFC set to  20.000000
3/30/2012	2:51:42 PM	H2 MFC set to  0.000000
3/30/2012	2:51:42 PM	BCl3 MFC set to  0.000000
3/30/2012	2:51:42 PM	PH3 MFC set to  0.000000
3/30/2012	2:51:42 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:51:42 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:51:42 PM	Tube furnace set to 150
3/30/2012	2:52:12 PM	Helium valve closed
3/30/2012	2:52:12 PM	H2 valve closed
3/30/2012	2:52:12 PM	BCl3 valve closed
3/30/2012	2:52:12 PM	PH3 valve closed
3/30/2012	2:52:12 PM	SiCl4 pre valve closed
3/30/2012	2:52:12 PM	SiCl4 post valve closed
3/30/2012	2:52:12 PM	Bypass valve closed
3/30/2012	2:52:12 PM	Bubbler valve closed
3/30/2012	2:52:12 PM	Main Vac valve opened
3/30/2012	2:52:12 PM	Helium MFC set to  0.000000
3/30/2012	2:52:12 PM	H2 MFC set to  0.000000
3/30/2012	2:52:12 PM	BCl3 MFC set to  0.000000
3/30/2012	2:52:12 PM	PH3 MFC set to  0.000000
3/30/2012	2:52:12 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:52:12 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:52:13 PM	Tube furnace set to 150
3/30/2012	2:52:43 PM	H2 valve closed
3/30/2012	2:52:43 PM	BCl3 valve closed
3/30/2012	2:52:43 PM	PH3 valve closed
3/30/2012	2:52:43 PM	SiCl4 pre valve closed
3/30/2012	2:52:43 PM	SiCl4 post valve closed
3/30/2012	2:52:43 PM	Bypass valve closed
3/30/2012	2:52:43 PM	Bubbler valve closed
3/30/2012	2:52:43 PM	Helium valve opened
3/30/2012	2:52:43 PM	Main Vac valve opened
3/30/2012	2:52:43 PM	Helium MFC set to  20.000000
3/30/2012	2:52:43 PM	H2 MFC set to  0.000000
3/30/2012	2:52:43 PM	BCl3 MFC set to  0.000000
3/30/2012	2:52:43 PM	PH3 MFC set to  0.000000
3/30/2012	2:52:43 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:52:43 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:52:43 PM	Tube furnace set to 150
3/30/2012	2:53:13 PM	Helium valve closed
3/30/2012	2:53:13 PM	H2 valve closed
3/30/2012	2:53:13 PM	BCl3 valve closed
3/30/2012	2:53:13 PM	PH3 valve closed
3/30/2012	2:53:13 PM	SiCl4 pre valve closed
3/30/2012	2:53:13 PM	SiCl4 post valve closed
3/30/2012	2:53:13 PM	Bypass valve closed
3/30/2012	2:53:13 PM	Bubbler valve closed
3/30/2012	2:53:13 PM	Main Vac valve opened
3/30/2012	2:53:13 PM	Helium MFC set to  0.000000
3/30/2012	2:53:13 PM	H2 MFC set to  0.000000
3/30/2012	2:53:13 PM	BCl3 MFC set to  0.000000
3/30/2012	2:53:13 PM	PH3 MFC set to  0.000000
3/30/2012	2:53:13 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:53:13 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:53:13 PM	Tube furnace set to 150
3/30/2012	2:53:43 PM	H2 valve closed
3/30/2012	2:53:43 PM	BCl3 valve closed
3/30/2012	2:53:43 PM	PH3 valve closed
3/30/2012	2:53:43 PM	SiCl4 pre valve closed
3/30/2012	2:53:43 PM	SiCl4 post valve closed
3/30/2012	2:53:43 PM	Bypass valve closed
3/30/2012	2:53:43 PM	Bubbler valve closed
3/30/2012	2:53:43 PM	Helium valve opened
3/30/2012	2:53:43 PM	Main Vac valve opened
3/30/2012	2:53:43 PM	Helium MFC set to  20.000000
3/30/2012	2:53:43 PM	H2 MFC set to  0.000000
3/30/2012	2:53:43 PM	BCl3 MFC set to  0.000000
3/30/2012	2:53:43 PM	PH3 MFC set to  0.000000
3/30/2012	2:53:43 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:53:43 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:53:43 PM	Tube furnace set to 150
3/30/2012	2:54:13 PM	Helium valve closed
3/30/2012	2:54:13 PM	H2 valve closed
3/30/2012	2:54:13 PM	BCl3 valve closed
3/30/2012	2:54:13 PM	PH3 valve closed
3/30/2012	2:54:13 PM	SiCl4 pre valve closed
3/30/2012	2:54:13 PM	SiCl4 post valve closed
3/30/2012	2:54:13 PM	Bypass valve closed
3/30/2012	2:54:13 PM	Bubbler valve closed
3/30/2012	2:54:13 PM	Main Vac valve opened
3/30/2012	2:54:13 PM	Helium MFC set to  0.000000
3/30/2012	2:54:13 PM	H2 MFC set to  0.000000
3/30/2012	2:54:13 PM	BCl3 MFC set to  0.000000
3/30/2012	2:54:13 PM	PH3 MFC set to  0.000000
3/30/2012	2:54:13 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:54:13 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:54:14 PM	Tube furnace set to 150
3/30/2012	2:54:44 PM	H2 valve closed
3/30/2012	2:54:44 PM	BCl3 valve closed
3/30/2012	2:54:44 PM	PH3 valve closed
3/30/2012	2:54:44 PM	SiCl4 pre valve closed
3/30/2012	2:54:44 PM	SiCl4 post valve closed
3/30/2012	2:54:44 PM	Bypass valve closed
3/30/2012	2:54:44 PM	Bubbler valve closed
3/30/2012	2:54:44 PM	Helium valve opened
3/30/2012	2:54:44 PM	Main Vac valve opened
3/30/2012	2:54:44 PM	Helium MFC set to  20.000000
3/30/2012	2:54:44 PM	H2 MFC set to  0.000000
3/30/2012	2:54:44 PM	BCl3 MFC set to  0.000000
3/30/2012	2:54:44 PM	PH3 MFC set to  0.000000
3/30/2012	2:54:44 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:54:44 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:54:44 PM	Tube furnace set to 150
3/30/2012	2:55:14 PM	Helium valve closed
3/30/2012	2:55:14 PM	H2 valve closed
3/30/2012	2:55:14 PM	BCl3 valve closed
3/30/2012	2:55:14 PM	PH3 valve closed
3/30/2012	2:55:14 PM	SiCl4 pre valve closed
3/30/2012	2:55:14 PM	SiCl4 post valve closed
3/30/2012	2:55:14 PM	Bypass valve closed
3/30/2012	2:55:14 PM	Bubbler valve closed
3/30/2012	2:55:14 PM	Main Vac valve opened
3/30/2012	2:55:14 PM	Helium MFC set to  0.000000
3/30/2012	2:55:14 PM	H2 MFC set to  0.000000
3/30/2012	2:55:14 PM	BCl3 MFC set to  0.000000
3/30/2012	2:55:14 PM	PH3 MFC set to  0.000000
3/30/2012	2:55:14 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:55:14 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:55:14 PM	Tube furnace set to 150
3/30/2012	2:55:44 PM	H2 valve closed
3/30/2012	2:55:44 PM	BCl3 valve closed
3/30/2012	2:55:44 PM	PH3 valve closed
3/30/2012	2:55:44 PM	SiCl4 pre valve closed
3/30/2012	2:55:44 PM	SiCl4 post valve closed
3/30/2012	2:55:44 PM	Bypass valve closed
3/30/2012	2:55:44 PM	Bubbler valve closed
3/30/2012	2:55:44 PM	Helium valve opened
3/30/2012	2:55:44 PM	Main Vac valve opened
3/30/2012	2:55:44 PM	Helium MFC set to  20.000000
3/30/2012	2:55:44 PM	H2 MFC set to  0.000000
3/30/2012	2:55:44 PM	BCl3 MFC set to  0.000000
3/30/2012	2:55:44 PM	PH3 MFC set to  0.000000
3/30/2012	2:55:44 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:55:44 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:55:44 PM	Tube furnace set to 150
3/30/2012	2:56:14 PM	Helium valve closed
3/30/2012	2:56:14 PM	H2 valve closed
3/30/2012	2:56:14 PM	BCl3 valve closed
3/30/2012	2:56:14 PM	PH3 valve closed
3/30/2012	2:56:14 PM	SiCl4 pre valve closed
3/30/2012	2:56:14 PM	SiCl4 post valve closed
3/30/2012	2:56:14 PM	Bypass valve closed
3/30/2012	2:56:14 PM	Bubbler valve closed
3/30/2012	2:56:14 PM	Main Vac valve opened
3/30/2012	2:56:14 PM	Helium MFC set to  0.000000
3/30/2012	2:56:14 PM	H2 MFC set to  0.000000
3/30/2012	2:56:14 PM	BCl3 MFC set to  0.000000
3/30/2012	2:56:14 PM	PH3 MFC set to  0.000000
3/30/2012	2:56:14 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:56:14 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:56:15 PM	Tube furnace set to 150
3/30/2012	2:56:16 PM	Run finished at 2:56 PM
3/30/2012	2:57:05 PM	Main Vac valve closed
3/30/2012	2:57:18 PM	Main Vac valve opened
3/30/2012	2:58:10 PM	Recipe started at 2:58 PM
3/30/2012	2:58:10 PM	Helium valve closed
3/30/2012	2:58:10 PM	H2 valve closed
3/30/2012	2:58:10 PM	BCl3 valve closed
3/30/2012	2:58:10 PM	PH3 valve closed
3/30/2012	2:58:10 PM	SiCl4 pre valve closed
3/30/2012	2:58:10 PM	SiCl4 post valve closed
3/30/2012	2:58:10 PM	Main Vac valve closed
3/30/2012	2:58:10 PM	Bypass valve closed
3/30/2012	2:58:10 PM	Bubbler valve closed
3/30/2012	2:58:10 PM	Helium MFC set to  0.000000
3/30/2012	2:58:10 PM	H2 MFC set to  0.000000
3/30/2012	2:58:10 PM	BCl3 MFC set to  0.000000
3/30/2012	2:58:10 PM	PH3 MFC set to  0.000000
3/30/2012	2:58:10 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:58:10 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:58:10 PM	Tube furnace set to 0
3/30/2012	2:58:13 PM	Helium valve closed
3/30/2012	2:58:13 PM	BCl3 valve closed
3/30/2012	2:58:13 PM	PH3 valve closed
3/30/2012	2:58:13 PM	SiCl4 pre valve closed
3/30/2012	2:58:13 PM	SiCl4 post valve closed
3/30/2012	2:58:13 PM	Main Vac valve closed
3/30/2012	2:58:13 PM	Bypass valve closed
3/30/2012	2:58:13 PM	Bubbler valve closed
3/30/2012	2:58:13 PM	H2 valve opened
3/30/2012	2:58:14 PM	Helium MFC set to  0.000000
3/30/2012	2:58:14 PM	H2 MFC set to  500.000000
3/30/2012	2:58:14 PM	BCl3 MFC set to  0.000000
3/30/2012	2:58:14 PM	PH3 MFC set to  0.000000
3/30/2012	2:58:14 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:58:14 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:58:14 PM	Tube furnace set to 0
3/30/2012	2:59:17 PM	Helium valve closed
3/30/2012	2:59:17 PM	BCl3 valve closed
3/30/2012	2:59:17 PM	PH3 valve closed
3/30/2012	2:59:17 PM	SiCl4 pre valve closed
3/30/2012	2:59:17 PM	SiCl4 post valve closed
3/30/2012	2:59:17 PM	Main Vac valve closed
3/30/2012	2:59:17 PM	Bypass valve closed
3/30/2012	2:59:17 PM	H2 valve opened
3/30/2012	2:59:17 PM	Bubbler valve opened
3/30/2012	2:59:17 PM	Helium MFC set to  0.000000
3/30/2012	2:59:17 PM	H2 MFC set to  500.000000
3/30/2012	2:59:17 PM	BCl3 MFC set to  0.000000
3/30/2012	2:59:17 PM	PH3 MFC set to  0.000000
3/30/2012	2:59:18 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:59:18 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:59:18 PM	Tube furnace set to 0
3/30/2012	2:59:19 PM	Helium valve closed
3/30/2012	2:59:19 PM	BCl3 valve closed
3/30/2012	2:59:19 PM	PH3 valve closed
3/30/2012	2:59:19 PM	SiCl4 pre valve closed
3/30/2012	2:59:19 PM	SiCl4 post valve closed
3/30/2012	2:59:19 PM	Main Vac valve closed
3/30/2012	2:59:19 PM	Bypass valve closed
3/30/2012	2:59:19 PM	H2 valve opened
3/30/2012	2:59:19 PM	Bubbler valve opened
3/30/2012	2:59:19 PM	Helium MFC set to  0.000000
3/30/2012	2:59:19 PM	H2 MFC set to  450.000000
3/30/2012	2:59:19 PM	BCl3 MFC set to  0.000000
3/30/2012	2:59:19 PM	PH3 MFC set to  0.000000
3/30/2012	2:59:19 PM	SiCl4 MFC set to  0.000000
3/30/2012	2:59:19 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	2:59:19 PM	Tube furnace set to 1000
3/30/2012	3:24:19 PM	Helium valve closed
3/30/2012	3:24:19 PM	PH3 valve closed
3/30/2012	3:24:19 PM	Main Vac valve closed
3/30/2012	3:24:19 PM	Bypass valve closed
3/30/2012	3:24:19 PM	H2 valve opened
3/30/2012	3:24:19 PM	BCl3 valve opened
3/30/2012	3:24:19 PM	SiCl4 pre valve opened
3/30/2012	3:24:19 PM	SiCl4 post valve opened
3/30/2012	3:24:19 PM	Bubbler valve opened
3/30/2012	3:24:19 PM	Helium MFC set to  0.000000
3/30/2012	3:24:19 PM	H2 MFC set to  450.000000
3/30/2012	3:24:19 PM	BCl3 MFC set to  1.500000
3/30/2012	3:24:19 PM	PH3 MFC set to  0.000000
3/30/2012	3:24:19 PM	SiCl4 MFC set to  50.000000
3/30/2012	3:24:19 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	3:24:19 PM	Tube furnace set to 1000
3/30/2012	3:29:19 PM	Helium valve closed
3/30/2012	3:29:19 PM	BCl3 valve closed
3/30/2012	3:29:19 PM	PH3 valve closed
3/30/2012	3:29:19 PM	SiCl4 pre valve closed
3/30/2012	3:29:19 PM	SiCl4 post valve closed
3/30/2012	3:29:19 PM	Main Vac valve closed
3/30/2012	3:29:19 PM	Bypass valve closed
3/30/2012	3:29:19 PM	H2 valve opened
3/30/2012	3:29:19 PM	Bubbler valve opened
3/30/2012	3:29:19 PM	Helium MFC set to  0.000000
3/30/2012	3:29:19 PM	H2 MFC set to  500.000000
3/30/2012	3:29:19 PM	BCl3 MFC set to  0.000000
3/30/2012	3:29:19 PM	PH3 MFC set to  0.000000
3/30/2012	3:29:19 PM	SiCl4 MFC set to  0.000000
3/30/2012	3:29:19 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	3:29:19 PM	Tube furnace set to 750
3/30/2012	3:34:19 PM	H2 valve closed
3/30/2012	3:34:19 PM	BCl3 valve closed
3/30/2012	3:34:19 PM	PH3 valve closed
3/30/2012	3:34:19 PM	SiCl4 pre valve closed
3/30/2012	3:34:19 PM	SiCl4 post valve closed
3/30/2012	3:34:19 PM	Main Vac valve closed
3/30/2012	3:34:19 PM	Bypass valve closed
3/30/2012	3:34:19 PM	Helium valve opened
3/30/2012	3:34:19 PM	Bubbler valve opened
3/30/2012	3:34:19 PM	Helium MFC set to  500.000000
3/30/2012	3:34:19 PM	H2 MFC set to  0.000000
3/30/2012	3:34:19 PM	BCl3 MFC set to  0.000000
3/30/2012	3:34:19 PM	PH3 MFC set to  0.000000
3/30/2012	3:34:19 PM	SiCl4 MFC set to  0.000000
3/30/2012	3:34:19 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	3:34:20 PM	Tube furnace set to 0
3/30/2012	3:46:07 PM	Helium valve closed
3/30/2012	3:46:07 PM	H2 valve closed
3/30/2012	3:46:07 PM	BCl3 valve closed
3/30/2012	3:46:07 PM	PH3 valve closed
3/30/2012	3:46:07 PM	SiCl4 pre valve closed
3/30/2012	3:46:07 PM	SiCl4 post valve closed
3/30/2012	3:46:07 PM	Main Vac valve closed
3/30/2012	3:46:07 PM	Bypass valve closed
3/30/2012	3:46:07 PM	Bubbler valve closed
3/30/2012	3:46:07 PM	Helium MFC set to  0.000000
3/30/2012	3:46:07 PM	H2 MFC set to  0.000000
3/30/2012	3:46:07 PM	BCl3 MFC set to  0.000000
3/30/2012	3:46:07 PM	PH3 MFC set to  0.000000
3/30/2012	3:46:07 PM	SiCl4 MFC set to  0.000000
3/30/2012	3:46:07 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	3:46:07 PM	Tube furnace set to 0
3/30/2012	3:46:08 PM	Run finished at 3:46 PM
3/30/2012	3:46:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/30/2012	3:46:12 PM	Recipe started at 3:46 PM
3/30/2012	3:46:12 PM	Helium valve closed
3/30/2012	3:46:12 PM	H2 valve closed
3/30/2012	3:46:12 PM	BCl3 valve closed
3/30/2012	3:46:12 PM	PH3 valve closed
3/30/2012	3:46:12 PM	SiCl4 pre valve closed
3/30/2012	3:46:12 PM	SiCl4 post valve closed
3/30/2012	3:46:12 PM	Main Vac valve closed
3/30/2012	3:46:12 PM	Bypass valve closed
3/30/2012	3:46:12 PM	Bubbler valve closed
3/30/2012	3:46:12 PM	Helium MFC set to  0.000000
3/30/2012	3:46:12 PM	H2 MFC set to  0.000000
3/30/2012	3:46:12 PM	BCl3 MFC set to  0.000000
3/30/2012	3:46:12 PM	PH3 MFC set to  0.000000
3/30/2012	3:46:12 PM	SiCl4 MFC set to  0.000000
3/30/2012	3:46:12 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	3:46:12 PM	Tube furnace set to 0
3/30/2012	3:46:15 PM	H2 valve closed
3/30/2012	3:46:15 PM	BCl3 valve closed
3/30/2012	3:46:15 PM	PH3 valve closed
3/30/2012	3:46:15 PM	SiCl4 pre valve closed
3/30/2012	3:46:15 PM	SiCl4 post valve closed
3/30/2012	3:46:15 PM	Main Vac valve closed
3/30/2012	3:46:15 PM	Bypass valve closed
3/30/2012	3:46:15 PM	Bubbler valve closed
3/30/2012	3:46:15 PM	Helium valve opened
3/30/2012	3:46:15 PM	Helium MFC set to  500.000000
3/30/2012	3:46:15 PM	H2 MFC set to  0.000000
3/30/2012	3:46:15 PM	BCl3 MFC set to  0.000000
3/30/2012	3:46:15 PM	PH3 MFC set to  0.000000
3/30/2012	3:46:15 PM	SiCl4 MFC set to  0.000000
3/30/2012	3:46:15 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	3:46:16 PM	Tube furnace set to 0
3/30/2012	3:46:16 PM	Helium valve closed
3/30/2012	3:46:16 PM	H2 valve closed
3/30/2012	3:46:16 PM	BCl3 valve closed
3/30/2012	3:46:16 PM	PH3 valve closed
3/30/2012	3:46:16 PM	SiCl4 pre valve closed
3/30/2012	3:46:16 PM	SiCl4 post valve closed
3/30/2012	3:46:16 PM	Main Vac valve closed
3/30/2012	3:46:16 PM	Bypass valve closed
3/30/2012	3:46:16 PM	Bubbler valve closed
3/30/2012	3:46:16 PM	Helium MFC set to  0.000000
3/30/2012	3:46:16 PM	H2 MFC set to  0.000000
3/30/2012	3:46:16 PM	BCl3 MFC set to  0.000000
3/30/2012	3:46:16 PM	PH3 MFC set to  0.000000
3/30/2012	3:46:16 PM	SiCl4 MFC set to  0.000000
3/30/2012	3:46:16 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	3:46:16 PM	Tube furnace set to 0
3/30/2012	3:46:17 PM	Run finished at 3:46 PM
3/30/2012	3:46:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/30/2012	3:51:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2012	3:51:58 PM	Recipe started at 3:51 PM
3/30/2012	3:51:58 PM	Helium valve closed
3/30/2012	3:51:58 PM	H2 valve closed
3/30/2012	3:51:58 PM	BCl3 valve closed
3/30/2012	3:51:58 PM	PH3 valve closed
3/30/2012	3:51:58 PM	SiCl4 pre valve closed
3/30/2012	3:51:58 PM	SiCl4 post valve closed
3/30/2012	3:51:58 PM	Main Vac valve closed
3/30/2012	3:51:58 PM	Bubbler valve closed
3/30/2012	3:51:58 PM	Bypass valve opened
3/30/2012	3:51:58 PM	Helium MFC set to  0.000000
3/30/2012	3:51:58 PM	H2 MFC set to  0.000000
3/30/2012	3:51:58 PM	BCl3 MFC set to  0.000000
3/30/2012	3:51:58 PM	PH3 MFC set to  0.000000
3/30/2012	3:51:58 PM	SiCl4 MFC set to  0.000000
3/30/2012	3:51:58 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	3:51:58 PM	Tube furnace set to 0
3/30/2012	3:52:57 PM	Helium valve closed
3/30/2012	3:52:57 PM	H2 valve closed
3/30/2012	3:52:57 PM	BCl3 valve closed
3/30/2012	3:52:57 PM	PH3 valve closed
3/30/2012	3:52:57 PM	SiCl4 pre valve closed
3/30/2012	3:52:57 PM	SiCl4 post valve closed
3/30/2012	3:52:57 PM	Main Vac valve closed
3/30/2012	3:52:57 PM	Bubbler valve closed
3/30/2012	3:52:57 PM	Bypass valve opened
3/30/2012	3:52:57 PM	Helium MFC set to  0.000000
3/30/2012	3:52:57 PM	H2 MFC set to  0.000000
3/30/2012	3:52:57 PM	BCl3 MFC set to  0.000000
3/30/2012	3:52:57 PM	PH3 MFC set to  0.000000
3/30/2012	3:52:57 PM	SiCl4 MFC set to  0.000000
3/30/2012	3:52:57 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	3:52:57 PM	Tube furnace set to 0
3/30/2012	3:53:57 PM	Helium valve closed
3/30/2012	3:53:57 PM	H2 valve closed
3/30/2012	3:53:57 PM	BCl3 valve closed
3/30/2012	3:53:57 PM	PH3 valve closed
3/30/2012	3:53:57 PM	SiCl4 pre valve closed
3/30/2012	3:53:57 PM	SiCl4 post valve closed
3/30/2012	3:53:57 PM	Bypass valve closed
3/30/2012	3:53:57 PM	Bubbler valve closed
3/30/2012	3:53:57 PM	Main Vac valve opened
3/30/2012	3:53:57 PM	Helium MFC set to  0.000000
3/30/2012	3:53:57 PM	H2 MFC set to  0.000000
3/30/2012	3:53:57 PM	BCl3 MFC set to  0.000000
3/30/2012	3:53:57 PM	PH3 MFC set to  0.000000
3/30/2012	3:53:57 PM	SiCl4 MFC set to  0.000000
3/30/2012	3:53:57 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	3:53:57 PM	Tube furnace set to 0
3/30/2012	3:53:58 PM	Run finished at 3:53 PM
3/30/2012	3:53:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2012	4:23:12 PM	Recipe started at 4:23 PM
3/30/2012	4:23:12 PM	Helium valve closed
3/30/2012	4:23:12 PM	H2 valve closed
3/30/2012	4:23:12 PM	BCl3 valve closed
3/30/2012	4:23:12 PM	PH3 valve closed
3/30/2012	4:23:12 PM	SiCl4 pre valve closed
3/30/2012	4:23:12 PM	SiCl4 post valve closed
3/30/2012	4:23:12 PM	Bypass valve closed
3/30/2012	4:23:12 PM	Bubbler valve closed
3/30/2012	4:23:12 PM	Main Vac valve opened
3/30/2012	4:23:12 PM	Helium MFC set to  0.000000
3/30/2012	4:23:12 PM	H2 MFC set to  0.000000
3/30/2012	4:23:12 PM	BCl3 MFC set to  0.000000
3/30/2012	4:23:12 PM	PH3 MFC set to  0.000000
3/30/2012	4:23:12 PM	SiCl4 MFC set to  0.000000
3/30/2012	4:23:12 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	4:23:12 PM	Tube furnace set to 150
3/30/2012	4:23:42 PM	H2 valve closed
3/30/2012	4:23:42 PM	BCl3 valve closed
3/30/2012	4:23:42 PM	PH3 valve closed
3/30/2012	4:23:42 PM	SiCl4 pre valve closed
3/30/2012	4:23:42 PM	SiCl4 post valve closed
3/30/2012	4:23:42 PM	Bypass valve closed
3/30/2012	4:23:42 PM	Bubbler valve closed
3/30/2012	4:23:42 PM	Helium valve opened
3/30/2012	4:23:42 PM	Main Vac valve opened
3/30/2012	4:23:42 PM	Helium MFC set to  20.000000
3/30/2012	4:23:42 PM	H2 MFC set to  0.000000
3/30/2012	4:23:42 PM	BCl3 MFC set to  0.000000
3/30/2012	4:23:42 PM	PH3 MFC set to  0.000000
3/30/2012	4:23:42 PM	SiCl4 MFC set to  0.000000
3/30/2012	4:23:42 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	4:23:42 PM	Tube furnace set to 150
3/30/2012	4:24:12 PM	Helium valve closed
3/30/2012	4:24:12 PM	H2 valve closed
3/30/2012	4:24:12 PM	BCl3 valve closed
3/30/2012	4:24:12 PM	PH3 valve closed
3/30/2012	4:24:12 PM	SiCl4 pre valve closed
3/30/2012	4:24:12 PM	SiCl4 post valve closed
3/30/2012	4:24:12 PM	Bypass valve closed
3/30/2012	4:24:12 PM	Bubbler valve closed
3/30/2012	4:24:12 PM	Main Vac valve opened
3/30/2012	4:24:12 PM	Helium MFC set to  0.000000
3/30/2012	4:24:12 PM	H2 MFC set to  0.000000
3/30/2012	4:24:12 PM	BCl3 MFC set to  0.000000
3/30/2012	4:24:12 PM	PH3 MFC set to  0.000000
3/30/2012	4:24:12 PM	SiCl4 MFC set to  0.000000
3/30/2012	4:24:12 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	4:24:13 PM	Tube furnace set to 150
3/30/2012	4:24:43 PM	H2 valve closed
3/30/2012	4:24:43 PM	BCl3 valve closed
3/30/2012	4:24:43 PM	PH3 valve closed
3/30/2012	4:24:43 PM	SiCl4 pre valve closed
3/30/2012	4:24:43 PM	SiCl4 post valve closed
3/30/2012	4:24:43 PM	Bypass valve closed
3/30/2012	4:24:43 PM	Bubbler valve closed
3/30/2012	4:24:43 PM	Helium valve opened
3/30/2012	4:24:43 PM	Main Vac valve opened
3/30/2012	4:24:43 PM	Helium MFC set to  20.000000
3/30/2012	4:24:43 PM	H2 MFC set to  0.000000
3/30/2012	4:24:43 PM	BCl3 MFC set to  0.000000
3/30/2012	4:24:43 PM	PH3 MFC set to  0.000000
3/30/2012	4:24:43 PM	SiCl4 MFC set to  0.000000
3/30/2012	4:24:43 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	4:24:43 PM	Tube furnace set to 150
3/30/2012	4:25:13 PM	Helium valve closed
3/30/2012	4:25:13 PM	H2 valve closed
3/30/2012	4:25:13 PM	BCl3 valve closed
3/30/2012	4:25:13 PM	PH3 valve closed
3/30/2012	4:25:13 PM	SiCl4 pre valve closed
3/30/2012	4:25:13 PM	SiCl4 post valve closed
3/30/2012	4:25:13 PM	Bypass valve closed
3/30/2012	4:25:13 PM	Bubbler valve closed
3/30/2012	4:25:13 PM	Main Vac valve opened
3/30/2012	4:25:13 PM	Helium MFC set to  0.000000
3/30/2012	4:25:13 PM	H2 MFC set to  0.000000
3/30/2012	4:25:13 PM	BCl3 MFC set to  0.000000
3/30/2012	4:25:13 PM	PH3 MFC set to  0.000000
3/30/2012	4:25:13 PM	SiCl4 MFC set to  0.000000
3/30/2012	4:25:13 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	4:25:13 PM	Tube furnace set to 150
3/30/2012	4:25:43 PM	H2 valve closed
3/30/2012	4:25:43 PM	BCl3 valve closed
3/30/2012	4:25:43 PM	PH3 valve closed
3/30/2012	4:25:43 PM	SiCl4 pre valve closed
3/30/2012	4:25:43 PM	SiCl4 post valve closed
3/30/2012	4:25:43 PM	Bypass valve closed
3/30/2012	4:25:43 PM	Bubbler valve closed
3/30/2012	4:25:43 PM	Helium valve opened
3/30/2012	4:25:43 PM	Main Vac valve opened
3/30/2012	4:25:43 PM	Helium MFC set to  20.000000
3/30/2012	4:25:43 PM	H2 MFC set to  0.000000
3/30/2012	4:25:43 PM	BCl3 MFC set to  0.000000
3/30/2012	4:25:43 PM	PH3 MFC set to  0.000000
3/30/2012	4:25:43 PM	SiCl4 MFC set to  0.000000
3/30/2012	4:25:43 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	4:25:43 PM	Tube furnace set to 150
3/30/2012	4:26:13 PM	Helium valve closed
3/30/2012	4:26:13 PM	H2 valve closed
3/30/2012	4:26:13 PM	BCl3 valve closed
3/30/2012	4:26:13 PM	PH3 valve closed
3/30/2012	4:26:13 PM	SiCl4 pre valve closed
3/30/2012	4:26:13 PM	SiCl4 post valve closed
3/30/2012	4:26:13 PM	Bypass valve closed
3/30/2012	4:26:13 PM	Bubbler valve closed
3/30/2012	4:26:13 PM	Main Vac valve opened
3/30/2012	4:26:13 PM	Helium MFC set to  0.000000
3/30/2012	4:26:13 PM	H2 MFC set to  0.000000
3/30/2012	4:26:13 PM	BCl3 MFC set to  0.000000
3/30/2012	4:26:13 PM	PH3 MFC set to  0.000000
3/30/2012	4:26:13 PM	SiCl4 MFC set to  0.000000
3/30/2012	4:26:13 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	4:26:13 PM	Tube furnace set to 150
3/30/2012	4:26:43 PM	H2 valve closed
3/30/2012	4:26:43 PM	BCl3 valve closed
3/30/2012	4:26:43 PM	PH3 valve closed
3/30/2012	4:26:44 PM	SiCl4 pre valve closed
3/30/2012	4:26:44 PM	SiCl4 post valve closed
3/30/2012	4:26:44 PM	Bypass valve closed
3/30/2012	4:26:44 PM	Bubbler valve closed
3/30/2012	4:26:44 PM	Helium valve opened
3/30/2012	4:26:44 PM	Main Vac valve opened
3/30/2012	4:26:44 PM	Helium MFC set to  20.000000
3/30/2012	4:26:44 PM	H2 MFC set to  0.000000
3/30/2012	4:26:44 PM	BCl3 MFC set to  0.000000
3/30/2012	4:26:44 PM	PH3 MFC set to  0.000000
3/30/2012	4:26:44 PM	SiCl4 MFC set to  0.000000
3/30/2012	4:26:44 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	4:26:44 PM	Tube furnace set to 150
3/30/2012	4:27:14 PM	Helium valve closed
3/30/2012	4:27:14 PM	H2 valve closed
3/30/2012	4:27:14 PM	BCl3 valve closed
3/30/2012	4:27:14 PM	PH3 valve closed
3/30/2012	4:27:14 PM	SiCl4 pre valve closed
3/30/2012	4:27:14 PM	SiCl4 post valve closed
3/30/2012	4:27:14 PM	Bypass valve closed
3/30/2012	4:27:14 PM	Bubbler valve closed
3/30/2012	4:27:14 PM	Main Vac valve opened
3/30/2012	4:27:14 PM	Helium MFC set to  0.000000
3/30/2012	4:27:14 PM	H2 MFC set to  0.000000
3/30/2012	4:27:14 PM	BCl3 MFC set to  0.000000
3/30/2012	4:27:14 PM	PH3 MFC set to  0.000000
3/30/2012	4:27:14 PM	SiCl4 MFC set to  0.000000
3/30/2012	4:27:14 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	4:27:14 PM	Tube furnace set to 150
3/30/2012	4:27:44 PM	H2 valve closed
3/30/2012	4:27:44 PM	BCl3 valve closed
3/30/2012	4:27:44 PM	PH3 valve closed
3/30/2012	4:27:44 PM	SiCl4 pre valve closed
3/30/2012	4:27:44 PM	SiCl4 post valve closed
3/30/2012	4:27:44 PM	Bypass valve closed
3/30/2012	4:27:44 PM	Bubbler valve closed
3/30/2012	4:27:44 PM	Helium valve opened
3/30/2012	4:27:44 PM	Main Vac valve opened
3/30/2012	4:27:44 PM	Helium MFC set to  20.000000
3/30/2012	4:27:44 PM	H2 MFC set to  0.000000
3/30/2012	4:27:44 PM	BCl3 MFC set to  0.000000
3/30/2012	4:27:44 PM	PH3 MFC set to  0.000000
3/30/2012	4:27:44 PM	SiCl4 MFC set to  0.000000
3/30/2012	4:27:44 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	4:27:44 PM	Tube furnace set to 150
3/30/2012	4:28:14 PM	Helium valve closed
3/30/2012	4:28:14 PM	H2 valve closed
3/30/2012	4:28:14 PM	BCl3 valve closed
3/30/2012	4:28:14 PM	PH3 valve closed
3/30/2012	4:28:14 PM	SiCl4 pre valve closed
3/30/2012	4:28:14 PM	SiCl4 post valve closed
3/30/2012	4:28:14 PM	Bypass valve closed
3/30/2012	4:28:14 PM	Bubbler valve closed
3/30/2012	4:28:14 PM	Main Vac valve opened
3/30/2012	4:28:14 PM	Helium MFC set to  0.000000
3/30/2012	4:28:14 PM	H2 MFC set to  0.000000
3/30/2012	4:28:14 PM	BCl3 MFC set to  0.000000
3/30/2012	4:28:14 PM	PH3 MFC set to  0.000000
3/30/2012	4:28:14 PM	SiCl4 MFC set to  0.000000
3/30/2012	4:28:14 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	4:28:14 PM	Tube furnace set to 150
3/30/2012	4:28:44 PM	H2 valve closed
3/30/2012	4:28:44 PM	BCl3 valve closed
3/30/2012	4:28:44 PM	PH3 valve closed
3/30/2012	4:28:44 PM	SiCl4 pre valve closed
3/30/2012	4:28:44 PM	SiCl4 post valve closed
3/30/2012	4:28:44 PM	Bypass valve closed
3/30/2012	4:28:44 PM	Bubbler valve closed
3/30/2012	4:28:44 PM	Helium valve opened
3/30/2012	4:28:44 PM	Main Vac valve opened
3/30/2012	4:28:44 PM	Helium MFC set to  20.000000
3/30/2012	4:28:44 PM	H2 MFC set to  0.000000
3/30/2012	4:28:44 PM	BCl3 MFC set to  0.000000
3/30/2012	4:28:44 PM	PH3 MFC set to  0.000000
3/30/2012	4:28:44 PM	SiCl4 MFC set to  0.000000
3/30/2012	4:28:44 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	4:28:45 PM	Tube furnace set to 150
3/30/2012	4:29:15 PM	Helium valve closed
3/30/2012	4:29:15 PM	H2 valve closed
3/30/2012	4:29:15 PM	BCl3 valve closed
3/30/2012	4:29:15 PM	PH3 valve closed
3/30/2012	4:29:15 PM	SiCl4 pre valve closed
3/30/2012	4:29:15 PM	SiCl4 post valve closed
3/30/2012	4:29:15 PM	Bypass valve closed
3/30/2012	4:29:15 PM	Bubbler valve closed
3/30/2012	4:29:15 PM	Main Vac valve opened
3/30/2012	4:29:15 PM	Helium MFC set to  0.000000
3/30/2012	4:29:15 PM	H2 MFC set to  0.000000
3/30/2012	4:29:15 PM	BCl3 MFC set to  0.000000
3/30/2012	4:29:15 PM	PH3 MFC set to  0.000000
3/30/2012	4:29:15 PM	SiCl4 MFC set to  0.000000
3/30/2012	4:29:15 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	4:29:15 PM	Tube furnace set to 150
3/30/2012	4:29:45 PM	H2 valve closed
3/30/2012	4:29:45 PM	BCl3 valve closed
3/30/2012	4:29:45 PM	PH3 valve closed
3/30/2012	4:29:45 PM	SiCl4 pre valve closed
3/30/2012	4:29:45 PM	SiCl4 post valve closed
3/30/2012	4:29:45 PM	Bypass valve closed
3/30/2012	4:29:45 PM	Bubbler valve closed
3/30/2012	4:29:45 PM	Helium valve opened
3/30/2012	4:29:45 PM	Main Vac valve opened
3/30/2012	4:29:45 PM	Helium MFC set to  20.000000
3/30/2012	4:29:45 PM	H2 MFC set to  0.000000
3/30/2012	4:29:45 PM	BCl3 MFC set to  0.000000
3/30/2012	4:29:45 PM	PH3 MFC set to  0.000000
3/30/2012	4:29:45 PM	SiCl4 MFC set to  0.000000
3/30/2012	4:29:45 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	4:29:45 PM	Tube furnace set to 150
3/30/2012	4:30:15 PM	Helium valve closed
3/30/2012	4:30:15 PM	H2 valve closed
3/30/2012	4:30:15 PM	BCl3 valve closed
3/30/2012	4:30:15 PM	PH3 valve closed
3/30/2012	4:30:15 PM	SiCl4 pre valve closed
3/30/2012	4:30:15 PM	SiCl4 post valve closed
3/30/2012	4:30:15 PM	Bypass valve closed
3/30/2012	4:30:15 PM	Bubbler valve closed
3/30/2012	4:30:15 PM	Main Vac valve opened
3/30/2012	4:30:15 PM	Helium MFC set to  0.000000
3/30/2012	4:30:15 PM	H2 MFC set to  0.000000
3/30/2012	4:30:15 PM	BCl3 MFC set to  0.000000
3/30/2012	4:30:15 PM	PH3 MFC set to  0.000000
3/30/2012	4:30:15 PM	SiCl4 MFC set to  0.000000
3/30/2012	4:30:15 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	4:30:15 PM	Tube furnace set to 150
3/30/2012	4:30:45 PM	H2 valve closed
3/30/2012	4:30:45 PM	BCl3 valve closed
3/30/2012	4:30:45 PM	PH3 valve closed
3/30/2012	4:30:45 PM	SiCl4 pre valve closed
3/30/2012	4:30:45 PM	SiCl4 post valve closed
3/30/2012	4:30:45 PM	Bypass valve closed
3/30/2012	4:30:45 PM	Bubbler valve closed
3/30/2012	4:30:45 PM	Helium valve opened
3/30/2012	4:30:45 PM	Main Vac valve opened
3/30/2012	4:30:45 PM	Helium MFC set to  20.000000
3/30/2012	4:30:45 PM	H2 MFC set to  0.000000
3/30/2012	4:30:45 PM	BCl3 MFC set to  0.000000
3/30/2012	4:30:45 PM	PH3 MFC set to  0.000000
3/30/2012	4:30:45 PM	SiCl4 MFC set to  0.000000
3/30/2012	4:30:45 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	4:30:46 PM	Tube furnace set to 150
3/30/2012	4:31:16 PM	Helium valve closed
3/30/2012	4:31:16 PM	H2 valve closed
3/30/2012	4:31:16 PM	BCl3 valve closed
3/30/2012	4:31:16 PM	PH3 valve closed
3/30/2012	4:31:16 PM	SiCl4 pre valve closed
3/30/2012	4:31:16 PM	SiCl4 post valve closed
3/30/2012	4:31:16 PM	Bypass valve closed
3/30/2012	4:31:16 PM	Bubbler valve closed
3/30/2012	4:31:16 PM	Main Vac valve opened
3/30/2012	4:31:16 PM	Helium MFC set to  0.000000
3/30/2012	4:31:16 PM	H2 MFC set to  0.000000
3/30/2012	4:31:16 PM	BCl3 MFC set to  0.000000
3/30/2012	4:31:16 PM	PH3 MFC set to  0.000000
3/30/2012	4:31:16 PM	SiCl4 MFC set to  0.000000
3/30/2012	4:31:16 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	4:31:16 PM	Tube furnace set to 150
3/30/2012	4:31:46 PM	H2 valve closed
3/30/2012	4:31:46 PM	BCl3 valve closed
3/30/2012	4:31:46 PM	PH3 valve closed
3/30/2012	4:31:46 PM	SiCl4 pre valve closed
3/30/2012	4:31:46 PM	SiCl4 post valve closed
3/30/2012	4:31:46 PM	Bypass valve closed
3/30/2012	4:31:46 PM	Bubbler valve closed
3/30/2012	4:31:46 PM	Helium valve opened
3/30/2012	4:31:46 PM	Main Vac valve opened
3/30/2012	4:31:46 PM	Helium MFC set to  20.000000
3/30/2012	4:31:46 PM	H2 MFC set to  0.000000
3/30/2012	4:31:46 PM	BCl3 MFC set to  0.000000
3/30/2012	4:31:46 PM	PH3 MFC set to  0.000000
3/30/2012	4:31:46 PM	SiCl4 MFC set to  0.000000
3/30/2012	4:31:46 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	4:31:46 PM	Tube furnace set to 150
3/30/2012	4:32:16 PM	Helium valve closed
3/30/2012	4:32:16 PM	H2 valve closed
3/30/2012	4:32:16 PM	BCl3 valve closed
3/30/2012	4:32:16 PM	PH3 valve closed
3/30/2012	4:32:16 PM	SiCl4 pre valve closed
3/30/2012	4:32:16 PM	SiCl4 post valve closed
3/30/2012	4:32:16 PM	Bypass valve closed
3/30/2012	4:32:16 PM	Bubbler valve closed
3/30/2012	4:32:16 PM	Main Vac valve opened
3/30/2012	4:32:16 PM	Helium MFC set to  0.000000
3/30/2012	4:32:16 PM	H2 MFC set to  0.000000
3/30/2012	4:32:16 PM	BCl3 MFC set to  0.000000
3/30/2012	4:32:16 PM	PH3 MFC set to  0.000000
3/30/2012	4:32:16 PM	SiCl4 MFC set to  0.000000
3/30/2012	4:32:16 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	4:32:16 PM	Tube furnace set to 150
3/30/2012	4:32:46 PM	H2 valve closed
3/30/2012	4:32:46 PM	BCl3 valve closed
3/30/2012	4:32:46 PM	PH3 valve closed
3/30/2012	4:32:46 PM	SiCl4 pre valve closed
3/30/2012	4:32:46 PM	SiCl4 post valve closed
3/30/2012	4:32:46 PM	Bypass valve closed
3/30/2012	4:32:46 PM	Bubbler valve closed
3/30/2012	4:32:46 PM	Helium valve opened
3/30/2012	4:32:46 PM	Main Vac valve opened
3/30/2012	4:32:46 PM	Helium MFC set to  20.000000
3/30/2012	4:32:46 PM	H2 MFC set to  0.000000
3/30/2012	4:32:46 PM	BCl3 MFC set to  0.000000
3/30/2012	4:32:46 PM	PH3 MFC set to  0.000000
3/30/2012	4:32:46 PM	SiCl4 MFC set to  0.000000
3/30/2012	4:32:46 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	4:32:47 PM	Tube furnace set to 150
3/30/2012	4:33:17 PM	Helium valve closed
3/30/2012	4:33:17 PM	H2 valve closed
3/30/2012	4:33:17 PM	BCl3 valve closed
3/30/2012	4:33:17 PM	PH3 valve closed
3/30/2012	4:33:17 PM	SiCl4 pre valve closed
3/30/2012	4:33:17 PM	SiCl4 post valve closed
3/30/2012	4:33:17 PM	Bypass valve closed
3/30/2012	4:33:17 PM	Bubbler valve closed
3/30/2012	4:33:17 PM	Main Vac valve opened
3/30/2012	4:33:17 PM	Helium MFC set to  0.000000
3/30/2012	4:33:17 PM	H2 MFC set to  0.000000
3/30/2012	4:33:17 PM	BCl3 MFC set to  0.000000
3/30/2012	4:33:17 PM	PH3 MFC set to  0.000000
3/30/2012	4:33:17 PM	SiCl4 MFC set to  0.000000
3/30/2012	4:33:17 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	4:33:17 PM	Tube furnace set to 150
3/30/2012	4:33:18 PM	Run finished at 4:33 PM
3/30/2012	4:36:35 PM	Main Vac valve closed
3/30/2012	4:36:59 PM	Main Vac valve opened
3/30/2012	4:37:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2012	4:37:01 PM	Recipe started at 4:37 PM
3/30/2012	4:37:01 PM	Helium valve closed
3/30/2012	4:37:01 PM	H2 valve closed
3/30/2012	4:37:01 PM	BCl3 valve closed
3/30/2012	4:37:01 PM	PH3 valve closed
3/30/2012	4:37:01 PM	SiCl4 pre valve closed
3/30/2012	4:37:01 PM	SiCl4 post valve closed
3/30/2012	4:37:01 PM	Main Vac valve closed
3/30/2012	4:37:01 PM	Bubbler valve closed
3/30/2012	4:37:01 PM	Bypass valve opened
3/30/2012	4:37:01 PM	Helium MFC set to  0.000000
3/30/2012	4:37:01 PM	H2 MFC set to  0.000000
3/30/2012	4:37:01 PM	BCl3 MFC set to  0.000000
3/30/2012	4:37:01 PM	PH3 MFC set to  0.000000
3/30/2012	4:37:01 PM	SiCl4 MFC set to  0.000000
3/30/2012	4:37:01 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	4:37:01 PM	Tube furnace set to 0
3/30/2012	4:37:01 PM	Helium valve closed
3/30/2012	4:37:01 PM	H2 valve closed
3/30/2012	4:37:01 PM	BCl3 valve closed
3/30/2012	4:37:01 PM	PH3 valve closed
3/30/2012	4:37:01 PM	SiCl4 pre valve closed
3/30/2012	4:37:01 PM	SiCl4 post valve closed
3/30/2012	4:37:01 PM	Main Vac valve closed
3/30/2012	4:37:01 PM	Bubbler valve closed
3/30/2012	4:37:01 PM	Bypass valve opened
3/30/2012	4:37:01 PM	Helium MFC set to  0.000000
3/30/2012	4:37:01 PM	H2 MFC set to  0.000000
3/30/2012	4:37:02 PM	BCl3 MFC set to  0.000000
3/30/2012	4:37:02 PM	PH3 MFC set to  0.000000
3/30/2012	4:37:02 PM	SiCl4 MFC set to  0.000000
3/30/2012	4:37:02 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	4:37:02 PM	Tube furnace set to 0
3/30/2012	4:37:11 PM	Helium valve closed
3/30/2012	4:37:11 PM	H2 valve closed
3/30/2012	4:37:11 PM	BCl3 valve closed
3/30/2012	4:37:11 PM	PH3 valve closed
3/30/2012	4:37:11 PM	SiCl4 pre valve closed
3/30/2012	4:37:11 PM	SiCl4 post valve closed
3/30/2012	4:37:11 PM	Bypass valve closed
3/30/2012	4:37:11 PM	Bubbler valve closed
3/30/2012	4:37:11 PM	Main Vac valve opened
3/30/2012	4:37:11 PM	Helium MFC set to  0.000000
3/30/2012	4:37:11 PM	H2 MFC set to  0.000000
3/30/2012	4:37:11 PM	BCl3 MFC set to  0.000000
3/30/2012	4:37:11 PM	PH3 MFC set to  0.000000
3/30/2012	4:37:11 PM	SiCl4 MFC set to  0.000000
3/30/2012	4:37:11 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	4:37:11 PM	Tube furnace set to 0
3/30/2012	4:37:12 PM	Run finished at 4:37 PM
3/30/2012	4:37:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2012	4:37:32 PM	Recipe started at 4:37 PM
3/30/2012	4:37:32 PM	Helium valve closed
3/30/2012	4:37:32 PM	H2 valve closed
3/30/2012	4:37:32 PM	BCl3 valve closed
3/30/2012	4:37:32 PM	PH3 valve closed
3/30/2012	4:37:32 PM	SiCl4 pre valve closed
3/30/2012	4:37:32 PM	SiCl4 post valve closed
3/30/2012	4:37:32 PM	Main Vac valve closed
3/30/2012	4:37:32 PM	Bypass valve closed
3/30/2012	4:37:32 PM	Bubbler valve closed
3/30/2012	4:37:32 PM	Helium MFC set to  0.000000
3/30/2012	4:37:32 PM	H2 MFC set to  0.000000
3/30/2012	4:37:32 PM	BCl3 MFC set to  0.000000
3/30/2012	4:37:32 PM	PH3 MFC set to  0.000000
3/30/2012	4:37:32 PM	SiCl4 MFC set to  0.000000
3/30/2012	4:37:32 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	4:37:33 PM	Tube furnace set to 0
3/30/2012	4:37:36 PM	Helium valve closed
3/30/2012	4:37:36 PM	BCl3 valve closed
3/30/2012	4:37:36 PM	PH3 valve closed
3/30/2012	4:37:36 PM	SiCl4 pre valve closed
3/30/2012	4:37:36 PM	SiCl4 post valve closed
3/30/2012	4:37:36 PM	Main Vac valve closed
3/30/2012	4:37:36 PM	Bypass valve closed
3/30/2012	4:37:36 PM	Bubbler valve closed
3/30/2012	4:37:36 PM	H2 valve opened
3/30/2012	4:37:36 PM	Helium MFC set to  0.000000
3/30/2012	4:37:36 PM	H2 MFC set to  500.000000
3/30/2012	4:37:36 PM	BCl3 MFC set to  0.000000
3/30/2012	4:37:36 PM	PH3 MFC set to  0.000000
3/30/2012	4:37:36 PM	SiCl4 MFC set to  0.000000
3/30/2012	4:37:36 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	4:37:36 PM	Tube furnace set to 0
3/30/2012	4:38:38 PM	Helium valve closed
3/30/2012	4:38:38 PM	BCl3 valve closed
3/30/2012	4:38:38 PM	PH3 valve closed
3/30/2012	4:38:38 PM	SiCl4 pre valve closed
3/30/2012	4:38:38 PM	SiCl4 post valve closed
3/30/2012	4:38:38 PM	Main Vac valve closed
3/30/2012	4:38:38 PM	Bypass valve closed
3/30/2012	4:38:38 PM	H2 valve opened
3/30/2012	4:38:38 PM	Bubbler valve opened
3/30/2012	4:38:38 PM	Helium MFC set to  0.000000
3/30/2012	4:38:38 PM	H2 MFC set to  500.000000
3/30/2012	4:38:38 PM	BCl3 MFC set to  0.000000
3/30/2012	4:38:38 PM	PH3 MFC set to  0.000000
3/30/2012	4:38:38 PM	SiCl4 MFC set to  0.000000
3/30/2012	4:38:38 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	4:38:38 PM	Tube furnace set to 0
3/30/2012	4:38:39 PM	Helium valve closed
3/30/2012	4:38:39 PM	BCl3 valve closed
3/30/2012	4:38:39 PM	PH3 valve closed
3/30/2012	4:38:39 PM	SiCl4 pre valve closed
3/30/2012	4:38:39 PM	SiCl4 post valve closed
3/30/2012	4:38:39 PM	Main Vac valve closed
3/30/2012	4:38:39 PM	Bypass valve closed
3/30/2012	4:38:39 PM	H2 valve opened
3/30/2012	4:38:39 PM	Bubbler valve opened
3/30/2012	4:38:39 PM	Helium MFC set to  0.000000
3/30/2012	4:38:39 PM	H2 MFC set to  450.000000
3/30/2012	4:38:39 PM	BCl3 MFC set to  0.000000
3/30/2012	4:38:39 PM	PH3 MFC set to  0.000000
3/30/2012	4:38:39 PM	SiCl4 MFC set to  0.000000
3/30/2012	4:38:39 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	4:38:39 PM	Tube furnace set to 1000
3/30/2012	5:03:39 PM	Helium valve closed
3/30/2012	5:03:39 PM	PH3 valve closed
3/30/2012	5:03:39 PM	Main Vac valve closed
3/30/2012	5:03:39 PM	Bypass valve closed
3/30/2012	5:03:39 PM	H2 valve opened
3/30/2012	5:03:39 PM	BCl3 valve opened
3/30/2012	5:03:39 PM	SiCl4 pre valve opened
3/30/2012	5:03:39 PM	SiCl4 post valve opened
3/30/2012	5:03:39 PM	Bubbler valve opened
3/30/2012	5:03:39 PM	Helium MFC set to  0.000000
3/30/2012	5:03:39 PM	H2 MFC set to  450.000000
3/30/2012	5:03:39 PM	BCl3 MFC set to  1.500000
3/30/2012	5:03:39 PM	PH3 MFC set to  0.000000
3/30/2012	5:03:39 PM	SiCl4 MFC set to  50.000000
3/30/2012	5:03:39 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	5:03:39 PM	Tube furnace set to 1000
3/30/2012	5:08:39 PM	Helium valve closed
3/30/2012	5:08:39 PM	BCl3 valve closed
3/30/2012	5:08:39 PM	PH3 valve closed
3/30/2012	5:08:40 PM	SiCl4 pre valve closed
3/30/2012	5:08:40 PM	SiCl4 post valve closed
3/30/2012	5:08:40 PM	Main Vac valve closed
3/30/2012	5:08:40 PM	Bypass valve closed
3/30/2012	5:08:40 PM	H2 valve opened
3/30/2012	5:08:40 PM	Bubbler valve opened
3/30/2012	5:08:40 PM	Helium MFC set to  0.000000
3/30/2012	5:08:40 PM	H2 MFC set to  500.000000
3/30/2012	5:08:40 PM	BCl3 MFC set to  0.000000
3/30/2012	5:08:40 PM	PH3 MFC set to  0.000000
3/30/2012	5:08:40 PM	SiCl4 MFC set to  0.000000
3/30/2012	5:08:40 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	5:08:40 PM	Tube furnace set to 750
3/30/2012	5:13:40 PM	H2 valve closed
3/30/2012	5:13:40 PM	BCl3 valve closed
3/30/2012	5:13:40 PM	PH3 valve closed
3/30/2012	5:13:40 PM	SiCl4 pre valve closed
3/30/2012	5:13:40 PM	SiCl4 post valve closed
3/30/2012	5:13:40 PM	Main Vac valve closed
3/30/2012	5:13:40 PM	Bypass valve closed
3/30/2012	5:13:40 PM	Helium valve opened
3/30/2012	5:13:40 PM	Bubbler valve opened
3/30/2012	5:13:40 PM	Helium MFC set to  500.000000
3/30/2012	5:13:40 PM	H2 MFC set to  0.000000
3/30/2012	5:13:40 PM	BCl3 MFC set to  0.000000
3/30/2012	5:13:40 PM	PH3 MFC set to  0.000000
3/30/2012	5:13:40 PM	SiCl4 MFC set to  0.000000
3/30/2012	5:13:40 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	5:13:40 PM	Tube furnace set to 0
3/30/2012	5:33:40 PM	Helium valve closed
3/30/2012	5:33:40 PM	H2 valve closed
3/30/2012	5:33:40 PM	BCl3 valve closed
3/30/2012	5:33:40 PM	PH3 valve closed
3/30/2012	5:33:40 PM	SiCl4 pre valve closed
3/30/2012	5:33:40 PM	SiCl4 post valve closed
3/30/2012	5:33:40 PM	Main Vac valve closed
3/30/2012	5:33:40 PM	Bypass valve closed
3/30/2012	5:33:40 PM	Bubbler valve closed
3/30/2012	5:33:40 PM	Helium MFC set to  0.000000
3/30/2012	5:33:40 PM	H2 MFC set to  0.000000
3/30/2012	5:33:40 PM	BCl3 MFC set to  0.000000
3/30/2012	5:33:40 PM	PH3 MFC set to  0.000000
3/30/2012	5:33:40 PM	SiCl4 MFC set to  0.000000
3/30/2012	5:33:40 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	5:33:40 PM	Tube furnace set to 0
3/30/2012	5:33:41 PM	Run finished at 5:33 PM
3/30/2012	6:44:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/30/2012	6:44:36 PM	Recipe started at 6:44 PM
3/30/2012	6:44:36 PM	Helium valve closed
3/30/2012	6:44:36 PM	H2 valve closed
3/30/2012	6:44:36 PM	BCl3 valve closed
3/30/2012	6:44:36 PM	PH3 valve closed
3/30/2012	6:44:36 PM	SiCl4 pre valve closed
3/30/2012	6:44:36 PM	SiCl4 post valve closed
3/30/2012	6:44:36 PM	Main Vac valve closed
3/30/2012	6:44:36 PM	Bypass valve closed
3/30/2012	6:44:36 PM	Bubbler valve closed
3/30/2012	6:44:36 PM	Helium MFC set to  0.000000
3/30/2012	6:44:36 PM	H2 MFC set to  0.000000
3/30/2012	6:44:36 PM	BCl3 MFC set to  0.000000
3/30/2012	6:44:36 PM	PH3 MFC set to  0.000000
3/30/2012	6:44:36 PM	SiCl4 MFC set to  0.000000
3/30/2012	6:44:36 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	6:44:36 PM	Tube furnace set to 0
3/30/2012	6:44:39 PM	H2 valve closed
3/30/2012	6:44:39 PM	BCl3 valve closed
3/30/2012	6:44:39 PM	PH3 valve closed
3/30/2012	6:44:39 PM	SiCl4 pre valve closed
3/30/2012	6:44:39 PM	SiCl4 post valve closed
3/30/2012	6:44:39 PM	Main Vac valve closed
3/30/2012	6:44:39 PM	Bypass valve closed
3/30/2012	6:44:39 PM	Bubbler valve closed
3/30/2012	6:44:39 PM	Helium valve opened
3/30/2012	6:44:39 PM	Helium MFC set to  500.000000
3/30/2012	6:44:39 PM	H2 MFC set to  0.000000
3/30/2012	6:44:39 PM	BCl3 MFC set to  0.000000
3/30/2012	6:44:39 PM	PH3 MFC set to  0.000000
3/30/2012	6:44:39 PM	SiCl4 MFC set to  0.000000
3/30/2012	6:44:39 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	6:44:39 PM	Tube furnace set to 0
3/30/2012	6:44:42 PM	Helium valve closed
3/30/2012	6:44:42 PM	H2 valve closed
3/30/2012	6:44:42 PM	BCl3 valve closed
3/30/2012	6:44:42 PM	PH3 valve closed
3/30/2012	6:44:42 PM	SiCl4 pre valve closed
3/30/2012	6:44:42 PM	SiCl4 post valve closed
3/30/2012	6:44:42 PM	Main Vac valve closed
3/30/2012	6:44:42 PM	Bypass valve closed
3/30/2012	6:44:42 PM	Bubbler valve closed
3/30/2012	6:44:42 PM	Helium MFC set to  0.000000
3/30/2012	6:44:42 PM	H2 MFC set to  0.000000
3/30/2012	6:44:42 PM	BCl3 MFC set to  0.000000
3/30/2012	6:44:42 PM	PH3 MFC set to  0.000000
3/30/2012	6:44:42 PM	SiCl4 MFC set to  0.000000
3/30/2012	6:44:42 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	6:44:42 PM	Tube furnace set to 0
3/30/2012	6:44:43 PM	Run finished at 6:44 PM
3/30/2012	6:44:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/30/2012	6:45:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/30/2012	6:45:41 PM	Recipe started at 6:45 PM
3/30/2012	6:45:41 PM	Helium valve closed
3/30/2012	6:45:41 PM	H2 valve closed
3/30/2012	6:45:41 PM	BCl3 valve closed
3/30/2012	6:45:41 PM	PH3 valve closed
3/30/2012	6:45:41 PM	SiCl4 pre valve closed
3/30/2012	6:45:41 PM	SiCl4 post valve closed
3/30/2012	6:45:41 PM	Main Vac valve closed
3/30/2012	6:45:41 PM	Bypass valve closed
3/30/2012	6:45:41 PM	Bubbler valve closed
3/30/2012	6:45:41 PM	Helium MFC set to  0.000000
3/30/2012	6:45:41 PM	H2 MFC set to  0.000000
3/30/2012	6:45:41 PM	BCl3 MFC set to  0.000000
3/30/2012	6:45:41 PM	PH3 MFC set to  0.000000
3/30/2012	6:45:41 PM	SiCl4 MFC set to  0.000000
3/30/2012	6:45:41 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	6:45:41 PM	Tube furnace set to 0
3/30/2012	6:45:44 PM	H2 valve closed
3/30/2012	6:45:44 PM	BCl3 valve closed
3/30/2012	6:45:44 PM	PH3 valve closed
3/30/2012	6:45:44 PM	SiCl4 pre valve closed
3/30/2012	6:45:44 PM	SiCl4 post valve closed
3/30/2012	6:45:44 PM	Main Vac valve closed
3/30/2012	6:45:44 PM	Bypass valve closed
3/30/2012	6:45:44 PM	Bubbler valve closed
3/30/2012	6:45:44 PM	Helium valve opened
3/30/2012	6:45:44 PM	Helium MFC set to  500.000000
3/30/2012	6:45:44 PM	H2 MFC set to  0.000000
3/30/2012	6:45:44 PM	BCl3 MFC set to  0.000000
3/30/2012	6:45:44 PM	PH3 MFC set to  0.000000
3/30/2012	6:45:44 PM	SiCl4 MFC set to  0.000000
3/30/2012	6:45:44 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	6:45:44 PM	Tube furnace set to 0
3/30/2012	6:45:45 PM	Helium valve closed
3/30/2012	6:45:45 PM	H2 valve closed
3/30/2012	6:45:45 PM	BCl3 valve closed
3/30/2012	6:45:45 PM	PH3 valve closed
3/30/2012	6:45:45 PM	SiCl4 pre valve closed
3/30/2012	6:45:45 PM	SiCl4 post valve closed
3/30/2012	6:45:45 PM	Main Vac valve closed
3/30/2012	6:45:45 PM	Bypass valve closed
3/30/2012	6:45:45 PM	Bubbler valve closed
3/30/2012	6:45:45 PM	Helium MFC set to  0.000000
3/30/2012	6:45:45 PM	H2 MFC set to  0.000000
3/30/2012	6:45:45 PM	BCl3 MFC set to  0.000000
3/30/2012	6:45:45 PM	PH3 MFC set to  0.000000
3/30/2012	6:45:45 PM	SiCl4 MFC set to  0.000000
3/30/2012	6:45:45 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	6:45:45 PM	Tube furnace set to 0
3/30/2012	6:45:46 PM	Run finished at 6:45 PM
3/30/2012	6:45:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/30/2012	6:54:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2012	6:54:03 PM	Recipe started at 6:54 PM
3/30/2012	6:54:03 PM	Helium valve closed
3/30/2012	6:54:03 PM	H2 valve closed
3/30/2012	6:54:03 PM	BCl3 valve closed
3/30/2012	6:54:03 PM	PH3 valve closed
3/30/2012	6:54:03 PM	SiCl4 pre valve closed
3/30/2012	6:54:03 PM	SiCl4 post valve closed
3/30/2012	6:54:03 PM	Main Vac valve closed
3/30/2012	6:54:03 PM	Bubbler valve closed
3/30/2012	6:54:03 PM	Bypass valve opened
3/30/2012	6:54:03 PM	Helium MFC set to  0.000000
3/30/2012	6:54:03 PM	H2 MFC set to  0.000000
3/30/2012	6:54:03 PM	BCl3 MFC set to  0.000000
3/30/2012	6:54:03 PM	PH3 MFC set to  0.000000
3/30/2012	6:54:03 PM	SiCl4 MFC set to  0.000000
3/30/2012	6:54:03 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	6:54:03 PM	Tube furnace set to 0
3/30/2012	6:55:07 PM	Helium valve closed
3/30/2012	6:55:07 PM	H2 valve closed
3/30/2012	6:55:07 PM	BCl3 valve closed
3/30/2012	6:55:07 PM	PH3 valve closed
3/30/2012	6:55:07 PM	SiCl4 pre valve closed
3/30/2012	6:55:07 PM	SiCl4 post valve closed
3/30/2012	6:55:07 PM	Main Vac valve closed
3/30/2012	6:55:07 PM	Bubbler valve closed
3/30/2012	6:55:07 PM	Bypass valve opened
3/30/2012	6:55:07 PM	Helium MFC set to  0.000000
3/30/2012	6:55:07 PM	H2 MFC set to  0.000000
3/30/2012	6:55:07 PM	BCl3 MFC set to  0.000000
3/30/2012	6:55:07 PM	PH3 MFC set to  0.000000
3/30/2012	6:55:07 PM	SiCl4 MFC set to  0.000000
3/30/2012	6:55:07 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	6:55:07 PM	Tube furnace set to 0
3/30/2012	6:56:07 PM	Helium valve closed
3/30/2012	6:56:07 PM	H2 valve closed
3/30/2012	6:56:07 PM	BCl3 valve closed
3/30/2012	6:56:07 PM	PH3 valve closed
3/30/2012	6:56:07 PM	SiCl4 pre valve closed
3/30/2012	6:56:07 PM	SiCl4 post valve closed
3/30/2012	6:56:07 PM	Bypass valve closed
3/30/2012	6:56:07 PM	Bubbler valve closed
3/30/2012	6:56:07 PM	Main Vac valve opened
3/30/2012	6:56:07 PM	Helium MFC set to  0.000000
3/30/2012	6:56:07 PM	H2 MFC set to  0.000000
3/30/2012	6:56:07 PM	BCl3 MFC set to  0.000000
3/30/2012	6:56:07 PM	PH3 MFC set to  0.000000
3/30/2012	6:56:07 PM	SiCl4 MFC set to  0.000000
3/30/2012	6:56:07 PM	Bypass solenoid MFC set to  0.000000
3/30/2012	6:56:07 PM	Tube furnace set to 0
3/30/2012	6:56:08 PM	Run finished at 6:56 PM
3/30/2012	6:56:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
